JPS61170618A - 流速検出用半導体センサ - Google Patents
流速検出用半導体センサInfo
- Publication number
- JPS61170618A JPS61170618A JP60012064A JP1206485A JPS61170618A JP S61170618 A JPS61170618 A JP S61170618A JP 60012064 A JP60012064 A JP 60012064A JP 1206485 A JP1206485 A JP 1206485A JP S61170618 A JPS61170618 A JP S61170618A
- Authority
- JP
- Japan
- Prior art keywords
- sensor
- heating element
- semiconductor substrate
- fluid
- flow velocity
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000004065 semiconductor Substances 0.000 title claims abstract description 86
- 238000010438 heat treatment Methods 0.000 claims abstract description 83
- 239000000758 substrate Substances 0.000 claims abstract description 76
- 239000012530 fluid Substances 0.000 claims abstract description 63
- 239000012212 insulator Substances 0.000 claims abstract description 31
- 230000002093 peripheral effect Effects 0.000 claims abstract description 21
- 229910052710 silicon Inorganic materials 0.000 claims description 33
- 239000010703 silicon Substances 0.000 claims description 33
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims description 9
- 229910021426 porous silicon Inorganic materials 0.000 claims description 9
- 230000007423 decrease Effects 0.000 abstract description 9
- 238000001514 detection method Methods 0.000 abstract description 6
- 230000035945 sensitivity Effects 0.000 abstract description 2
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 31
- 239000010408 film Substances 0.000 description 8
- 230000010354 integration Effects 0.000 description 7
- 238000005259 measurement Methods 0.000 description 5
- 230000008859 change Effects 0.000 description 4
- 230000020169 heat generation Effects 0.000 description 4
- 238000009413 insulation Methods 0.000 description 4
- 238000000034 method Methods 0.000 description 4
- 230000000694 effects Effects 0.000 description 3
- 239000000463 material Substances 0.000 description 3
- 230000004043 responsiveness Effects 0.000 description 3
- 230000001590 oxidative effect Effects 0.000 description 2
- 230000004044 response Effects 0.000 description 2
- 239000010409 thin film Substances 0.000 description 2
- 235000006693 Cassia laevigata Nutrition 0.000 description 1
- 229910001218 Gallium arsenide Inorganic materials 0.000 description 1
- 241000735631 Senna pendula Species 0.000 description 1
- 230000009471 action Effects 0.000 description 1
- 238000009529 body temperature measurement Methods 0.000 description 1
- 239000003795 chemical substances by application Substances 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 238000010292 electrical insulation Methods 0.000 description 1
- 230000005611 electricity Effects 0.000 description 1
- 239000007789 gas Substances 0.000 description 1
- 230000006872 improvement Effects 0.000 description 1
- 239000012535 impurity Substances 0.000 description 1
- 239000011810 insulating material Substances 0.000 description 1
- 239000007788 liquid Substances 0.000 description 1
- 238000000691 measurement method Methods 0.000 description 1
- 230000008569 process Effects 0.000 description 1
- 230000005855 radiation Effects 0.000 description 1
- 230000000630 rising effect Effects 0.000 description 1
- 229940124513 senna glycoside Drugs 0.000 description 1
- 150000003376 silicon Chemical class 0.000 description 1
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
- G01F1/00—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow
- G01F1/68—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow by using thermal effects
- G01F1/684—Structural arrangements; Mounting of elements, e.g. in relation to fluid flow
- G01F1/6845—Micromachined devices
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
- G01P5/00—Measuring speed of fluids, e.g. of air stream; Measuring speed of bodies relative to fluids, e.g. of ship, of aircraft
- G01P5/10—Measuring speed of fluids, e.g. of air stream; Measuring speed of bodies relative to fluids, e.g. of ship, of aircraft by measuring thermal variables
