JPS5540597U - - Google Patents

Info

Publication number
JPS5540597U
JPS5540597U JP12446378U JP12446378U JPS5540597U JP S5540597 U JPS5540597 U JP S5540597U JP 12446378 U JP12446378 U JP 12446378U JP 12446378 U JP12446378 U JP 12446378U JP S5540597 U JPS5540597 U JP S5540597U
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP12446378U
Other languages
Japanese (ja)
Other versions
JPS5737473Y2 (enrdf_load_stackoverflow
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1978124463U priority Critical patent/JPS5737473Y2/ja
Publication of JPS5540597U publication Critical patent/JPS5540597U/ja
Application granted granted Critical
Publication of JPS5737473Y2 publication Critical patent/JPS5737473Y2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Physical Vapour Deposition (AREA)
  • Thin Magnetic Films (AREA)
JP1978124463U 1978-09-11 1978-09-11 Expired JPS5737473Y2 (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1978124463U JPS5737473Y2 (enrdf_load_stackoverflow) 1978-09-11 1978-09-11

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1978124463U JPS5737473Y2 (enrdf_load_stackoverflow) 1978-09-11 1978-09-11

Publications (2)

Publication Number Publication Date
JPS5540597U true JPS5540597U (enrdf_load_stackoverflow) 1980-03-15
JPS5737473Y2 JPS5737473Y2 (enrdf_load_stackoverflow) 1982-08-18

Family

ID=29084486

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1978124463U Expired JPS5737473Y2 (enrdf_load_stackoverflow) 1978-09-11 1978-09-11

Country Status (1)

Country Link
JP (1) JPS5737473Y2 (enrdf_load_stackoverflow)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS58124467U (ja) * 1982-02-17 1983-08-24 日本真空技術株式会社 真空蒸着装置
JPS61288067A (ja) * 1985-06-13 1986-12-18 Hitachi Ltd スパツタ装置

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS58124467U (ja) * 1982-02-17 1983-08-24 日本真空技術株式会社 真空蒸着装置
JPS61288067A (ja) * 1985-06-13 1986-12-18 Hitachi Ltd スパツタ装置

Also Published As

Publication number Publication date
JPS5737473Y2 (enrdf_load_stackoverflow) 1982-08-18

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