JPS6119137B2 - - Google Patents

Info

Publication number
JPS6119137B2
JPS6119137B2 JP52145863A JP14586377A JPS6119137B2 JP S6119137 B2 JPS6119137 B2 JP S6119137B2 JP 52145863 A JP52145863 A JP 52145863A JP 14586377 A JP14586377 A JP 14586377A JP S6119137 B2 JPS6119137 B2 JP S6119137B2
Authority
JP
Japan
Prior art keywords
case
metal film
recess
crystal resonator
etching
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP52145863A
Other languages
English (en)
Japanese (ja)
Other versions
JPS5478693A (en
Inventor
Masatoshi Kobayashi
Hiroyuki Fujii
Joji Shimakawa
Yukio Hara
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Matsushima Kogyo KK
Suwa Seikosha KK
Original Assignee
Matsushima Kogyo KK
Suwa Seikosha KK
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Matsushima Kogyo KK, Suwa Seikosha KK filed Critical Matsushima Kogyo KK
Priority to JP14586477A priority Critical patent/JPS5478694A/ja
Priority to JP14586377A priority patent/JPS5478693A/ja
Priority to CH1240178A priority patent/CH633160B/fr
Priority to US05/966,688 priority patent/US4293986A/en
Publication of JPS5478693A publication Critical patent/JPS5478693A/ja
Priority to US06/141,025 priority patent/US4288284A/en
Priority to CH982A priority patent/CH647642GA3/fr
Publication of JPS6119137B2 publication Critical patent/JPS6119137B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
    • H03H9/02—Details
    • H03H9/05—Holders; Supports
    • H03H9/10—Mounting in enclosures
    • H03H9/1007—Mounting in enclosures for bulk acoustic wave [BAW] devices
    • H03H9/1014—Mounting in enclosures for bulk acoustic wave [BAW] devices the enclosure being defined by a frame built on a substrate and a cap, the frame having no mechanical contact with the BAW device
    • H03H9/1021—Mounting in enclosures for bulk acoustic wave [BAW] devices the enclosure being defined by a frame built on a substrate and a cap, the frame having no mechanical contact with the BAW device the BAW device being of the cantilever type
    • G—PHYSICS
    • G04—HOROLOGY
    • G04F—TIME-INTERVAL MEASURING
    • G04F5/00—Apparatus for producing preselected time intervals for use as timing standards
    • G04F5/04—Apparatus for producing preselected time intervals for use as timing standards using oscillators with electromechanical resonators producing electric oscillations or timing pulses
    • G04F5/06—Apparatus for producing preselected time intervals for use as timing standards using oscillators with electromechanical resonators producing electric oscillations or timing pulses using piezoelectric resonators
    • G04F5/063—Constructional details
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H3/00—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators
    • H03H3/007—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators for the manufacture of electromechanical resonators or networks
    • H03H3/02—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators for the manufacture of electromechanical resonators or networks for the manufacture of piezoelectric or electrostrictive resonators or networks
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
    • H03H9/02—Details
    • H03H9/05—Holders; Supports
    • H03H9/0595—Holders; Supports the holder support and resonator being formed in one body
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T29/00—Metal working
    • Y10T29/42—Piezoelectric device making

Landscapes

  • Physics & Mathematics (AREA)
  • Acoustics & Sound (AREA)
  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • General Physics & Mathematics (AREA)
  • Piezo-Electric Or Mechanical Vibrators, Or Delay Or Filter Circuits (AREA)
  • Crystals, And After-Treatments Of Crystals (AREA)
JP14586377A 1977-12-05 1977-12-05 Crystal vibrator Granted JPS5478693A (en)

Priority Applications (6)

Application Number Priority Date Filing Date Title
JP14586477A JPS5478694A (en) 1977-12-05 1977-12-05 Crystal vibrator
JP14586377A JPS5478693A (en) 1977-12-05 1977-12-05 Crystal vibrator
CH1240178A CH633160B (fr) 1977-12-05 1978-12-05 Procede de fabrication d'un oscillateur a cristal de quartz de type ultra mince et oscillateur a cristal de quartz encapsule resultant du procede.
US05/966,688 US4293986A (en) 1977-12-05 1978-12-05 Method of making a quartz crystal oscillator
US06/141,025 US4288284A (en) 1977-12-05 1980-04-17 Method of producing housing element for quartz crystal oscillator
CH982A CH647642GA3 (US20020128544A1-20020912-P00008.png) 1977-12-05 1982-01-04

