JPS5684471A - Vacuum evaporation - Google Patents

Vacuum evaporation

Info

Publication number
JPS5684471A
JPS5684471A JP16010379A JP16010379A JPS5684471A JP S5684471 A JPS5684471 A JP S5684471A JP 16010379 A JP16010379 A JP 16010379A JP 16010379 A JP16010379 A JP 16010379A JP S5684471 A JPS5684471 A JP S5684471A
Authority
JP
Japan
Prior art keywords
evaporation
vacuum chamber
carried out
cans
contact part
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP16010379A
Other languages
Japanese (ja)
Other versions
JPS608305B2 (en
Inventor
Goro Akashi
Ryuji Shirahata
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fujifilm Holdings Corp
Original Assignee
Fuji Photo Film Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fuji Photo Film Co Ltd filed Critical Fuji Photo Film Co Ltd
Priority to JP16010379A priority Critical patent/JPS608305B2/en
Priority to DE19803046564 priority patent/DE3046564A1/en
Publication of JPS5684471A publication Critical patent/JPS5684471A/en
Priority to US06/443,996 priority patent/US4403002A/en
Priority to US06/498,441 priority patent/US4454836A/en
Publication of JPS608305B2 publication Critical patent/JPS608305B2/en
Expired legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/24—Vacuum evaporation
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/56—Apparatus specially adapted for continuous coating; Arrangements for maintaining the vacuum, e.g. vacuum locks
    • C23C14/562—Apparatus specially adapted for continuous coating; Arrangements for maintaining the vacuum, e.g. vacuum locks for coating elongated substrates

Landscapes

  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Physical Vapour Deposition (AREA)
  • Manufacturing Of Magnetic Record Carriers (AREA)

Abstract

PURPOSE:To enhance the efficiency of evaporation compared to a conventional process by a method wherein a tape like substrate is moved through a contact part between at least two cans rotating to a reverse direction and obliquely projecting vapor dsposition is carried out to the above described substrate from a lower evaporating source. CONSTITUTION:At least two cylindrical cans 4, 5 rotating to a reverse direction are made adjacent so as to be contacted in a vacuum chamber consisted of a low vacuum chamber 1 and a high vacuum chamber 2 through a partition wall 6 and flexible substrates 3, 3' are moved through the contact part 7 between the cans 4, 5 and the obliquely projecting vapor deposition of Fe, Co or Ni is carried out onto the substrate 3 from the evaporating source arranged to a lower part of the contact part 7 through masks 10, 11 by an appropriate method. By this method, the evaporation is carried out to both surfaces of the substrates 3, 3' and the efficiency of evaporation is enhanced. This method is suitable for producing a magnetic recording medium due to the formation of a magnetic membrane of a ferromagnetic alloy.
JP16010379A 1979-12-10 1979-12-10 Vacuum deposition method Expired JPS608305B2 (en)

Priority Applications (4)

Application Number Priority Date Filing Date Title
JP16010379A JPS608305B2 (en) 1979-12-10 1979-12-10 Vacuum deposition method
DE19803046564 DE3046564A1 (en) 1979-12-10 1980-12-10 Vacuum vapour deposition plant for strip substrates - esp. for depositing magnetic metal or alloy films onto polymer tape to mfr. magnetic recording media
US06/443,996 US4403002A (en) 1979-12-10 1982-11-23 Vacuum evaporating apparatus
US06/498,441 US4454836A (en) 1979-12-10 1983-05-26 Vacuum evaporating apparatus utilizing multiple rotatable cans

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP16010379A JPS608305B2 (en) 1979-12-10 1979-12-10 Vacuum deposition method

Publications (2)

Publication Number Publication Date
JPS5684471A true JPS5684471A (en) 1981-07-09
JPS608305B2 JPS608305B2 (en) 1985-03-01

Family

ID=15707907

Family Applications (1)

Application Number Title Priority Date Filing Date
JP16010379A Expired JPS608305B2 (en) 1979-12-10 1979-12-10 Vacuum deposition method

Country Status (1)

Country Link
JP (1) JPS608305B2 (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS58116241A (en) * 1981-12-28 1983-07-11 Hashimoto Forming Co Ltd Fixing method for molding buffer method

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH01219234A (en) * 1988-02-25 1989-09-01 Natl House Ind Co Ltd Anchor bolt

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS58116241A (en) * 1981-12-28 1983-07-11 Hashimoto Forming Co Ltd Fixing method for molding buffer method

Also Published As

Publication number Publication date
JPS608305B2 (en) 1985-03-01

Similar Documents

Publication Publication Date Title
JPS5754269A (en) Apparatus for forming film in vacuum
JPS567231A (en) Vapor deposition film type magnetic recording material and its production
JPS56165932A (en) Production of magnetic recording medium
JPS5684471A (en) Vacuum evaporation
JPS5720919A (en) Magnetic recording medium and its manufacture
JPS57200945A (en) Magnetic recording medium
JPS5684470A (en) Vacuum evaporation
JPS57164431A (en) Magnetic recording medium and its manufacture
JPS5485398A (en) Magnetic recording medium
JPS5724022A (en) Production of magnetic recording substance
JPS567235A (en) Magnetic recording medium and its production
JPS5755535A (en) Production of magnetic recording medium
JPS53132310A (en) Production of magnetic recording media
JPS56165933A (en) Production of magnetic recording body
JPS5671831A (en) Manufacture for magnetic recording medium
EP0190854A3 (en) Method for producing a perpendicular magnetic recording medium
JPS5383709A (en) Preparation of magnetic recording medium
JPS567238A (en) Production of magnetic recording medium
JPS5772307A (en) Alloy film material for magneticstorage and manufacture of the same
JPS58147559A (en) Sputtering device
JPS5755534A (en) Production of magnetic recording medium
JPS5419200A (en) Magnetic recording medium process
JPS54140997A (en) Magnetic memory medium
JPS5733432A (en) Magnetic recording medium and its production
JPS57153411A (en) Magnetic recording medium and its manufacture