JPS58124467U - 真空蒸着装置 - Google Patents

真空蒸着装置

Info

Publication number
JPS58124467U
JPS58124467U JP1988282U JP1988282U JPS58124467U JP S58124467 U JPS58124467 U JP S58124467U JP 1988282 U JP1988282 U JP 1988282U JP 1988282 U JP1988282 U JP 1988282U JP S58124467 U JPS58124467 U JP S58124467U
Authority
JP
Japan
Prior art keywords
evaporation source
vacuum deposition
deposition equipment
bell jar
evaporated particles
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP1988282U
Other languages
English (en)
Japanese (ja)
Other versions
JPS6126364Y2 (enrdf_load_stackoverflow
Inventor
斉藤　勇夫
伊井　享
川井　孝雄
Original Assignee
日本真空技術株式会社
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 日本真空技術株式会社 filed Critical 日本真空技術株式会社
Priority to JP1988282U priority Critical patent/JPS58124467U/ja
Publication of JPS58124467U publication Critical patent/JPS58124467U/ja
Application granted granted Critical
Publication of JPS6126364Y2 publication Critical patent/JPS6126364Y2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Magnetic Heads (AREA)
  • Physical Vapour Deposition (AREA)
JP1988282U 1982-02-17 1982-02-17 真空蒸着装置 Granted JPS58124467U (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1988282U JPS58124467U (ja) 1982-02-17 1982-02-17 真空蒸着装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1988282U JPS58124467U (ja) 1982-02-17 1982-02-17 真空蒸着装置

Publications (2)

Publication Number Publication Date
JPS58124467U true JPS58124467U (ja) 1983-08-24
JPS6126364Y2 JPS6126364Y2 (enrdf_load_stackoverflow) 1986-08-07

Family

ID=30032070

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1988282U Granted JPS58124467U (ja) 1982-02-17 1982-02-17 真空蒸着装置

Country Status (1)

Country Link
JP (1) JPS58124467U (enrdf_load_stackoverflow)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6073216U (ja) * 1983-10-25 1985-05-23 太陽誘電株式会社 磁性膜作製装置

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4915356A (enrdf_load_stackoverflow) * 1972-05-18 1974-02-09
JPS5540597U (enrdf_load_stackoverflow) * 1978-09-11 1980-03-15

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4915356A (enrdf_load_stackoverflow) * 1972-05-18 1974-02-09
JPS5540597U (enrdf_load_stackoverflow) * 1978-09-11 1980-03-15

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6073216U (ja) * 1983-10-25 1985-05-23 太陽誘電株式会社 磁性膜作製装置

Also Published As

Publication number Publication date
JPS6126364Y2 (enrdf_load_stackoverflow) 1986-08-07

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