JPH0422820B2 - - Google Patents

Info

Publication number
JPH0422820B2
JPH0422820B2 JP60134573A JP13457385A JPH0422820B2 JP H0422820 B2 JPH0422820 B2 JP H0422820B2 JP 60134573 A JP60134573 A JP 60134573A JP 13457385 A JP13457385 A JP 13457385A JP H0422820 B2 JPH0422820 B2 JP H0422820B2
Authority
JP
Japan
Prior art keywords
plate
bodies
shaped
link member
delivery
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP60134573A
Other languages
English (en)
Japanese (ja)
Other versions
JPS61291336A (ja
Inventor
Manabu Goto
Kazuyuki Funatsu
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Panasonic Holdings Corp
Original Assignee
Matsushita Electric Industrial Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Matsushita Electric Industrial Co Ltd filed Critical Matsushita Electric Industrial Co Ltd
Priority to JP13457385A priority Critical patent/JPS61291336A/ja
Publication of JPS61291336A publication Critical patent/JPS61291336A/ja
Publication of JPH0422820B2 publication Critical patent/JPH0422820B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Warehouses Or Storage Devices (AREA)
  • De-Stacking Of Articles (AREA)
  • Sheets, Magazines, And Separation Thereof (AREA)
JP13457385A 1985-06-20 1985-06-20 送出装置 Granted JPS61291336A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP13457385A JPS61291336A (ja) 1985-06-20 1985-06-20 送出装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP13457385A JPS61291336A (ja) 1985-06-20 1985-06-20 送出装置

Publications (2)

Publication Number Publication Date
JPS61291336A JPS61291336A (ja) 1986-12-22
JPH0422820B2 true JPH0422820B2 (enrdf_load_stackoverflow) 1992-04-20

Family

ID=15131505

Family Applications (1)

Application Number Title Priority Date Filing Date
JP13457385A Granted JPS61291336A (ja) 1985-06-20 1985-06-20 送出装置

Country Status (1)

Country Link
JP (1) JPS61291336A (enrdf_load_stackoverflow)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR20160126020A (ko) 2014-02-25 2016-11-01 엔테그리스, 아이엔씨. 적층형 지지 링을 가지는 웨이퍼 적재기

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4332084Y1 (enrdf_load_stackoverflow) * 1966-04-14 1968-12-27
JPS5845492Y2 (ja) * 1978-08-03 1983-10-15 オ−パツク株式会社 小形モ−タのブラシ装置

Also Published As

Publication number Publication date
JPS61291336A (ja) 1986-12-22

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