- G01P5/12—Measuring speed of fluids, e.g. of air stream; Measuring speed of bodies relative to fluids, e.g. of ship, of aircraft by measuring thermal variables using variation of resistance of a heated conductor
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Fluid Mechanics (AREA)
- Engineering & Computer Science (AREA)
- Aviation & Aerospace Engineering (AREA)
- Measuring Volume Flow (AREA)
- Details Of Flowmeters (AREA)
Priority Applications (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP60012064A JPS61170618A (ja) | 1985-01-24 | 1985-01-24 | 流速検出用半導体センサ |
| US06/820,703 US4680963A (en) | 1985-01-24 | 1986-01-21 | Semiconductor flow velocity sensor |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP60012064A JPS61170618A (ja) | 1985-01-24 | 1985-01-24 | 流速検出用半導体センサ |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS61170618A true JPS61170618A (ja) | 1986-08-01 |
| JPH0476412B2 JPH0476412B2 (https=) | 1992-12-03 |
Family
ID=11795171
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP60012064A Granted JPS61170618A (ja) | 1985-01-24 | 1985-01-24 | 流速検出用半導体センサ |
Country Status (2)
| Country | Link |
|---|---|
| US (1) | US4680963A (https=) |
| JP (1) | JPS61170618A (https=) |
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH02193019A (ja) * | 1988-10-17 | 1990-07-30 | Yamatake Honeywell Co Ltd | フローセンサ |
| JPH03176668A (ja) * | 1989-12-05 | 1991-07-31 | Murata Mfg Co Ltd | 風速センサ |
| JP2006090989A (ja) * | 2004-09-27 | 2006-04-06 | Matsushita Electric Works Ltd | ガスフローセンサ装置およびそれに用いるガスフローセンサの製造方法 |
| US7419581B2 (en) | 2001-04-14 | 2008-09-02 | Robert Bosch Gmbh | Method for producing optically transparent regions in a silicon substrate |
| WO2012117446A1 (ja) * | 2011-03-02 | 2012-09-07 | 日立オートモティブシステムズ株式会社 | 熱式流量計 |
Families Citing this family (33)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE3606850A1 (de) * | 1986-03-03 | 1987-09-10 | Vdo Schindling | Anordnung zur messung der stroemungsgeschwindigkeit |
| DE3606851A1 (de) * | 1986-03-03 | 1987-09-10 | Vdo Schindling | Anordnung zur messung der stroemungsgeschwindigkeit |
| US4888988A (en) * | 1987-12-23 | 1989-12-26 | Siemens-Bendix Automotive Electronics L.P. | Silicon based mass airflow sensor and its fabrication method |
| US4884443A (en) * | 1987-12-23 | 1989-12-05 | Siemens-Bendix Automotive Electronics L. P. | Control and detection circuitry for mass airflow sensors |
| US4870745A (en) * | 1987-12-23 | 1989-10-03 | Siemens-Bendix Automotive Electronics L.P. | Methods of making silicon-based sensors |
| DE8900142U1 (de) * | 1989-01-07 | 1990-05-10 | Robert Bosch Gmbh, 7000 Stuttgart | Träger für Sensoren |
| US5003822A (en) * | 1989-10-02 | 1991-04-02 | Joshi Shrinivas G | Acoustic wave microsensors for measuring fluid flow |
| US5237867A (en) * | 1990-06-29 | 1993-08-24 | Siemens Automotive L.P. | Thin-film air flow sensor using temperature-biasing resistive element |
| FR2670579A1 (fr) * | 1990-12-14 | 1992-06-19 | Schlumberger Ind Sa | Capteur semi-conducteur de debit. |
| US5201221A (en) * | 1991-03-15 | 1993-04-13 | Ford Motor Company | Flow sensor and method of manufacture |
| US5231878A (en) * | 1991-12-23 | 1993-08-03 | Ford Motor Company | Mass air flow sensor |
| US6589433B2 (en) | 1996-06-26 | 2003-07-08 | Simon Fraser University | Accelerometer without proof mass |
| WO1997049998A1 (en) | 1996-06-26 | 1997-12-31 | Simon Fraser University | Accelerometer without proof mass |
| US6182509B1 (en) | 1996-06-26 | 2001-02-06 | Simon Fraser University | Accelerometer without proof mass |
| US6460411B1 (en) | 1997-02-14 | 2002-10-08 | Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. | Flow sensor component |
| GR1003010B (el) * | 1997-05-07 | 1998-11-20 | "����������" | Ολοκληρωμενος αισθητηρας ροης αεριων χρησιμοποιωντας τεχνολογια πορωδους πυριτιου |
| JP3514666B2 (ja) * | 1999-06-30 | 2004-03-31 | 株式会社日立製作所 | 熱式空気流量センサ |
