JPS6120519B2 - - Google Patents

Info

Publication number
JPS6120519B2
JPS6120519B2 JP54056133A JP5613379A JPS6120519B2 JP S6120519 B2 JPS6120519 B2 JP S6120519B2 JP 54056133 A JP54056133 A JP 54056133A JP 5613379 A JP5613379 A JP 5613379A JP S6120519 B2 JPS6120519 B2 JP S6120519B2
Authority
JP
Japan
Prior art keywords
silicon
carbon
substrate
silicon carbide
layer
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP54056133A
Other languages
English (en)
Japanese (ja)
Other versions
JPS55149197A (en
Inventor
Toshiki Inooku
Takeshi Sakurai
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Sharp Corp
Original Assignee
Sharp Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Sharp Corp filed Critical Sharp Corp
Priority to JP5613379A priority Critical patent/JPS55149197A/ja
Publication of JPS55149197A publication Critical patent/JPS55149197A/ja
Publication of JPS6120519B2 publication Critical patent/JPS6120519B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Liquid Deposition Of Substances Of Which Semiconductor Devices Are Composed (AREA)
  • Recrystallisation Techniques (AREA)
  • Crystals, And After-Treatments Of Crystals (AREA)
  • Chemical Vapour Deposition (AREA)
JP5613379A 1979-05-07 1979-05-07 Manufacture of silicon carbide substrate Granted JPS55149197A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP5613379A JPS55149197A (en) 1979-05-07 1979-05-07 Manufacture of silicon carbide substrate

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP5613379A JPS55149197A (en) 1979-05-07 1979-05-07 Manufacture of silicon carbide substrate

Publications (2)

Publication Number Publication Date
JPS55149197A JPS55149197A (en) 1980-11-20
JPS6120519B2 true JPS6120519B2 (enExample) 1986-05-22

Family

ID=13018569

Family Applications (1)

Application Number Title Priority Date Filing Date
JP5613379A Granted JPS55149197A (en) 1979-05-07 1979-05-07 Manufacture of silicon carbide substrate

Country Status (1)

Country Link
JP (1) JPS55149197A (enExample)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS61130039A (ja) * 1984-10-15 1986-06-17 ロバート・ディー・アセイ・ジュニア 衣料品用保護シ−ト

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS61130039A (ja) * 1984-10-15 1986-06-17 ロバート・ディー・アセイ・ジュニア 衣料品用保護シ−ト

Also Published As

Publication number Publication date
JPS55149197A (en) 1980-11-20

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