JPS61216374A - 半導体装置の製造方法 - Google Patents

半導体装置の製造方法

Info

Publication number
JPS61216374A
JPS61216374A JP2702085A JP2702085A JPS61216374A JP S61216374 A JPS61216374 A JP S61216374A JP 2702085 A JP2702085 A JP 2702085A JP 2702085 A JP2702085 A JP 2702085A JP S61216374 A JPS61216374 A JP S61216374A
Authority
JP
Japan
Prior art keywords
mesa
substrate
layer
photoresist
insulating layer
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2702085A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0213943B2 (enrdf_load_stackoverflow
Inventor
Tatsuyuki Sanada
真田 達行
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fujitsu Ltd
Original Assignee
Fujitsu Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fujitsu Ltd filed Critical Fujitsu Ltd
Priority to JP2702085A priority Critical patent/JPS61216374A/ja
Publication of JPS61216374A publication Critical patent/JPS61216374A/ja
Publication of JPH0213943B2 publication Critical patent/JPH0213943B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Electrodes Of Semiconductors (AREA)
  • Semiconductor Lasers (AREA)
JP2702085A 1985-02-14 1985-02-14 半導体装置の製造方法 Granted JPS61216374A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2702085A JPS61216374A (ja) 1985-02-14 1985-02-14 半導体装置の製造方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2702085A JPS61216374A (ja) 1985-02-14 1985-02-14 半導体装置の製造方法

Publications (2)

Publication Number Publication Date
JPS61216374A true JPS61216374A (ja) 1986-09-26
JPH0213943B2 JPH0213943B2 (enrdf_load_stackoverflow) 1990-04-05

Family

ID=12209405

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2702085A Granted JPS61216374A (ja) 1985-02-14 1985-02-14 半導体装置の製造方法

Country Status (1)

Country Link
JP (1) JPS61216374A (enrdf_load_stackoverflow)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2010141229A (ja) * 2008-12-15 2010-06-24 Sony Corp 半導体レーザの製造方法

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0618095A (ja) * 1992-06-30 1994-01-25 Rinnai Corp 温風暖房機

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2010141229A (ja) * 2008-12-15 2010-06-24 Sony Corp 半導体レーザの製造方法
US7943407B2 (en) 2008-12-15 2011-05-17 Sony Corporation Method for manufacturing semiconductor laser

Also Published As

Publication number Publication date
JPH0213943B2 (enrdf_load_stackoverflow) 1990-04-05

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