JPS6120516B2 - - Google Patents

Info

Publication number
JPS6120516B2
JPS6120516B2 JP54056129A JP5612979A JPS6120516B2 JP S6120516 B2 JPS6120516 B2 JP S6120516B2 JP 54056129 A JP54056129 A JP 54056129A JP 5612979 A JP5612979 A JP 5612979A JP S6120516 B2 JPS6120516 B2 JP S6120516B2
Authority
JP
Japan
Prior art keywords
layer
silicon carbide
substrate
silicon
sic
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP54056129A
Other languages
English (en)
Japanese (ja)
Other versions
JPS55149193A (en
Inventor
Toshiki Inooku
Takeshi Sakurai
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Sharp Corp
Original Assignee
Sharp Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Sharp Corp filed Critical Sharp Corp
Priority to JP5612979A priority Critical patent/JPS55149193A/ja
Priority to DE3002671A priority patent/DE3002671C2/de
Publication of JPS55149193A publication Critical patent/JPS55149193A/ja
Priority to US06/369,911 priority patent/US4582561A/en
Publication of JPS6120516B2 publication Critical patent/JPS6120516B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Liquid Deposition Of Substances Of Which Semiconductor Devices Are Composed (AREA)
  • Recrystallisation Techniques (AREA)
  • Crystals, And After-Treatments Of Crystals (AREA)
  • Chemical Vapour Deposition (AREA)
JP5612979A 1979-01-25 1979-05-07 Manufacture of silicon carbide substrate Granted JPS55149193A (en)

Priority Applications (3)

Application Number Priority Date Filing Date Title
JP5612979A JPS55149193A (en) 1979-05-07 1979-05-07 Manufacture of silicon carbide substrate
DE3002671A DE3002671C2 (de) 1979-01-25 1980-01-25 Verfahren zur Herstellung eines Siliciumcarbidsubstrats
US06/369,911 US4582561A (en) 1979-01-25 1982-04-19 Method for making a silicon carbide substrate

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP5612979A JPS55149193A (en) 1979-05-07 1979-05-07 Manufacture of silicon carbide substrate

Publications (2)

Publication Number Publication Date
JPS55149193A JPS55149193A (en) 1980-11-20
JPS6120516B2 true JPS6120516B2 (enExample) 1986-05-22

Family

ID=13018456

Family Applications (1)

Application Number Title Priority Date Filing Date
JP5612979A Granted JPS55149193A (en) 1979-01-25 1979-05-07 Manufacture of silicon carbide substrate

Country Status (1)

Country Link
JP (1) JPS55149193A (enExample)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
AT399520B (de) * 1991-09-16 1995-05-26 Fehrer Textilmasch Vorrichtung zum aufbringen eines vliesbandes auf eine endlos umlaufende trägerbahn
JPH07335562A (ja) * 1994-06-10 1995-12-22 Hoya Corp 炭化珪素の成膜方法
JP5519305B2 (ja) * 2010-01-25 2014-06-11 トヨタ自動車株式会社 炭化珪素単結晶の欠陥検出方法

Also Published As

Publication number Publication date
JPS55149193A (en) 1980-11-20

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