JPS61291336A - 送出装置 - Google Patents

送出装置

Info

Publication number
JPS61291336A
JPS61291336A JP13457385A JP13457385A JPS61291336A JP S61291336 A JPS61291336 A JP S61291336A JP 13457385 A JP13457385 A JP 13457385A JP 13457385 A JP13457385 A JP 13457385A JP S61291336 A JPS61291336 A JP S61291336A
Authority
JP
Japan
Prior art keywords
plate
wafer ring
support claws
bodies
holding
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP13457385A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0422820B2 (enrdf_load_stackoverflow
Inventor
Manabu Goto
学 後藤
Kazuyuki Funatsu
船津　和幸
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Panasonic Holdings Corp
Original Assignee
Matsushita Electric Industrial Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Matsushita Electric Industrial Co Ltd filed Critical Matsushita Electric Industrial Co Ltd
Priority to JP13457385A priority Critical patent/JPS61291336A/ja
Publication of JPS61291336A publication Critical patent/JPS61291336A/ja
Publication of JPH0422820B2 publication Critical patent/JPH0422820B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Warehouses Or Storage Devices (AREA)
  • De-Stacking Of Articles (AREA)
  • Sheets, Magazines, And Separation Thereof (AREA)
JP13457385A 1985-06-20 1985-06-20 送出装置 Granted JPS61291336A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP13457385A JPS61291336A (ja) 1985-06-20 1985-06-20 送出装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP13457385A JPS61291336A (ja) 1985-06-20 1985-06-20 送出装置

Publications (2)

Publication Number Publication Date
JPS61291336A true JPS61291336A (ja) 1986-12-22
JPH0422820B2 JPH0422820B2 (enrdf_load_stackoverflow) 1992-04-20

Family

ID=15131505

Family Applications (1)

Application Number Title Priority Date Filing Date
JP13457385A Granted JPS61291336A (ja) 1985-06-20 1985-06-20 送出装置

Country Status (1)

Country Link
JP (1) JPS61291336A (enrdf_load_stackoverflow)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US10896834B2 (en) 2014-02-25 2021-01-19 Entegris, Inc. Wafer shipper with stacked support rings

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4332084Y1 (enrdf_load_stackoverflow) * 1966-04-14 1968-12-27
JPS5524037U (enrdf_load_stackoverflow) * 1978-08-03 1980-02-16

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4332084Y1 (enrdf_load_stackoverflow) * 1966-04-14 1968-12-27
JPS5524037U (enrdf_load_stackoverflow) * 1978-08-03 1980-02-16

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US10896834B2 (en) 2014-02-25 2021-01-19 Entegris, Inc. Wafer shipper with stacked support rings

Also Published As

Publication number Publication date
JPH0422820B2 (enrdf_load_stackoverflow) 1992-04-20

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