| US6370307B1 (en) * | 1999-07-15 | 2002-04-09 | Agere Systems Guardian Corp. | Optical device formed on a substrate with thermal isolation regions formed therein |
| CH695166A5 (de) | 2000-04-25 | 2005-12-30 | Sensirion Ag | Verfahren und Vorrichtung zum Messen des Flusses einer Flüssigkeit. |
| WO2001084087A1 (de) * | 2000-05-04 | 2001-11-08 | Sensirion Ag | Flusssensor für flüssigkeiten |
| DE10032579B4 (de) * | 2000-07-05 | 2020-07-02 | Robert Bosch Gmbh | Verfahren zur Herstellung eines Halbleiterbauelements sowie ein nach dem Verfahren hergestelltes Halbleiterbauelement |
| DE10053326A1 (de) * | 2000-10-27 | 2002-05-08 | Bosch Gmbh Robert | Mikromechanisches Bauelement und Herstellungsverfahren |
| DE10058009A1 (de) * | 2000-11-23 | 2002-06-06 | Bosch Gmbh Robert | Strömungssensor |
| US6631638B2 (en) | 2001-01-30 | 2003-10-14 | Rosemount Aerospace Inc. | Fluid flow sensor |
| DE10117486A1 (de) * | 2001-04-07 | 2002-10-17 | Bosch Gmbh Robert | Verfahren zur Herstelung eines Halbleiterbauelements sowie ein nach dem Verfahren hergestelltes Halbleiterbauelement |
| JP2006514278A (ja) * | 2003-02-03 | 2006-04-27 | インディアン インスティテュート オブ サイエンス | 気体流速測定のための方法、固体材料にかけて流れる気体流を用いるエネルギー変換のための方法及びこれらの方法のためのデバイス |
| JP2005241279A (ja) * | 2004-02-24 | 2005-09-08 | Fujikin Inc | 耐食金属製流体用センサ及びこれを用いた流体供給機器 |
| US7278308B2 (en) * | 2005-12-08 | 2007-10-09 | Honeywell International Inc. | Thermal isolation between heating and sensing for flow sensors |
| DE102005061703A1 (de) * | 2005-12-21 | 2007-07-05 | Innovative Sensor Technology Ist Ag | Vorrichtung zur Bestimmung und/oder Überwachung einer Prozessgrösse und Verfahren zur Herstellung einer entsprechenden Sensoreinheit |
| WO2012012769A2 (en) * | 2010-07-23 | 2012-01-26 | Fluid Components International Llc | Shield for heat transfer restriction for high flow rate use in a thermal flow rate sensor |
| JP5857050B2 (ja) * | 2011-07-13 | 2016-02-10 | 日立オートモティブシステムズ株式会社 | 流量計 |
| CN107430018B (zh) * | 2015-04-30 | 2022-03-18 | 惠普发展公司，有限责任合伙企业 | 微流体流动传感器 |
| JP7410022B2 (ja) * | 2019-04-16 | 2024-01-09 | 智一 池野 | 流速センサ |
Family Cites Families (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4129848A (en) * | 1975-09-03 | 1978-12-12 | Raytheon Company | Platinum film resistor device |
| DE2925975A1 (de) * | 1979-06-27 | 1981-01-15 | Siemens Ag | Mengendurchflussmesser |
| JPS5618750A (en) * | 1979-07-25 | 1981-02-21 | Ricoh Co Ltd | Gas detector |
| US4471647A (en) * | 1980-04-18 | 1984-09-18 | Board Of Regents Of Stanford University | Gas chromatography system and detector and method |
| JPS59147221A (ja) * | 1983-02-11 | 1984-08-23 | Nippon Soken Inc | 半導体式流量検出装置 |
| JPS6094738A (ja) * | 1983-10-28 | 1985-05-27 | Matsushita Electric Works Ltd | 半導体基板 |
| US4532700A (en) * | 1984-04-27 | 1985-08-06 | International Business Machines Corporation | Method of manufacturing semiconductor structures having an oxidized porous silicon isolation layer |
| US4594889A (en) * | 1984-12-06 | 1986-06-17 | Ford Motor Company | Mass airflow sensor |
-
1985
- 1985-01-24 JP JP60012064A patent/JPS61170618A/ja active Granted
-
1986
- 1986-01-21 US US06/820,703 patent/US4680963A/en not_active Expired - Fee Related
Cited By (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH02193019A (ja) * | 1988-10-17 | 1990-07-30 | Yamatake Honeywell Co Ltd | フローセンサ |
| JPH03176668A (ja) * | 1989-12-05 | 1991-07-31 | Murata Mfg Co Ltd | 風速センサ |
| US7419581B2 (en) | 2001-04-14 | 2008-09-02 | Robert Bosch Gmbh | Method for producing optically transparent regions in a silicon substrate |
| JP2006090989A (ja) * | 2004-09-27 | 2006-04-06 | Matsushita Electric Works Ltd | ガスフローセンサ装置およびそれに用いるガスフローセンサの製造方法 |
| WO2012117446A1 (ja) * | 2011-03-02 | 2012-09-07 | 日立オートモティブシステムズ株式会社 | 熱式流量計 |
| JP5857032B2 (ja) * | 2011-03-02 | 2016-02-10 | 日立オートモティブシステムズ株式会社 | 熱式流量計 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0476412B2 (https=) | 1992-12-03 |
| US4680963A (en) | 1987-07-21 |
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