JPS6121196B2 - - Google Patents

Info

Publication number
JPS6121196B2
JPS6121196B2 JP54121278A JP12127879A JPS6121196B2 JP S6121196 B2 JPS6121196 B2 JP S6121196B2 JP 54121278 A JP54121278 A JP 54121278A JP 12127879 A JP12127879 A JP 12127879A JP S6121196 B2 JPS6121196 B2 JP S6121196B2
Authority
JP
Japan
Prior art keywords
silicon carbide
silicon
layer
growth
substrate
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP54121278A
Other languages
English (en)
Japanese (ja)
Other versions
JPS5645896A (en
Inventor
Toshiki Inooku
Takeshi Sakurai
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Sharp Corp
Original Assignee
Sharp Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Sharp Corp filed Critical Sharp Corp
Priority to JP12127879A priority Critical patent/JPS5645896A/ja
Publication of JPS5645896A publication Critical patent/JPS5645896A/ja
Publication of JPS6121196B2 publication Critical patent/JPS6121196B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Crystals, And After-Treatments Of Crystals (AREA)
  • Liquid Deposition Of Substances Of Which Semiconductor Devices Are Composed (AREA)
JP12127879A 1979-09-19 1979-09-19 Manufacture of silicon carbide crystal Granted JPS5645896A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP12127879A JPS5645896A (en) 1979-09-19 1979-09-19 Manufacture of silicon carbide crystal

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP12127879A JPS5645896A (en) 1979-09-19 1979-09-19 Manufacture of silicon carbide crystal

Publications (2)

Publication Number Publication Date
JPS5645896A JPS5645896A (en) 1981-04-25
JPS6121196B2 true JPS6121196B2 (enExample) 1986-05-26

Family

ID=14807288

Family Applications (1)

Application Number Title Priority Date Filing Date
JP12127879A Granted JPS5645896A (en) 1979-09-19 1979-09-19 Manufacture of silicon carbide crystal

Country Status (1)

Country Link
JP (1) JPS5645896A (enExample)

Also Published As

Publication number Publication date
JPS5645896A (en) 1981-04-25

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