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP14586477A JPS5478694A (en) 1977-12-05 1977-12-05 Crystal vibrator
JP14586377A JPS5478693A (en) 1977-12-05 1977-12-05 Crystal vibrator

Publications (2)

Publication Number Publication Date
JPS5478693A JPS5478693A (en) 1979-06-22
JPS6119137B2 true JPS6119137B2 (US20020128544A1-20020912-P00008.png) 1986-05-15

Family

ID=26476878

Family Applications (2)

Application Number Title Priority Date Filing Date
JP14586477A Pending JPS5478694A (en) 1977-12-05 1977-12-05 Crystal vibrator
JP14586377A Granted JPS5478693A (en) 1977-12-05 1977-12-05 Crystal vibrator

Family Applications Before (1)

Application Number Title Priority Date Filing Date
JP14586477A Pending JPS5478694A (en) 1977-12-05 1977-12-05 Crystal vibrator

Country Status (3)

Country Link
US (2) US4293986A (US20020128544A1-20020912-P00008.png)
JP (2) JPS5478694A (US20020128544A1-20020912-P00008.png)
CH (2) CH633160B (US20020128544A1-20020912-P00008.png)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH03121U (US20020128544A1-20020912-P00008.png) * 1989-05-23 1991-01-07

Families Citing this family (67)

