JPS61263155A - 固体撮像装置およびその製造方法 - Google Patents

固体撮像装置およびその製造方法

Info

Publication number
JPS61263155A
JPS61263155A JP60104319A JP10431985A JPS61263155A JP S61263155 A JPS61263155 A JP S61263155A JP 60104319 A JP60104319 A JP 60104319A JP 10431985 A JP10431985 A JP 10431985A JP S61263155 A JPS61263155 A JP S61263155A
Authority
JP
Japan
Prior art keywords
solid
groove
imaging device
region
state imaging
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP60104319A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0521350B2 (enrdf_load_stackoverflow
Inventor
Nobuo Suzuki
伸夫 鈴木
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toshiba Corp
Original Assignee
Toshiba Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toshiba Corp filed Critical Toshiba Corp
Priority to JP60104319A priority Critical patent/JPS61263155A/ja
Publication of JPS61263155A publication Critical patent/JPS61263155A/ja
Publication of JPH0521350B2 publication Critical patent/JPH0521350B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10F—INORGANIC SEMICONDUCTOR DEVICES SENSITIVE TO INFRARED RADIATION, LIGHT, ELECTROMAGNETIC RADIATION OF SHORTER WAVELENGTH OR CORPUSCULAR RADIATION
    • H10F99/00—Subject matter not provided for in other groups of this subclass

Landscapes

  • Solid State Image Pick-Up Elements (AREA)
  • Transforming Light Signals Into Electric Signals (AREA)
JP60104319A 1985-05-16 1985-05-16 固体撮像装置およびその製造方法 Granted JPS61263155A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP60104319A JPS61263155A (ja) 1985-05-16 1985-05-16 固体撮像装置およびその製造方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP60104319A JPS61263155A (ja) 1985-05-16 1985-05-16 固体撮像装置およびその製造方法

Publications (2)

Publication Number Publication Date
JPS61263155A true JPS61263155A (ja) 1986-11-21
JPH0521350B2 JPH0521350B2 (enrdf_load_stackoverflow) 1993-03-24

Family

ID=14377612

Family Applications (1)

Application Number Title Priority Date Filing Date
JP60104319A Granted JPS61263155A (ja) 1985-05-16 1985-05-16 固体撮像装置およびその製造方法

Country Status (1)

Country Link
JP (1) JPS61263155A (enrdf_load_stackoverflow)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS63142854A (ja) * 1986-12-05 1988-06-15 Nec Corp 固体撮像素子の製造方法
JPH01280354A (ja) * 1988-05-06 1989-11-10 Nec Corp 固体撮像素子

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS577979A (en) * 1980-06-17 1982-01-16 Fujitsu Ltd Solid-state image picking up device
JPS6086975A (ja) * 1983-10-19 1985-05-16 Matsushita Electronics Corp 固体撮像装置

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS577979A (en) * 1980-06-17 1982-01-16 Fujitsu Ltd Solid-state image picking up device
JPS6086975A (ja) * 1983-10-19 1985-05-16 Matsushita Electronics Corp 固体撮像装置

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS63142854A (ja) * 1986-12-05 1988-06-15 Nec Corp 固体撮像素子の製造方法
JPH01280354A (ja) * 1988-05-06 1989-11-10 Nec Corp 固体撮像素子

Also Published As

Publication number Publication date
JPH0521350B2 (enrdf_load_stackoverflow) 1993-03-24

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