JPS61220332A - エッチング終点判定方法 - Google Patents

エッチング終点判定方法

Info

Publication number
JPS61220332A
JPS61220332A JP6061985A JP6061985A JPS61220332A JP S61220332 A JPS61220332 A JP S61220332A JP 6061985 A JP6061985 A JP 6061985A JP 6061985 A JP6061985 A JP 6061985A JP S61220332 A JPS61220332 A JP S61220332A
Authority
JP
Japan
Prior art keywords
end point
point determination
etching
plasma light
conversion means
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP6061985A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0455329B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html
Inventor
Keiji Tada
多田　啓司
Masato Matsuoka
松岡　真人
Tomoyoshi Nishihara
西原　伴良
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP6061985A priority Critical patent/JPS61220332A/ja
Publication of JPS61220332A publication Critical patent/JPS61220332A/ja
Publication of JPH0455329B2 publication Critical patent/JPH0455329B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
    • H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
    • H01L21/30—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26
    • H01L21/302—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26 to change their surface-physical characteristics or shape, e.g. etching, polishing, cutting

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Drying Of Semiconductors (AREA)
JP6061985A 1985-03-27 1985-03-27 エッチング終点判定方法 Granted JPS61220332A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP6061985A JPS61220332A (ja) 1985-03-27 1985-03-27 エッチング終点判定方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP6061985A JPS61220332A (ja) 1985-03-27 1985-03-27 エッチング終点判定方法

Publications (2)

Publication Number Publication Date
JPS61220332A true JPS61220332A (ja) 1986-09-30
JPH0455329B2 JPH0455329B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1992-09-03

Family

ID=13147473

Family Applications (1)

Application Number Title Priority Date Filing Date
JP6061985A Granted JPS61220332A (ja) 1985-03-27 1985-03-27 エッチング終点判定方法

Country Status (1)

Country Link
JP (1) JPS61220332A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH01226153A (ja) * 1988-03-07 1989-09-08 Hitachi Ltd エッチング終点判定装置
JPH01235336A (ja) * 1988-03-16 1989-09-20 Hitachi Ltd エッチング終点判定装置
JPH01241127A (ja) * 1988-03-23 1989-09-26 Hitachi Ltd エッチング終点判定方法
JPH0348423A (ja) * 1989-07-17 1991-03-01 Hitachi Ltd 終点判定方法および装置
JPH05267224A (ja) * 1992-03-19 1993-10-15 Nec Yamaguchi Ltd ドライエッチング装置
US5374327A (en) * 1992-04-28 1994-12-20 Tokyo Electron Limited Plasma processing method

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5563830A (en) * 1978-11-08 1980-05-14 Chiyou Lsi Gijutsu Kenkyu Kumiai End point detection method and its apparatus
JPS56133466A (en) * 1980-03-24 1981-10-19 Anelva Corp Plasma spectrum monitoring apparatus
JPS58215030A (ja) * 1982-06-08 1983-12-14 Kokusai Electric Co Ltd 半導体基板のドライエツチング終了時点検出装置
JPS58216423A (ja) * 1982-06-10 1983-12-16 Hitachi Ltd エツチング終点検出装置

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5563830A (en) * 1978-11-08 1980-05-14 Chiyou Lsi Gijutsu Kenkyu Kumiai End point detection method and its apparatus
JPS56133466A (en) * 1980-03-24 1981-10-19 Anelva Corp Plasma spectrum monitoring apparatus
JPS58215030A (ja) * 1982-06-08 1983-12-14 Kokusai Electric Co Ltd 半導体基板のドライエツチング終了時点検出装置
JPS58216423A (ja) * 1982-06-10 1983-12-16 Hitachi Ltd エツチング終点検出装置

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH01226153A (ja) * 1988-03-07 1989-09-08 Hitachi Ltd エッチング終点判定装置
JPH01235336A (ja) * 1988-03-16 1989-09-20 Hitachi Ltd エッチング終点判定装置
JPH01241127A (ja) * 1988-03-23 1989-09-26 Hitachi Ltd エッチング終点判定方法
JPH0348423A (ja) * 1989-07-17 1991-03-01 Hitachi Ltd 終点判定方法および装置
JPH05267224A (ja) * 1992-03-19 1993-10-15 Nec Yamaguchi Ltd ドライエッチング装置
US5374327A (en) * 1992-04-28 1994-12-20 Tokyo Electron Limited Plasma processing method

Also Published As

Publication number Publication date
JPH0455329B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1992-09-03

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