JPS62203264U - - Google Patents

Info

Publication number
JPS62203264U
JPS62203264U JP9177086U JP9177086U JPS62203264U JP S62203264 U JPS62203264 U JP S62203264U JP 9177086 U JP9177086 U JP 9177086U JP 9177086 U JP9177086 U JP 9177086U JP S62203264 U JPS62203264 U JP S62203264U
Authority
JP
Japan
Prior art keywords
electron beam
vacuum container
vacuum
coil
substrate
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP9177086U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP9177086U priority Critical patent/JPS62203264U/ja
Publication of JPS62203264U publication Critical patent/JPS62203264U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Physical Vapour Deposition (AREA)
JP9177086U 1986-06-16 1986-06-16 Pending JPS62203264U (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP9177086U JPS62203264U (enrdf_load_stackoverflow) 1986-06-16 1986-06-16

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP9177086U JPS62203264U (enrdf_load_stackoverflow) 1986-06-16 1986-06-16

Publications (1)

Publication Number Publication Date
JPS62203264U true JPS62203264U (enrdf_load_stackoverflow) 1987-12-25

Family

ID=30952866

Family Applications (1)

Application Number Title Priority Date Filing Date
JP9177086U Pending JPS62203264U (enrdf_load_stackoverflow) 1986-06-16 1986-06-16

Country Status (1)

Country Link
JP (1) JPS62203264U (enrdf_load_stackoverflow)

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6169264A (ja) * 1984-06-25 1986-04-09 テクトロニツクス・インコ−ポレイテツド 画像符号化装置

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6169264A (ja) * 1984-06-25 1986-04-09 テクトロニツクス・インコ−ポレイテツド 画像符号化装置

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