JPS61217442A - ウエ−ハ插入装置 - Google Patents
ウエ−ハ插入装置Info
- Publication number
- JPS61217442A JPS61217442A JP5742985A JP5742985A JPS61217442A JP S61217442 A JPS61217442 A JP S61217442A JP 5742985 A JP5742985 A JP 5742985A JP 5742985 A JP5742985 A JP 5742985A JP S61217442 A JPS61217442 A JP S61217442A
- Authority
- JP
- Japan
- Prior art keywords
- wafer
- wafers
- arm
- magazine
- moved
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Feeding Of Articles By Means Other Than Belts Or Rollers (AREA)
- Sheets, Magazines, And Separation Thereof (AREA)
- Warehouses Or Storage Devices (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5742985A JPS61217442A (ja) | 1985-03-20 | 1985-03-20 | ウエ−ハ插入装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5742985A JPS61217442A (ja) | 1985-03-20 | 1985-03-20 | ウエ−ハ插入装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS61217442A true JPS61217442A (ja) | 1986-09-27 |
| JPH0255340B2 JPH0255340B2 (cg-RX-API-DMAC7.html) | 1990-11-27 |
Family
ID=13055409
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP5742985A Granted JPS61217442A (ja) | 1985-03-20 | 1985-03-20 | ウエ−ハ插入装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS61217442A (cg-RX-API-DMAC7.html) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS63139844A (ja) * | 1986-11-28 | 1988-06-11 | Ulvac Corp | 真空室内における物体の搬送方法 |
| JPS63208452A (ja) * | 1987-02-20 | 1988-08-29 | Canon Inc | 基板搬送装置 |
| JPS6421147U (cg-RX-API-DMAC7.html) * | 1987-07-27 | 1989-02-02 |
-
1985
- 1985-03-20 JP JP5742985A patent/JPS61217442A/ja active Granted
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS63139844A (ja) * | 1986-11-28 | 1988-06-11 | Ulvac Corp | 真空室内における物体の搬送方法 |
| JPS63208452A (ja) * | 1987-02-20 | 1988-08-29 | Canon Inc | 基板搬送装置 |
| JPS6421147U (cg-RX-API-DMAC7.html) * | 1987-07-27 | 1989-02-02 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0255340B2 (cg-RX-API-DMAC7.html) | 1990-11-27 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| JPH03125453A (ja) | 半導体ウエハ移送装置 | |
| JPH0355983B2 (cg-RX-API-DMAC7.html) | ||
| KR20050072758A (ko) | 단일의 트랙 위치로부터 오버헤드 호이스트 운반 수단에의한 하나 이상의 재료 저장 선반 레벨로의 접근 | |
| JPH07263521A (ja) | ウェーハ移載の装置と方法並びに半導体装置の製造方法 | |
| US5383482A (en) | Semiconductor processing apparatus and module | |
| JP2628335B2 (ja) | マルチチャンバ型ｃｖｄ装置 | |
| JPS61217442A (ja) | ウエ−ハ插入装置 | |
| JPH09172052A (ja) | ウェーハ移載装置及びウェーハ移載方法 | |
| JPH05338728A (ja) | ウエーハ搬送方法及び装置 | |
| JP2000236009A (ja) | 基板処理装置 | |
| JPS62285843A (ja) | 基板形部品授受装置 | |
| JPS63219134A (ja) | 拡散炉ウエハ・ハンドラ装置 | |
| JP2550553Y2 (ja) | 表面処理装置のウエハ移替装置 | |
| JP2788845B2 (ja) | 半導体ウェーハ用ソータ | |
| JP2001358195A (ja) | 半導体製造方法および装置 | |
| US20240186166A1 (en) | Passive separation cassette and carrier | |
| JPS6227248A (ja) | 給送装置 | |
| KR910007418B1 (ko) | 칩 이송장치의 픽럽 방법 | |
| JPH0834236B2 (ja) | ウェハのロ−ディング装置 | |
| JPH0590388A (ja) | 移替装置 | |
| JPS63173338A (ja) | ウエハ移載方式 | |
| JP2592304B2 (ja) | 半導体ウエハの移載方法 | |
| JP2613231B2 (ja) | 電子銃用陰極ヒータの自動挿入装置 | |
| KR20040024538A (ko) | 리드프레임처리시스템용 취급장치 및 취급방법 | |
| JP2617790B2 (ja) | 処理方法 |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| EXPY | Cancellation because of completion of term |