JPS6118958A - 半導体装置用ガラスマスクの洗浄方法 - Google Patents

半導体装置用ガラスマスクの洗浄方法

Info

Publication number
JPS6118958A
JPS6118958A JP59139821A JP13982184A JPS6118958A JP S6118958 A JPS6118958 A JP S6118958A JP 59139821 A JP59139821 A JP 59139821A JP 13982184 A JP13982184 A JP 13982184A JP S6118958 A JPS6118958 A JP S6118958A
Authority
JP
Japan
Prior art keywords
mask
cleaning
glass mask
glass
pure water
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP59139821A
Other languages
English (en)
Japanese (ja)
Other versions
JPS6325661B2 (enExample
Inventor
Mitsunori Matsumoto
松本　光徳
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Mitsubishi Electric Corp
Original Assignee
Mitsubishi Electric Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mitsubishi Electric Corp filed Critical Mitsubishi Electric Corp
Priority to JP59139821A priority Critical patent/JPS6118958A/ja
Publication of JPS6118958A publication Critical patent/JPS6118958A/ja
Publication of JPS6325661B2 publication Critical patent/JPS6325661B2/ja
Granted legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F1/00—Originals for photomechanical production of textured or patterned surfaces, e.g., masks, photo-masks, reticles; Mask blanks or pellicles therefor; Containers specially adapted therefor; Preparation thereof
    • G03F1/68—Preparation processes not covered by groups G03F1/20 - G03F1/50
    • G03F1/82—Auxiliary processes, e.g. cleaning or inspecting

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Preparing Plates And Mask In Photomechanical Process (AREA)
  • Cleaning By Liquid Or Steam (AREA)
JP59139821A 1984-07-04 1984-07-04 半導体装置用ガラスマスクの洗浄方法 Granted JPS6118958A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP59139821A JPS6118958A (ja) 1984-07-04 1984-07-04 半導体装置用ガラスマスクの洗浄方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP59139821A JPS6118958A (ja) 1984-07-04 1984-07-04 半導体装置用ガラスマスクの洗浄方法

Publications (2)

Publication Number Publication Date
JPS6118958A true JPS6118958A (ja) 1986-01-27
JPS6325661B2 JPS6325661B2 (enExample) 1988-05-26

Family

ID=15254249

Family Applications (1)

Application Number Title Priority Date Filing Date
JP59139821A Granted JPS6118958A (ja) 1984-07-04 1984-07-04 半導体装置用ガラスマスクの洗浄方法

Country Status (1)

Country Link
JP (1) JPS6118958A (enExample)

Cited By (15)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS62188323A (ja) * 1986-02-14 1987-08-17 Dainippon Screen Mfg Co Ltd 基板の洗浄並びに乾燥方法及び装置
JPS6373628A (ja) * 1986-09-17 1988-04-04 Dainippon Screen Mfg Co Ltd 洗浄乾燥処理方法
JPS63177034U (enExample) * 1987-05-06 1988-11-16
JPS63177031U (enExample) * 1987-05-06 1988-11-16
US4817652A (en) * 1987-03-26 1989-04-04 Regents Of The University Of Minnesota System for surface and fluid cleaning
JPH0283927A (ja) * 1988-09-21 1990-03-26 Shibaura Eng Works Co Ltd ガラス基板の乾燥装置
JPH02257632A (ja) * 1989-03-30 1990-10-18 Toshiba Corp 半導体装置の洗浄方法及びその洗浄装置
JPH0320734A (ja) * 1989-06-16 1991-01-29 Matsushita Electron Corp 洗浄装置
JPH03139832A (ja) * 1989-10-25 1991-06-14 Ebara Corp ジェットスクラバー
JPH03143558A (ja) * 1989-10-30 1991-06-19 Ebara Corp ジェットスクラバー
JPH03148825A (ja) * 1989-11-06 1991-06-25 Ebara Corp ジェットスクラバー
KR20020029206A (ko) * 2000-10-12 2002-04-18 윤종용 세정 가능한 파티클 펠리클 디텍터 박스
JP2002292346A (ja) * 2001-03-29 2002-10-08 Sharp Corp 付着膜回収装置および付着膜の回収方法
CN102357482A (zh) * 2011-09-22 2012-02-22 无锡泰东机械有限公司 高效快速在线清洗机
CN116274069A (zh) * 2022-11-11 2023-06-23 湖南普照信息材料有限公司 一种掩膜版玻璃基底的清洗方法

Cited By (15)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS62188323A (ja) * 1986-02-14 1987-08-17 Dainippon Screen Mfg Co Ltd 基板の洗浄並びに乾燥方法及び装置
JPS6373628A (ja) * 1986-09-17 1988-04-04 Dainippon Screen Mfg Co Ltd 洗浄乾燥処理方法
US4817652A (en) * 1987-03-26 1989-04-04 Regents Of The University Of Minnesota System for surface and fluid cleaning
JPS63177034U (enExample) * 1987-05-06 1988-11-16
JPS63177031U (enExample) * 1987-05-06 1988-11-16
JPH0283927A (ja) * 1988-09-21 1990-03-26 Shibaura Eng Works Co Ltd ガラス基板の乾燥装置
JPH02257632A (ja) * 1989-03-30 1990-10-18 Toshiba Corp 半導体装置の洗浄方法及びその洗浄装置
JPH0320734A (ja) * 1989-06-16 1991-01-29 Matsushita Electron Corp 洗浄装置
JPH03139832A (ja) * 1989-10-25 1991-06-14 Ebara Corp ジェットスクラバー
JPH03143558A (ja) * 1989-10-30 1991-06-19 Ebara Corp ジェットスクラバー
JPH03148825A (ja) * 1989-11-06 1991-06-25 Ebara Corp ジェットスクラバー
KR20020029206A (ko) * 2000-10-12 2002-04-18 윤종용 세정 가능한 파티클 펠리클 디텍터 박스
JP2002292346A (ja) * 2001-03-29 2002-10-08 Sharp Corp 付着膜回収装置および付着膜の回収方法
CN102357482A (zh) * 2011-09-22 2012-02-22 无锡泰东机械有限公司 高效快速在线清洗机
CN116274069A (zh) * 2022-11-11 2023-06-23 湖南普照信息材料有限公司 一种掩膜版玻璃基底的清洗方法

Also Published As

Publication number Publication date
JPS6325661B2 (enExample) 1988-05-26

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