JPH01119064U - - Google Patents

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Publication number
JPH01119064U
JPH01119064U JP1121788U JP1121788U JPH01119064U JP H01119064 U JPH01119064 U JP H01119064U JP 1121788 U JP1121788 U JP 1121788U JP 1121788 U JP1121788 U JP 1121788U JP H01119064 U JPH01119064 U JP H01119064U
Authority
JP
Japan
Prior art keywords
molecular beam
substrate
beam source
opening
crystal growth
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP1121788U
Other languages
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1121788U priority Critical patent/JPH01119064U/ja
Publication of JPH01119064U publication Critical patent/JPH01119064U/ja
Pending legal-status Critical Current

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Landscapes

  • Crystals, And After-Treatments Of Crystals (AREA)
  • Physical Deposition Of Substances That Are Components Of Semiconductor Devices (AREA)

Description

【図面の簡単な説明】[Brief explanation of the drawing]

第１図は本考案の１具体例の分子線結晶成長装
置の概念図である。 １：成長室、２：液体窒素シユラウド、３：基
板、４：マニピユレータ、５：分子線源、６：シ
ヤツター、７：遮蔽板。 FIG. 1 is a conceptual diagram of a molecular beam crystal growth apparatus as a specific example of the present invention. 1: growth chamber, 2: liquid nitrogen shroud, 3: substrate, 4: manipulator, 5: molecular beam source, 6: shutter, 7: shielding plate.

Claims (1)

【実用新案登録請求の範囲】[Scope of utility model registration request] 基板を収容する成長室と、該基板に向けて配置
する分子線源と、分子線源の前方に設けたシヤツ
ターとを有する分子線結晶成長装置において、基
板に向かう分子線束用の開口を有する遮蔽板を成
長室のシユラウドに結合し、該開口上にシヤツタ
ーを移動することにより、分子線源からの蒸気を
完全に遮断するようにしたことを特徴とする分子
線結晶成長装置。 A shield having an opening for a molecular beam directed toward the substrate in a molecular beam crystal growth apparatus having a growth chamber containing a substrate, a molecular beam source disposed facing the substrate, and a shutter provided in front of the molecular beam source. 1. A molecular beam crystal growth apparatus characterized in that a plate is connected to a shroud of a growth chamber and a shutter is moved above the opening to completely shut off vapor from a molecular beam source.
JP1121788U 1988-02-01 1988-02-01 Pending JPH01119064U (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1121788U JPH01119064U (en) 1988-02-01 1988-02-01

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1121788U JPH01119064U (en) 1988-02-01 1988-02-01

Publications (1)

Publication Number Publication Date
JPH01119064U true JPH01119064U (en) 1989-08-11

Family

ID=31219576

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1121788U Pending JPH01119064U (en) 1988-02-01 1988-02-01

Country Status (1)

Country Link
JP (1) JPH01119064U (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH01239085A (en) * 1988-03-18 1989-09-25 Fujitsu Ltd Gas source mbe apparatus

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH01239085A (en) * 1988-03-18 1989-09-25 Fujitsu Ltd Gas source mbe apparatus

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