JPS61245453A - 線状電子ビ−ム熱処理装置 - Google Patents

線状電子ビ−ム熱処理装置

Info

Publication number
JPS61245453A
JPS61245453A JP60085517A JP8551785A JPS61245453A JP S61245453 A JPS61245453 A JP S61245453A JP 60085517 A JP60085517 A JP 60085517A JP 8551785 A JP8551785 A JP 8551785A JP S61245453 A JPS61245453 A JP S61245453A
Authority
JP
Japan
Prior art keywords
cathode
anode
electron beam
rectangular
electron
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP60085517A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0212377B2 (enrdf_load_stackoverflow
Inventor
Shuichi Saito
修一 齋藤
Hidekazu Okabayashi
岡林　秀和
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
National Institute of Advanced Industrial Science and Technology AIST
Original Assignee
Agency of Industrial Science and Technology
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Agency of Industrial Science and Technology filed Critical Agency of Industrial Science and Technology
Priority to JP60085517A priority Critical patent/JPS61245453A/ja
Publication of JPS61245453A publication Critical patent/JPS61245453A/ja
Publication of JPH0212377B2 publication Critical patent/JPH0212377B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Electron Sources, Ion Sources (AREA)
JP60085517A 1985-04-23 1985-04-23 線状電子ビ−ム熱処理装置 Granted JPS61245453A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP60085517A JPS61245453A (ja) 1985-04-23 1985-04-23 線状電子ビ−ム熱処理装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP60085517A JPS61245453A (ja) 1985-04-23 1985-04-23 線状電子ビ−ム熱処理装置

Publications (2)

Publication Number Publication Date
JPS61245453A true JPS61245453A (ja) 1986-10-31
JPH0212377B2 JPH0212377B2 (enrdf_load_stackoverflow) 1990-03-20

Family

ID=13861101

Family Applications (1)

Application Number Title Priority Date Filing Date
JP60085517A Granted JPS61245453A (ja) 1985-04-23 1985-04-23 線状電子ビ−ム熱処理装置

Country Status (1)

Country Link
JP (1) JPS61245453A (enrdf_load_stackoverflow)

Also Published As

Publication number Publication date
JPH0212377B2 (enrdf_load_stackoverflow) 1990-03-20

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Legal Events

Date Code Title Description
EXPY Cancellation because of completion of term