JPS6128217B2 - - Google Patents
Info
- Publication number
- JPS6128217B2 JPS6128217B2 JP8011778A JP8011778A JPS6128217B2 JP S6128217 B2 JPS6128217 B2 JP S6128217B2 JP 8011778 A JP8011778 A JP 8011778A JP 8011778 A JP8011778 A JP 8011778A JP S6128217 B2 JPS6128217 B2 JP S6128217B2
- Authority
- JP
- Japan
- Prior art keywords
- electrode
- metal
- actual operating
- semiconductor substrate
- operating part
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 239000002184 metal Substances 0.000 claims description 44
- 229910052751 metal Inorganic materials 0.000 claims description 44
- 239000004065 semiconductor Substances 0.000 claims description 28
- 239000000758 substrate Substances 0.000 claims description 6
- 239000012535 impurity Substances 0.000 claims 3
- 230000002093 peripheral effect Effects 0.000 claims 3
- 238000000605 extraction Methods 0.000 claims 1
- 239000012212 insulator Substances 0.000 claims 1
- 150000002739 metals Chemical class 0.000 description 5
- 239000011248 coating agent Substances 0.000 description 3
- 238000000576 coating method Methods 0.000 description 3
- 230000005684 electric field Effects 0.000 description 3
- 239000000463 material Substances 0.000 description 3
- 230000005856 abnormality Effects 0.000 description 2
- 238000009413 insulation Methods 0.000 description 2
- 239000011347 resin Substances 0.000 description 2
- 229920005989 resin Polymers 0.000 description 2
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 1
- 238000011109 contamination Methods 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 230000008034 disappearance Effects 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 230000005669 field effect Effects 0.000 description 1
- 239000011521 glass Substances 0.000 description 1
- 239000011810 insulating material Substances 0.000 description 1
- 238000002955 isolation Methods 0.000 description 1
- 229910052760 oxygen Inorganic materials 0.000 description 1
- 239000001301 oxygen Substances 0.000 description 1
- 238000000926 separation method Methods 0.000 description 1
Landscapes
- Internal Circuitry In Semiconductor Integrated Circuit Devices (AREA)
- Semiconductor Integrated Circuits (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP8011778A JPS558035A (en) | 1978-06-30 | 1978-06-30 | Semiconductor |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP8011778A JPS558035A (en) | 1978-06-30 | 1978-06-30 | Semiconductor |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS558035A JPS558035A (en) | 1980-01-21 |
| JPS6128217B2 true JPS6128217B2 (enrdf_load_stackoverflow) | 1986-06-28 |
Family
ID=13709242
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP8011778A Granted JPS558035A (en) | 1978-06-30 | 1978-06-30 | Semiconductor |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS558035A (enrdf_load_stackoverflow) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS57204152A (en) * | 1981-06-10 | 1982-12-14 | Fujitsu Ltd | Semiconductor device |
-
1978
- 1978-06-30 JP JP8011778A patent/JPS558035A/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS558035A (en) | 1980-01-21 |
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