JPH01119064U - - Google Patents

Info

Publication number
JPH01119064U
JPH01119064U JP1121788U JP1121788U JPH01119064U JP H01119064 U JPH01119064 U JP H01119064U JP 1121788 U JP1121788 U JP 1121788U JP 1121788 U JP1121788 U JP 1121788U JP H01119064 U JPH01119064 U JP H01119064U
Authority
JP
Japan
Prior art keywords
molecular beam
substrate
beam source
opening
crystal growth
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP1121788U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1121788U priority Critical patent/JPH01119064U/ja
Publication of JPH01119064U publication Critical patent/JPH01119064U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Crystals, And After-Treatments Of Crystals (AREA)
  • Physical Deposition Of Substances That Are Components Of Semiconductor Devices (AREA)
JP1121788U 1988-02-01 1988-02-01 Pending JPH01119064U (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1121788U JPH01119064U (enrdf_load_stackoverflow) 1988-02-01 1988-02-01

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1121788U JPH01119064U (enrdf_load_stackoverflow) 1988-02-01 1988-02-01

Publications (1)

Publication Number Publication Date
JPH01119064U true JPH01119064U (enrdf_load_stackoverflow) 1989-08-11

Family

ID=31219576

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1121788U Pending JPH01119064U (enrdf_load_stackoverflow) 1988-02-01 1988-02-01

Country Status (1)

Country Link
JP (1) JPH01119064U (enrdf_load_stackoverflow)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH01239085A (ja) * 1988-03-18 1989-09-25 Fujitsu Ltd ガスソースｍｂｅ装置

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH01239085A (ja) * 1988-03-18 1989-09-25 Fujitsu Ltd ガスソースｍｂｅ装置

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