JPH0255340B2 - - Google Patents

Info

Publication number
JPH0255340B2
JPH0255340B2 JP5742985A JP5742985A JPH0255340B2 JP H0255340 B2 JPH0255340 B2 JP H0255340B2 JP 5742985 A JP5742985 A JP 5742985A JP 5742985 A JP5742985 A JP 5742985A JP H0255340 B2 JPH0255340 B2 JP H0255340B2
Authority
JP
Japan
Prior art keywords
wafer
magazine
wafers
arm
insertion device
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP5742985A
Other languages
English (en)
Japanese (ja)
Other versions
JPS61217442A (ja
Inventor
Yoshio Uchida
Kanetake Takasaki
Atsuhiro Tsukune
Masanao Hotsuta
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fujitsu Ltd
Original Assignee
Fujitsu Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fujitsu Ltd filed Critical Fujitsu Ltd
Priority to JP5742985A priority Critical patent/JPS61217442A/ja
Publication of JPS61217442A publication Critical patent/JPS61217442A/ja
Publication of JPH0255340B2 publication Critical patent/JPH0255340B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Feeding Of Articles By Means Other Than Belts Or Rollers (AREA)
  • Sheets, Magazines, And Separation Thereof (AREA)
  • Warehouses Or Storage Devices (AREA)
JP5742985A 1985-03-20 1985-03-20 ウエ−ハ插入装置 Granted JPS61217442A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP5742985A JPS61217442A (ja) 1985-03-20 1985-03-20 ウエ−ハ插入装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP5742985A JPS61217442A (ja) 1985-03-20 1985-03-20 ウエ−ハ插入装置

Publications (2)

Publication Number Publication Date
JPS61217442A JPS61217442A (ja) 1986-09-27
JPH0255340B2 true JPH0255340B2 (cg-RX-API-DMAC7.html) 1990-11-27

Family

ID=13055409

Family Applications (1)

Application Number Title Priority Date Filing Date
JP5742985A Granted JPS61217442A (ja) 1985-03-20 1985-03-20 ウエ−ハ插入装置

Country Status (1)

Country Link
JP (1) JPS61217442A (cg-RX-API-DMAC7.html)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0649529B2 (ja) * 1986-11-28 1994-06-29 日本真空技術株式会社 真空室内における物体の搬送方法
JPS63208452A (ja) * 1987-02-20 1988-08-29 Canon Inc 基板搬送装置
JPH089049Y2 (ja) * 1987-07-27 1996-03-13 日本電気株式会社 自動基板供給・収納装置

Also Published As

Publication number Publication date
JPS61217442A (ja) 1986-09-27

Similar Documents

Publication Publication Date Title
TW201007876A (en) Substrate-processing apparatus and method of transferring substrate in the same
MY119887A (en) Throughput enhancement for single wafer reactor
JP2628335B2 (ja) マルチチャンバ型ｃｖｄ装置
JPH0255340B2 (cg-RX-API-DMAC7.html)
US6547902B2 (en) Die bonding method and apparatus
JPH05338728A (ja) ウエーハ搬送方法及び装置
JPH03244121A (ja) 縦型半導体製造装置
JPH05299489A (ja) ウェーハ搬送用ロボット
US20240186166A1 (en) Passive separation cassette and carrier
JPS63219134A (ja) 拡散炉ウエハ・ハンドラ装置
JP2550553Y2 (ja) 表面処理装置のウエハ移替装置
JP2920781B2 (ja) 熱処理装置
JPH0834236B2 (ja) ウェハのロ−ディング装置
JPH0590388A (ja) 移替装置
JPS6214693Y2 (cg-RX-API-DMAC7.html)
JP2024080946A (ja) 製造装置
JP2592304B2 (ja) 半導体ウエハの移載方法
JP2613231B2 (ja) 電子銃用陰極ヒータの自動挿入装置
JPS6343341A (ja) 半導体装置製造装置のオ−トロ−ダ
JP2591202Y2 (ja) 縦型ｃｖｄ装置
JPH11214471A (ja) ワーク搬送方法およびワーク処理装置
JP3034484B2 (ja) 基板処理装置
JPH06115628A (ja) ウェハの搬送方法
JP3766450B2 (ja) 半導体基板加工設備における半導体基板の供給装置
JPH04125453U (ja) ウエーハ移載機

Legal Events

Date Code Title Description
EXPY Cancellation because of completion of term