JPH0189955U - - Google Patents
Info
- Publication number
- JPH0189955U JPH0189955U JP18521887U JP18521887U JPH0189955U JP H0189955 U JPH0189955 U JP H0189955U JP 18521887 U JP18521887 U JP 18521887U JP 18521887 U JP18521887 U JP 18521887U JP H0189955 U JPH0189955 U JP H0189955U
- Authority
- JP
- Japan
- Prior art keywords
- electron beam
- evaporation
- crucible
- continuous vacuum
- electron
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000010894 electron beam technology Methods 0.000 claims description 6
- 238000001704 evaporation Methods 0.000 claims description 4
- 230000008020 evaporation Effects 0.000 claims description 4
- 238000007738 vacuum evaporation Methods 0.000 claims description 4
- 239000002184 metal Substances 0.000 claims description 2
- 239000000758 substrate Substances 0.000 claims description 2
- 229910000831 Steel Inorganic materials 0.000 claims 1
- 238000010438 heat treatment Methods 0.000 claims 1
- 238000007747 plating Methods 0.000 claims 1
- 239000010959 steel Substances 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 2
- 230000008021 deposition Effects 0.000 description 1
- 238000007789 sealing Methods 0.000 description 1
- 238000007740 vapor deposition Methods 0.000 description 1
Landscapes
- Physical Vapour Deposition (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP18521887U JPH0189955U (enrdf_load_stackoverflow) | 1987-12-04 | 1987-12-04 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP18521887U JPH0189955U (enrdf_load_stackoverflow) | 1987-12-04 | 1987-12-04 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0189955U true JPH0189955U (enrdf_load_stackoverflow) | 1989-06-13 |
Family
ID=31476544
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP18521887U Pending JPH0189955U (enrdf_load_stackoverflow) | 1987-12-04 | 1987-12-04 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0189955U (enrdf_load_stackoverflow) |
-
1987
- 1987-12-04 JP JP18521887U patent/JPH0189955U/ja active Pending
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