JPS61190074A - Ｔａ↓２Ｏ↓５膜の形成方法 - Google Patents

Ｔａ↓２Ｏ↓５膜の形成方法

Info

Publication number
JPS61190074A
JPS61190074A JP2880885A JP2880885A JPS61190074A JP S61190074 A JPS61190074 A JP S61190074A JP 2880885 A JP2880885 A JP 2880885A JP 2880885 A JP2880885 A JP 2880885A JP S61190074 A JPS61190074 A JP S61190074A
Authority
JP
Japan
Prior art keywords
film
gas
substrate
formation
oxide film
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2880885A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0420982B2 (enrdf_load_stackoverflow
Inventor
Koji Yamagishi
山岸　耕二
Yasuo Tarui
垂井　康夫
Junichi Hidaka
日高　淳一
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Japan Oxygen Co Ltd
Sharp Corp
Taiyo Nippon Sanso Corp
Original Assignee
Japan Oxygen Co Ltd
Nippon Sanso Corp
Sharp Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Japan Oxygen Co Ltd, Nippon Sanso Corp, Sharp Corp filed Critical Japan Oxygen Co Ltd
Priority to JP2880885A priority Critical patent/JPS61190074A/ja
Publication of JPS61190074A publication Critical patent/JPS61190074A/ja
Publication of JPH0420982B2 publication Critical patent/JPH0420982B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Chemical Vapour Deposition (AREA)
JP2880885A 1985-02-15 1985-02-15 Ｔａ↓２Ｏ↓５膜の形成方法 Granted JPS61190074A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2880885A JPS61190074A (ja) 1985-02-15 1985-02-15 Ｔａ↓２Ｏ↓５膜の形成方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2880885A JPS61190074A (ja) 1985-02-15 1985-02-15 Ｔａ↓２Ｏ↓５膜の形成方法

Publications (2)

Publication Number Publication Date
JPS61190074A true JPS61190074A (ja) 1986-08-23
JPH0420982B2 JPH0420982B2 (enrdf_load_stackoverflow) 1992-04-07

Family

ID=12258715

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2880885A Granted JPS61190074A (ja) 1985-02-15 1985-02-15 Ｔａ↓２Ｏ↓５膜の形成方法

Country Status (1)

Country Link
JP (1) JPS61190074A (enrdf_load_stackoverflow)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5045348A (en) * 1987-03-26 1991-09-03 Plessey Overseas Limited Thin film deposition process
US5234556A (en) * 1989-08-18 1993-08-10 Hitachi, Ltd. Polymeric metal oxide materials and their formation and use
WO2002100954A1 (en) * 2001-06-06 2002-12-19 Minolta Co., Ltd. Method for manufacturing substrate with insulating layer and display having the substrate

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5174578A (en) * 1974-12-25 1976-06-28 Fujitsu Ltd Zetsuenhimakuno keiseihoho
JPS6176677A (ja) * 1984-09-25 1986-04-19 Applied Material Japan Kk 気相成長方法
JPS6184376A (ja) * 1984-09-28 1986-04-28 Applied Material Japan Kk 気相成長装置
JPS61103539A (ja) * 1984-10-26 1986-05-22 Applied Material Japan Kk 気相成長方法

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5174578A (en) * 1974-12-25 1976-06-28 Fujitsu Ltd Zetsuenhimakuno keiseihoho
JPS6176677A (ja) * 1984-09-25 1986-04-19 Applied Material Japan Kk 気相成長方法
JPS6184376A (ja) * 1984-09-28 1986-04-28 Applied Material Japan Kk 気相成長装置
JPS61103539A (ja) * 1984-10-26 1986-05-22 Applied Material Japan Kk 気相成長方法

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5045348A (en) * 1987-03-26 1991-09-03 Plessey Overseas Limited Thin film deposition process
US5234556A (en) * 1989-08-18 1993-08-10 Hitachi, Ltd. Polymeric metal oxide materials and their formation and use
WO2002100954A1 (en) * 2001-06-06 2002-12-19 Minolta Co., Ltd. Method for manufacturing substrate with insulating layer and display having the substrate

Also Published As

Publication number Publication date
JPH0420982B2 (enrdf_load_stackoverflow) 1992-04-07

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