JPS6348179B2 - - Google Patents

Info

Publication number
JPS6348179B2
JPS6348179B2 JP53152544A JP15254478A JPS6348179B2 JP S6348179 B2 JPS6348179 B2 JP S6348179B2 JP 53152544 A JP53152544 A JP 53152544A JP 15254478 A JP15254478 A JP 15254478A JP S6348179 B2 JPS6348179 B2 JP S6348179B2
Authority
JP
Japan
Prior art keywords
region
oxide film
substrate
forming
silicon oxide
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP53152544A
Other languages
English (en)
Japanese (ja)
Other versions
JPS5578541A (en
Inventor
Yoshuki Hirano
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NEC Corp
Original Assignee
Nippon Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nippon Electric Co Ltd filed Critical Nippon Electric Co Ltd
Priority to JP15254478A priority Critical patent/JPS5578541A/ja
Publication of JPS5578541A publication Critical patent/JPS5578541A/ja
Publication of JPS6348179B2 publication Critical patent/JPS6348179B2/ja
Granted legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05B—CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
    • G05B2219/00—Program-control systems
    • G05B2219/30—Nc systems
    • G05B2219/39—Robotics, robotics to robotics hand
    • G05B2219/39177—Compensation position working point as function of inclination tool, hand

Landscapes

  • Element Separation (AREA)
  • Metal-Oxide And Bipolar Metal-Oxide Semiconductor Integrated Circuits (AREA)
JP15254478A 1978-12-08 1978-12-08 Manufacture of semiconductor device Granted JPS5578541A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP15254478A JPS5578541A (en) 1978-12-08 1978-12-08 Manufacture of semiconductor device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP15254478A JPS5578541A (en) 1978-12-08 1978-12-08 Manufacture of semiconductor device

Publications (2)

Publication Number Publication Date
JPS5578541A JPS5578541A (en) 1980-06-13
JPS6348179B2 true JPS6348179B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1988-09-28

Family

ID=15542771

Family Applications (1)

Application Number Title Priority Date Filing Date
JP15254478A Granted JPS5578541A (en) 1978-12-08 1978-12-08 Manufacture of semiconductor device

Country Status (1)

Country Link
JP (1) JPS5578541A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS59161838A (ja) * 1983-03-07 1984-09-12 Toshiba Corp 半導体装置及びその製造方法
JPS59161859A (ja) * 1983-03-07 1984-09-12 Toshiba Corp 相補型ｍｏｓ半導体装置及びその製造方法

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5292489A (en) * 1976-01-30 1977-08-03 Hitachi Ltd Manufacture of c-mis semiconductor

Also Published As

Publication number Publication date
JPS5578541A (en) 1980-06-13

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