GR1003010B - Ολοκληρωμενος αισθητηρας ροης αεριων χρησιμοποιωντας τεχνολογια πορωδους πυριτιου - Google Patents

Ολοκληρωμενος αισθητηρας ροης αεριων χρησιμοποιωντας τεχνολογια πορωδους πυριτιου

Info

Publication number
GR1003010B
GR1003010B GR970100176A GR970100176A GR1003010B GR 1003010 B GR1003010 B GR 1003010B GR 970100176 A GR970100176 A GR 970100176A GR 970100176 A GR970100176 A GR 970100176A GR 1003010 B GR1003010 B GR 1003010B
Authority
GR
Greece
Prior art keywords
membrane
porous silicon
gas flow
flow sensor
polysilicon
Prior art date
Application number
GR970100176A
Other languages
English (en)
Inventor
Original Assignee
"����������"
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by "����������" filed Critical "����������"
Publication of GR1003010B publication Critical patent/GR1003010B/el

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
    • G01F1/00—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow
    • G01F1/68—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow by using thermal effects
    • G01F1/684—Structural arrangements; Mounting of elements, e.g. in relation to fluid flow
    • G01F1/6845—Micromachined devices
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
    • G01F1/00—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow
    • G01F1/68—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow by using thermal effects
    • G01F1/684—Structural arrangements; Mounting of elements, e.g. in relation to fluid flow
    • G01F1/688—Structural arrangements; Mounting of elements, e.g. in relation to fluid flow using a particular type of heating, cooling or sensing element
    • G01F1/6888—Thermoelectric elements, e.g. thermocouples, thermopiles

Landscapes

  • Physics & Mathematics (AREA)
  • Fluid Mechanics (AREA)
  • General Physics & Mathematics (AREA)
  • Measuring Volume Flow (AREA)
  • Pressure Sensors (AREA)
  • Micromachines (AREA)
GR970100176A 1997-05-07 1997-05-07 Ολοκληρωμενος αισθητηρας ροης αεριων χρησιμοποιωντας τεχνολογια πορωδους πυριτιου GR1003010B (el)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
GR97100176 1997-05-07

Publications (1)

Publication Number Publication Date
GR1003010B true GR1003010B (el) 1998-11-20

Family

ID=10942968

Family Applications (1)

Application Number Title Priority Date Filing Date
GR970100176A GR1003010B (el) 1997-05-07 1997-05-07 Ολοκληρωμενος αισθητηρας ροης αεριων χρησιμοποιωντας τεχνολογια πορωδους πυριτιου

Country Status (2)

Country Link
GR (1) GR1003010B (el)
WO (1) WO1998050763A1 (el)

Families Citing this family (17)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR100434537B1 (ko) * 1999-03-31 2004-06-05 삼성전자주식회사 다공질 실리콘 혹은 다공질 산화 실리콘을 이용한 두꺼운 희생층을 가진 다층 구조 웨이퍼 및 그 제조방법
DE19924320A1 (de) * 1999-05-27 2000-12-07 Bosch Gmbh Robert Isoliervorrichtung und Verfahren zur Herstellung eines isolierten Bereiches
GR1003448B (el) * 1999-07-30 2000-10-05 "����������", ���������� ����������������� Διαταξη ολοκληρωμενης μπαταριας "επαφης" σε ψηφιδα πυριτιου
KR100331226B1 (ko) * 2000-02-23 2002-04-26 이상헌 다공성 산화 실리콘 기둥을 이용하여 형성한 초고주파용 소자
DE10053326A1 (de) * 2000-10-27 2002-05-08 Bosch Gmbh Robert Mikromechanisches Bauelement und Herstellungsverfahren
DE10058009A1 (de) 2000-11-23 2002-06-06 Bosch Gmbh Robert Strömungssensor
EP1223411A1 (en) * 2001-01-12 2002-07-17 Lidact GmbH Universal sensor for measuring shear stress, mass flow or velocity of a fluid or gas, for determining a number of drops, or detecting drip or leakage
US6631638B2 (en) 2001-01-30 2003-10-14 Rosemount Aerospace Inc. Fluid flow sensor
DE10117486A1 (de) * 2001-04-07 2002-10-17 Bosch Gmbh Robert Verfahren zur Herstelung eines Halbleiterbauelements sowie ein nach dem Verfahren hergestelltes Halbleiterbauelement
DE10136164A1 (de) * 2001-07-25 2003-02-20 Bosch Gmbh Robert Mikromechanisches Bauelement
GR1004040B (el) * 2001-07-31 2002-10-31 Μεθοδος για την κατασκευη αιωρουμενων μεμβρανων πορωδους πυριτιου και εφαρμογης της σε αισθητηρες αεριων
GR1004106B (el) * 2002-01-24 2003-01-13 Εκεφε "Δημοκριτος" Ινστιτουτο Μικροηλεκτρονικης Ολοκληρωμενοι θερμικοι αισθητηρες πυριτιου χαμηλης ισχυος και διαταξεις μικρο-ροης βασισμενοι στην χρηση τεχνολογιας κοιλοτητας αερα σφραγισμενης με μεμβρανη πορωδους πυριτιου ή τεχνολογιας μικρο-καναλιων
US7191645B2 (en) * 2003-08-14 2007-03-20 Fluid Components International Llc Dynamic mixed gas flowmeter
ITTO20130502A1 (it) 2013-06-18 2014-12-19 St Microelectronics Asia Dispositivo elettronico con sensore di temperatura integrato e relativo metodo di fabbricazione
JP6438706B2 (ja) * 2014-08-22 2018-12-19 日立オートモティブシステムズ株式会社 センサ装置
JP7112373B2 (ja) * 2019-05-24 2022-08-03 Ｍｍｉセミコンダクター株式会社 フローセンサチップ
CN113049053B (zh) * 2021-03-15 2022-12-30 青岛芯笙微纳电子科技有限公司 一种高性能mems流量传感器及其制备方法

Family Cites Families (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS61170618A (ja) * 1985-01-24 1986-08-01 Toyota Central Res & Dev Lab Inc 流速検出用半導体センサ
CN1018844B (zh) * 1990-06-02 1992-10-28 中国科学院兰州化学物理研究所 防锈干膜润滑剂
DE4041578C2 (de) * 1990-12-22 1997-07-17 Bosch Gmbh Robert Verfahren zur Herstellung eines Sensors zur Messung der Geschwindigkeit bzw. der Durchflußmenge eines strömenden Mediums
US5231878A (en) * 1991-12-23 1993-08-03 Ford Motor Company Mass air flow sensor
DE4303423C2 (de) * 1993-02-05 1996-07-18 Fraunhofer Ges Forschung Sensor und Verfahren zu dessen Herstellung
DE4418207C1 (de) * 1994-05-25 1995-06-22 Siemens Ag Thermischer Sensor/Aktuator in Halbleitermaterial
DE19520777C1 (de) * 1995-06-07 1996-08-29 Inst Physikalische Hochtech Ev Temperaturkompensierter Mikroströmungssensor

Also Published As

Publication number Publication date
WO1998050763A1 (en) 1998-11-12

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