JPS61291335A - 半導体移換え装置 - Google Patents

半導体移換え装置

Info

Publication number
JPS61291335A
JPS61291335A JP13508685A JP13508685A JPS61291335A JP S61291335 A JPS61291335 A JP S61291335A JP 13508685 A JP13508685 A JP 13508685A JP 13508685 A JP13508685 A JP 13508685A JP S61291335 A JPS61291335 A JP S61291335A
Authority
JP
Japan
Prior art keywords
cartridge
basket
wafer
wafers
transferred
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP13508685A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0313140B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html
Inventor
Seijirou Kawada
川田　静二郎
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
DENKOO KK
Denkoh Co Ltd
Original Assignee
DENKOO KK
Denkoh Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by DENKOO KK, Denkoh Co Ltd filed Critical DENKOO KK
Priority to JP13508685A priority Critical patent/JPS61291335A/ja
Publication of JPS61291335A publication Critical patent/JPS61291335A/ja
Publication of JPH0313140B2 publication Critical patent/JPH0313140B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Warehouses Or Storage Devices (AREA)
  • Sheets, Magazines, And Separation Thereof (AREA)
JP13508685A 1985-06-19 1985-06-19 半導体移換え装置 Granted JPS61291335A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP13508685A JPS61291335A (ja) 1985-06-19 1985-06-19 半導体移換え装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP13508685A JPS61291335A (ja) 1985-06-19 1985-06-19 半導体移換え装置

Publications (2)

Publication Number Publication Date
JPS61291335A true JPS61291335A (ja) 1986-12-22
JPH0313140B2 JPH0313140B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1991-02-21

Family

ID=15143501

Family Applications (1)

Application Number Title Priority Date Filing Date
JP13508685A Granted JPS61291335A (ja) 1985-06-19 1985-06-19 半導体移換え装置

Country Status (1)

Country Link
JP (1) JPS61291335A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)

Cited By (17)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH01313953A (ja) * 1988-04-25 1989-12-19 Tegal Corp ウェハー支持用のスパチュラ装置およびウェハーの配置方法
JPH02132840A (ja) * 1988-02-12 1990-05-22 Tokyo Electron Ltd 処理装置及びレジスト処理装置及び処理方法及びレジスト処理方法
JPH02263454A (ja) * 1989-03-20 1990-10-26 Tel Sagami Ltd 熱処理装置
JPH02145240U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) * 1989-05-15 1990-12-10
US4984954A (en) * 1988-04-25 1991-01-15 Warenback Douglas H Spatula for wafer transport
JPH0348439A (ja) * 1989-07-17 1991-03-01 Tokyo Electron Sagami Ltd 熱処理装置
JPH0372649A (ja) * 1989-08-11 1991-03-27 Tokyo Electron Sagami Ltd 処理装置
US5055036A (en) * 1991-02-26 1991-10-08 Tokyo Electron Sagami Limited Method of loading and unloading wafer boat
JPH03261161A (ja) * 1990-03-09 1991-11-21 Tokyo Electron Sagami Ltd 縦型熱処理装置
US5100276A (en) * 1987-08-12 1992-03-31 Hitachi, Ltd. Production system using wafer-like carrier jig
US5112641A (en) * 1989-01-28 1992-05-12 Kokusai Electric Co., Ltd. Wafer transfer method in vertical cvd diffusion apparatus
US5164905A (en) * 1987-08-12 1992-11-17 Hitachi, Ltd. Production system with order of processing determination
US5217340A (en) * 1989-01-28 1993-06-08 Kokusai Electric Co., Ltd. Wafer transfer mechanism in vertical CVD diffusion apparatus
JPH0546839U (ja) * 1991-11-29 1993-06-22 株式会社藤森技術研究所 液晶基板移載装置
JPH1092906A (ja) * 1996-09-05 1998-04-10 Samsung Electron Co Ltd 半導体ウェーハ熱処理装置
US6961639B2 (en) 2002-01-29 2005-11-01 Recif, Societe Anonyme Apparatus and process for identification of characters inscribed on a semiconductor wafer containing an orientation mark
US7108476B2 (en) 1998-05-05 2006-09-19 Recif Technologies Sas Method and device for changing a semiconductor wafer position

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5860553A (ja) * 1981-10-05 1983-04-11 Tokyo Denshi Kagaku Kabushiki 縦型自動プラズマ処理装置
JPS61131836U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) * 1985-02-06 1986-08-18

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5860553A (ja) * 1981-10-05 1983-04-11 Tokyo Denshi Kagaku Kabushiki 縦型自動プラズマ処理装置
JPS61131836U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) * 1985-02-06 1986-08-18

Cited By (17)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5100276A (en) * 1987-08-12 1992-03-31 Hitachi, Ltd. Production system using wafer-like carrier jig
US5164905A (en) * 1987-08-12 1992-11-17 Hitachi, Ltd. Production system with order of processing determination
JPH02132840A (ja) * 1988-02-12 1990-05-22 Tokyo Electron Ltd 処理装置及びレジスト処理装置及び処理方法及びレジスト処理方法
JPH01313953A (ja) * 1988-04-25 1989-12-19 Tegal Corp ウェハー支持用のスパチュラ装置およびウェハーの配置方法
US4984954A (en) * 1988-04-25 1991-01-15 Warenback Douglas H Spatula for wafer transport
US5217340A (en) * 1989-01-28 1993-06-08 Kokusai Electric Co., Ltd. Wafer transfer mechanism in vertical CVD diffusion apparatus
US5112641A (en) * 1989-01-28 1992-05-12 Kokusai Electric Co., Ltd. Wafer transfer method in vertical cvd diffusion apparatus
JPH02263454A (ja) * 1989-03-20 1990-10-26 Tel Sagami Ltd 熱処理装置
JPH02145240U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) * 1989-05-15 1990-12-10
JPH0348439A (ja) * 1989-07-17 1991-03-01 Tokyo Electron Sagami Ltd 熱処理装置
JPH0372649A (ja) * 1989-08-11 1991-03-27 Tokyo Electron Sagami Ltd 処理装置
JPH03261161A (ja) * 1990-03-09 1991-11-21 Tokyo Electron Sagami Ltd 縦型熱処理装置
US5055036A (en) * 1991-02-26 1991-10-08 Tokyo Electron Sagami Limited Method of loading and unloading wafer boat
JPH0546839U (ja) * 1991-11-29 1993-06-22 株式会社藤森技術研究所 液晶基板移載装置
JPH1092906A (ja) * 1996-09-05 1998-04-10 Samsung Electron Co Ltd 半導体ウェーハ熱処理装置
US7108476B2 (en) 1998-05-05 2006-09-19 Recif Technologies Sas Method and device for changing a semiconductor wafer position
US6961639B2 (en) 2002-01-29 2005-11-01 Recif, Societe Anonyme Apparatus and process for identification of characters inscribed on a semiconductor wafer containing an orientation mark

Also Published As

Publication number Publication date
JPH0313140B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1991-02-21

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