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CH625372A5 (US20020128544A1-20020912-P00008.png) * 1979-07-06 1981-09-15 Ebauchesfabrik Eta Ag
JPS57152212A (en) * 1981-03-16 1982-09-20 Seiko Epson Corp Quartz oscillator
CH655423GA3 (US20020128544A1-20020912-P00008.png) * 1984-02-15 1986-04-30
JPS60191511A (ja) * 1984-03-12 1985-09-30 Murata Mfg Co Ltd 圧電振動子とその製造方法
JPS6146608A (ja) * 1984-08-10 1986-03-06 Murata Mfg Co Ltd 圧電振動子
US4627533A (en) * 1984-10-29 1986-12-09 Hughes Aircraft Company Ceramic package for compensated crystal oscillator
DE3520085A1 (de) * 1985-06-05 1986-12-11 Philips Patentverwaltung Gmbh, 2000 Hamburg Verfahren zum herstellen eines hermetisch verschlossenen bauelementengehaeuses, insbesondere fuer schwingquarze
US4639631A (en) * 1985-07-01 1987-01-27 Motorola, Inc. Electrostatically sealed piezoelectric device
DE3539504A1 (de) * 1985-11-07 1987-05-21 Schott Glaswerke Flachgehaeuse zur hermetischen kapselung von piezoelektrischen bauelementen
FR2592247A1 (fr) * 1985-12-24 1987-06-26 Electronique Piezo Electr Cie Perfectionnement aux resonateurs piezoelectriques.
US5392006A (en) * 1987-02-27 1995-02-21 Seiko Epson Corporation Pressure seal type piezoelectric resonator
US5325574A (en) * 1987-02-27 1994-07-05 Seiko Epson Corporation Method of forming a quartz oscillator temperature sensor
US5265316A (en) * 1987-02-27 1993-11-30 Seiko Epson Corporation Method of manufacturing a pressure seal type piezoelectric oscillator
US5607236A (en) * 1987-02-27 1997-03-04 Seiko Epson Corporation Quartz oscillator temperature sensor
US5592130A (en) * 1987-02-27 1997-01-07 Seiko Epson Corporation Piezoelectric oscillator including a piezoelectric resonator with outer lead
GB8719498D0 (en) * 1987-08-18 1987-11-18 Ferranti Plc Seals
US4895291A (en) * 1989-05-04 1990-01-23 Eastman Kodak Company Method of making a hermetic seal in a solid-state device
US5138214A (en) * 1989-12-27 1992-08-11 Matsushita Electric Industrial Co., Ltd. Piezoelectric transducer and method of adjusting oscillation frequency thereof
US5270491A (en) * 1990-10-09 1993-12-14 Eastman Kodak Company Hermetically sealed microelectronic package
JP2601016B2 (ja) * 1990-11-17 1997-04-16 株式会社村田製作所 圧電共振子の製造方法
JPH06505597A (ja) * 1991-03-04 1994-06-23 モトローラ・インコーポレーテッド 非導電性電子回路パッケージ用シールド装置
US5668057A (en) * 1991-03-13 1997-09-16 Matsushita Electric Industrial Co., Ltd. Methods of manufacture for electronic components having high-frequency elements
US5747857A (en) * 1991-03-13 1998-05-05 Matsushita Electric Industrial Co., Ltd. Electronic components having high-frequency elements and methods of manufacture therefor
GB2260642B (en) * 1991-10-19 1995-02-08 Northern Telecom Ltd Crystal resonator device
JPH06291587A (ja) * 1992-07-08 1994-10-18 Matsushita Electric Ind Co Ltd 圧電振動子
KR0158469B1 (ko) * 1992-10-15 1999-03-20 모리시타 요이찌 발진자
DE69322480T2 (de) * 1992-10-20 1999-08-05 Matsushita Electric Ind Co Ltd Piezoelektrisches Filter und Verfahren zu seiner Herstellung
US5302879A (en) * 1992-12-31 1994-04-12 Halliburton Company Temperature/reference package, and method using the same for high pressure, high temperature oil or gas well
JPH06350376A (ja) * 1993-01-25 1994-12-22 Matsushita Electric Ind Co Ltd 気密封止された圧電デバイスおよび気密封止パッケージ
US5506463A (en) * 1993-08-23 1996-04-09 Rohm Co., Ltd. Packaged piezoelectric oscillator and method of making the same
DE69429848T2 (de) * 1993-11-01 2002-09-26 Matsushita Electric Ind Co Ltd Elektronische Anordnung und Verfahren zur Herstellung
DE69409215T2 (de) * 1993-12-06 1998-07-16 Matsushita Electric Ind Co Ltd Hybrid Magnetstruktur und deren Herstellungsverfahren
US5406682A (en) * 1993-12-23 1995-04-18 Motorola, Inc. Method of compliantly mounting a piezoelectric device
JPH07226644A (ja) * 1994-02-16 1995-08-22 Murata Mfg Co Ltd エネルギー閉じ込め型圧電共振子
US5552655A (en) * 1994-05-04 1996-09-03 Trw Inc. Low frequency mechanical resonator
US5514928A (en) * 1994-05-27 1996-05-07 Litton Systems, Inc. Apparatus having cascaded and interbonded microchannel plates and method of making
DE19548048C2 (de) * 1995-12-21 1998-01-15 Siemens Matsushita Components Elektronisches Bauelement, insbesondere mit akustischen Oberflächenwellen arbeitendes Bauelement (OFW-Bauelement)
