JPS61247609A - 三弗化窒素の精製方法 - Google Patents

三弗化窒素の精製方法

Info

Publication number
JPS61247609A
JPS61247609A JP8879985A JP8879985A JPS61247609A JP S61247609 A JPS61247609 A JP S61247609A JP 8879985 A JP8879985 A JP 8879985A JP 8879985 A JP8879985 A JP 8879985A JP S61247609 A JPS61247609 A JP S61247609A
Authority
JP
Japan
Prior art keywords
impurities
activated carbon
active carbon
nitrogen
gas
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP8879985A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0242766B2 (enrdf_load_stackoverflow
Inventor
Koichi Katamura
浩一 片村
Kiyomitsu Sugano
菅野　清光
Hidetoshi Nakayama
秀俊 中山
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Resonac Holdings Corp
Original Assignee
Showa Denko KK
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Showa Denko KK filed Critical Showa Denko KK
Priority to JP8879985A priority Critical patent/JPS61247609A/ja
Publication of JPS61247609A publication Critical patent/JPS61247609A/ja
Publication of JPH0242766B2 publication Critical patent/JPH0242766B2/ja
Granted legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C01—INORGANIC CHEMISTRY
    • C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
    • C01B21/00—Nitrogen; Compounds thereof
    • C01B21/082—Compounds containing nitrogen and non-metals and optionally metals
    • C01B21/083—Compounds containing nitrogen and non-metals and optionally metals containing one or more halogen atoms
    • C01B21/0832—Binary compounds of nitrogen with halogens

Landscapes

  • Chemical & Material Sciences (AREA)
  • Organic Chemistry (AREA)
  • Inorganic Chemistry (AREA)
  • Treating Waste Gases (AREA)
JP8879985A 1985-04-26 1985-04-26 三弗化窒素の精製方法 Granted JPS61247609A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP8879985A JPS61247609A (ja) 1985-04-26 1985-04-26 三弗化窒素の精製方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP8879985A JPS61247609A (ja) 1985-04-26 1985-04-26 三弗化窒素の精製方法

Publications (2)

Publication Number Publication Date
JPS61247609A true JPS61247609A (ja) 1986-11-04
JPH0242766B2 JPH0242766B2 (enrdf_load_stackoverflow) 1990-09-26

Family

ID=13952908

Family Applications (1)

Application Number Title Priority Date Filing Date
JP8879985A Granted JPS61247609A (ja) 1985-04-26 1985-04-26 三弗化窒素の精製方法

Country Status (1)

Country Link
JP (1) JPS61247609A (enrdf_load_stackoverflow)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO1989004444A1 (en) * 1987-11-04 1989-05-18 Mitsui Toatsu Chemicals, Inc. Process for liquefying, concentrating and purifying nitrogen trifluoride
JP2002068717A (ja) * 2000-08-31 2002-03-08 Nippon Sanso Corp 三フッ化窒素の精製方法

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO1989004444A1 (en) * 1987-11-04 1989-05-18 Mitsui Toatsu Chemicals, Inc. Process for liquefying, concentrating and purifying nitrogen trifluoride
JP2002068717A (ja) * 2000-08-31 2002-03-08 Nippon Sanso Corp 三フッ化窒素の精製方法

Also Published As

Publication number Publication date
JPH0242766B2 (enrdf_load_stackoverflow) 1990-09-26

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Legal Events

Date Code Title Description
EXPY Cancellation because of completion of term