JPS6120518B2 - - Google Patents

Info

Publication number
JPS6120518B2
JPS6120518B2 JP54056132A JP5613279A JPS6120518B2 JP S6120518 B2 JPS6120518 B2 JP S6120518B2 JP 54056132 A JP54056132 A JP 54056132A JP 5613279 A JP5613279 A JP 5613279A JP S6120518 B2 JPS6120518 B2 JP S6120518B2
Authority
JP
Japan
Prior art keywords
silicon
substrate
silicon carbide
layer
carbon
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP54056132A
Other languages
English (en)
Japanese (ja)
Other versions
JPS55149196A (en
Inventor
Toshiki Inooku
Takeshi Sakurai
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Sharp Corp
Original Assignee
Sharp Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Sharp Corp filed Critical Sharp Corp
Priority to JP5613279A priority Critical patent/JPS55149196A/ja
Publication of JPS55149196A publication Critical patent/JPS55149196A/ja
Publication of JPS6120518B2 publication Critical patent/JPS6120518B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Liquid Deposition Of Substances Of Which Semiconductor Devices Are Composed (AREA)
  • Recrystallisation Techniques (AREA)
  • Crystals, And After-Treatments Of Crystals (AREA)
  • Chemical Vapour Deposition (AREA)
JP5613279A 1979-05-07 1979-05-07 Manufacture of silicon carbide substrate Granted JPS55149196A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP5613279A JPS55149196A (en) 1979-05-07 1979-05-07 Manufacture of silicon carbide substrate

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP5613279A JPS55149196A (en) 1979-05-07 1979-05-07 Manufacture of silicon carbide substrate

Publications (2)

Publication Number Publication Date
JPS55149196A JPS55149196A (en) 1980-11-20
JPS6120518B2 true JPS6120518B2 (enExample) 1986-05-22

Family

ID=13018543

Family Applications (1)

Application Number Title Priority Date Filing Date
JP5613279A Granted JPS55149196A (en) 1979-05-07 1979-05-07 Manufacture of silicon carbide substrate

Country Status (1)

Country Link
JP (1) JPS55149196A (enExample)

Also Published As

Publication number Publication date
JPS55149196A (en) 1980-11-20

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