JPS6126364Y2 - - Google Patents

Info

Publication number
JPS6126364Y2
JPS6126364Y2 JP1982019882U JP1988282U JPS6126364Y2 JP S6126364 Y2 JPS6126364 Y2 JP S6126364Y2 JP 1982019882 U JP1982019882 U JP 1982019882U JP 1988282 U JP1988282 U JP 1988282U JP S6126364 Y2 JPS6126364 Y2 JP S6126364Y2
Authority
JP
Japan
Prior art keywords
liquid nitrogen
shield plate
evaporation source
jacket
electron gun
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP1982019882U
Other languages
English (en)
Japanese (ja)
Other versions
JPS58124467U (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1988282U priority Critical patent/JPS58124467U/ja
Publication of JPS58124467U publication Critical patent/JPS58124467U/ja
Application granted granted Critical
Publication of JPS6126364Y2 publication Critical patent/JPS6126364Y2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Magnetic Heads (AREA)
  • Physical Vapour Deposition (AREA)
JP1988282U 1982-02-17 1982-02-17 真空蒸着装置 Granted JPS58124467U (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1988282U JPS58124467U (ja) 1982-02-17 1982-02-17 真空蒸着装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1988282U JPS58124467U (ja) 1982-02-17 1982-02-17 真空蒸着装置

Publications (2)

Publication Number Publication Date
JPS58124467U JPS58124467U (ja) 1983-08-24
JPS6126364Y2 true JPS6126364Y2 (enrdf_load_stackoverflow) 1986-08-07

Family

ID=30032070

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1988282U Granted JPS58124467U (ja) 1982-02-17 1982-02-17 真空蒸着装置

Country Status (1)

Country Link
JP (1) JPS58124467U (enrdf_load_stackoverflow)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6073216U (ja) * 1983-10-25 1985-05-23 太陽誘電株式会社 磁性膜作製装置

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5653768B2 (enrdf_load_stackoverflow) * 1972-05-18 1981-12-21
JPS5737473Y2 (enrdf_load_stackoverflow) * 1978-09-11 1982-08-18

Also Published As

Publication number Publication date
JPS58124467U (ja) 1983-08-24

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