DE19548062A1 (de) * 1995-12-21 1997-06-26 Siemens Matsushita Components Elektrisches Bauelement, insbesondere mit akustischen Oberflächenwellen arbeitendes Bauelement - OFW-Bauelement - sowie ein Verfahren zu dessen Herstellung
US6242842B1 (en) 1996-12-16 2001-06-05 Siemens Matsushita Components Gmbh & Co. Kg Electrical component, in particular saw component operating with surface acoustic waves, and a method for its production
US5696422A (en) * 1996-03-01 1997-12-09 Piezo Crystal Company Crystal package
EP0794616B1 (en) * 1996-03-08 2003-01-29 Matsushita Electric Industrial Co., Ltd. An electronic part and a method of production thereof
DE19649332C1 (de) * 1996-11-28 1998-01-22 Tele Quarz Gmbh Resonator mit Kristall
JP3042431B2 (ja) * 1996-12-03 2000-05-15 株式会社村田製作所 電子部品の封止構造および封止方法
US6960870B2 (en) * 1997-07-29 2005-11-01 Seiko Epson Corporation Piezo-electric resonator and manufacturing method thereof
US6976295B2 (en) * 1997-07-29 2005-12-20 Seiko Epson Corporation Method of manufacturing a piezoelectric device
US6114800A (en) * 1997-10-01 2000-09-05 Murata Manufacturing Co., Ltd Piezoelectric component
JP3989663B2 (ja) * 2000-02-17 2007-10-10 セイコーインスツル株式会社 圧電振動子と圧電振動子の製造方法
US6628048B2 (en) * 2000-11-29 2003-09-30 Samsung Electro-Mechanics Co., Ltd. Crystal oscillator with improved shock resistance
JP3974346B2 (ja) * 2001-03-30 2007-09-12 富士通メディアデバイス株式会社 弾性表面波装置
US6548943B2 (en) * 2001-04-12 2003-04-15 Nokia Mobile Phones Ltd. Method of producing thin-film bulk acoustic wave devices
US6528875B1 (en) * 2001-04-20 2003-03-04 Amkor Technology, Inc. Vacuum sealed package for semiconductor chip
JP2003318699A (ja) * 2002-04-23 2003-11-07 Piedekku Gijutsu Kenkyusho:Kk 水晶ユニットとその製造方法
JP3905041B2 (ja) * 2003-01-07 2007-04-18 株式会社日立製作所 電子デバイスおよびその製造方法
US8092734B2 (en) * 2004-05-13 2012-01-10 Aptina Imaging Corporation Covers for microelectronic imagers and methods for wafer-level packaging of microelectronics imagers
JP4451219B2 (ja) * 2004-06-03 2010-04-14 日本電波工業株式会社 水晶振動子
US7061086B2 (en) * 2004-09-01 2006-06-13 Bliley Technologies Inc. Silicon package for piezoelectric device
JP2006229295A (ja) * 2005-02-15 2006-08-31 Kyocera Kinseki Corp 振動子パッケージ
JP4690146B2 (ja) * 2005-08-26 2011-06-01 セイコーインスツル株式会社 水晶振動子、発振器及び電子機器
JP2007251766A (ja) * 2006-03-17 2007-09-27 Nippon Dempa Kogyo Co Ltd 表面実装用の水晶発振器
US7564177B2 (en) * 2006-12-26 2009-07-21 Nihon Dempa Kogyo Co., Ltd. Crystal unit having stacked structure
US8069549B2 (en) 2007-03-22 2011-12-06 Seiko Epson Corporation Method for sealing a quartz crystal device
JP5078512B2 (ja) * 2007-09-06 2012-11-21 日本電波工業株式会社 水晶デバイス
JP5048471B2 (ja) * 2007-12-05 2012-10-17 セイコーインスツル株式会社 パッケージの製造方法、パッケージ、電子デバイス、圧電振動子、発振器、電子機器及び電波時計
JP4988799B2 (ja) * 2009-09-16 2012-08-01 日本電波工業株式会社 圧電振動デバイス及び圧電振動デバイスの製造方法
JP2011142374A (ja) * 2010-01-05 2011-07-21 Seiko Epson Corp 圧電デバイス、圧電デバイスの製造方法
JP5129284B2 (ja) * 2010-03-09 2013-01-30 日本電波工業株式会社 圧電振動子及び圧電振動子の製造方法
JP5991452B2 (ja) * 2014-04-24 2016-09-14 株式会社村田製作所 水晶振動装置及びその製造方法

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US261402A (en) * 1882-07-18 sprague
US378423A (en) * 1888-02-28 Method of etching on one
US3421962A (en) * 1965-04-05 1969-01-14 Int Rectifier Corp Apparatus for dicing semiconductor wafers
US3888708A (en) * 1972-02-17 1975-06-10 Kensall D Wise Method for forming regions of predetermined thickness in silicon
US3857161A (en) * 1973-02-09 1974-12-31 T Hutchins Method of making a ductile hermetic indium seal
FR2338607A1 (fr) * 1976-01-16 1977-08-12 France Etat Resonateur a quartz a electrodes non adherentes au cristal
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Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH03121U (US20020128544A1-20020912-P00008.png) * 1989-05-23 1991-01-07

Also Published As

Publication number Publication date
JPS5478693A (en) 1979-06-22
CH633160GA3 (US20020128544A1-20020912-P00008.png) 1982-11-30
JPS5478694A (en) 1979-06-22
US4288284A (en) 1981-09-08
CH647642GA3 (US20020128544A1-20020912-P00008.png) 1985-02-15
US4293986A (en) 1981-10-13
CH633160B (fr)

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