JPS6119911B2 - - Google Patents

Info

Publication number
JPS6119911B2
JPS6119911B2 JP8983383A JP8983383A JPS6119911B2 JP S6119911 B2 JPS6119911 B2 JP S6119911B2 JP 8983383 A JP8983383 A JP 8983383A JP 8983383 A JP8983383 A JP 8983383A JP S6119911 B2 JPS6119911 B2 JP S6119911B2
Authority
JP
Japan
Prior art keywords
vacuum
exhaust gas
resistant
processing chamber
valve
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP8983383A
Other languages
English (en)
Japanese (ja)
Other versions
JPS59215582A (ja
Inventor
Tadayuki Choshi
Satoru Ura
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Chugai Ro Co Ltd
Original Assignee
Chugai Ro Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Chugai Ro Co Ltd filed Critical Chugai Ro Co Ltd
Priority to JP8983383A priority Critical patent/JPS59215582A/ja
Publication of JPS59215582A publication Critical patent/JPS59215582A/ja
Publication of JPS6119911B2 publication Critical patent/JPS6119911B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Furnace Details (AREA)
  • Inorganic Fibers (AREA)
  • Powder Metallurgy (AREA)
  • Muffle Furnaces And Rotary Kilns (AREA)
JP8983383A 1983-05-20 1983-05-20 可燃性物質を含有する処理材の熱処理炉 Granted JPS59215582A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP8983383A JPS59215582A (ja) 1983-05-20 1983-05-20 可燃性物質を含有する処理材の熱処理炉

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP8983383A JPS59215582A (ja) 1983-05-20 1983-05-20 可燃性物質を含有する処理材の熱処理炉

Publications (2)

Publication Number Publication Date
JPS59215582A JPS59215582A (ja) 1984-12-05
JPS6119911B2 true JPS6119911B2 (cs) 1986-05-20

Family

ID=13981760

Family Applications (1)

Application Number Title Priority Date Filing Date
JP8983383A Granted JPS59215582A (ja) 1983-05-20 1983-05-20 可燃性物質を含有する処理材の熱処理炉

Country Status (1)

Country Link
JP (1) JPS59215582A (cs)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6346798U (cs) * 1986-09-12 1988-03-30
JP2009263175A (ja) * 2008-04-25 2009-11-12 Bridgestone Corp 焼成炉及び炭化珪素粉体の製造方法

Also Published As

Publication number Publication date
JPS59215582A (ja) 1984-12-05

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