GR1004040B - Μεθοδος για την κατασκευη αιωρουμενων μεμβρανων πορωδους πυριτιου και εφαρμογης της σε αισθητηρες αεριων - Google Patents

Μεθοδος για την κατασκευη αιωρουμενων μεμβρανων πορωδους πυριτιου και εφαρμογης της σε αισθητηρες αεριων

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Publication number
GR1004040B
GR1004040B GR20010100378A GR2001100378A GR1004040B GR 1004040 B GR1004040 B GR 1004040B GR 20010100378 A GR20010100378 A GR 20010100378A GR 2001100378 A GR2001100378 A GR 2001100378A GR 1004040 B GR1004040 B GR 1004040B
Authority
GR
Greece
Prior art keywords
porous silicon
fabrication
suspended
silicon layer
membranes
Prior art date
Application number
GR20010100378A
Other languages
English (en)
Inventor
Original Assignee
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by filed Critical
Priority to GR20010100378A priority Critical patent/GR1004040B/el
Priority to US10/485,940 priority patent/US20040195096A1/en
Priority to CNA028152123A priority patent/CN1538934A/zh
Priority to DE60217359T priority patent/DE60217359D1/de
Priority to EP02712117A priority patent/EP1417151B9/en
Priority to PCT/GR2002/000008 priority patent/WO2003011747A1/en
Priority to AT02712117T priority patent/ATE350333T1/de
Priority to JP2003516946A priority patent/JP2005502480A/ja
Publication of GR1004040B publication Critical patent/GR1004040B/el

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Classifications

    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05B—ELECTRIC HEATING; ELECTRIC LIGHT SOURCES NOT OTHERWISE PROVIDED FOR; CIRCUIT ARRANGEMENTS FOR ELECTRIC LIGHT SOURCES, IN GENERAL
    • H05B3/00—Ohmic-resistance heating
    • H05B3/20—Heating elements having extended surface area substantially in a two-dimensional plane, e.g. plate-heater
    • H05B3/22—Heating elements having extended surface area substantially in a two-dimensional plane, e.g. plate-heater non-flexible
    • H05B3/26—Heating elements having extended surface area substantially in a two-dimensional plane, e.g. plate-heater non-flexible heating conductor mounted on insulating base
    • H05B3/265—Heating elements having extended surface area substantially in a two-dimensional plane, e.g. plate-heater non-flexible heating conductor mounted on insulating base the insulating base being an inorganic material, e.g. ceramic
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81C—PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS
    • B81C1/00—Manufacture or treatment of devices or systems in or on a substrate
    • B81C1/00642—Manufacture or treatment of devices or systems in or on a substrate for improving the physical properties of a device
    • B81C1/0065—Mechanical properties
    • B81C1/00682—Treatments for improving mechanical properties, not provided for in B81C1/00658 - B81C1/0065
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81C—PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS
    • B81C1/00—Manufacture or treatment of devices or systems in or on a substrate
    • B81C1/00642—Manufacture or treatment of devices or systems in or on a substrate for improving the physical properties of a device
    • B81C1/0069—Thermal properties, e.g. improve thermal insulation
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
    • G01F1/00—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow
    • G01F1/68—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow by using thermal effects
    • G01F1/684—Structural arrangements; Mounting of elements, e.g. in relation to fluid flow
    • G01F1/6845—Micromachined devices
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
    • B81B2201/00—Specific applications of microelectromechanical systems
    • B81B2201/02—Sensors
    • B81B2201/0278—Temperature sensors
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
    • B81B2203/00—Basic microelectromechanical structures
    • B81B2203/01—Suspended structures, i.e. structures allowing a movement
    • B81B2203/0109—Bridges
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
    • B81B2203/00—Basic microelectromechanical structures
    • B81B2203/01—Suspended structures, i.e. structures allowing a movement
    • B81B2203/0118—Cantilevers
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81C—PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS
    • B81C2201/00—Manufacture or treatment of microstructural devices or systems
    • B81C2201/01—Manufacture or treatment of microstructural devices or systems in or on a substrate
    • B81C2201/0101—Shaping material; Structuring the bulk substrate or layers on the substrate; Film patterning
    • B81C2201/0111—Bulk micromachining
    • B81C2201/0115—Porous silicon
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N27/00—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means
    • G01N27/02—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance
    • G01N27/04—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating resistance
    • G01N27/12—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating resistance of a solid body in dependence upon absorption of a fluid; of a solid body in dependence upon reaction with a fluid, for detecting components in the fluid
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N27/00—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means
    • G01N27/02—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance
    • G01N27/04—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating resistance
    • G01N27/14—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating resistance of an electrically-heated body in dependence upon change of temperature
    • G01N27/16—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating resistance of an electrically-heated body in dependence upon change of temperature caused by burning or catalytic oxidation of surrounding material to be tested, e.g. of gas
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N27/00—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means
    • G01N27/02—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance
    • G01N27/04—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating resistance
    • G01N27/14—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating resistance of an electrically-heated body in dependence upon change of temperature
    • G01N27/18—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating resistance of an electrically-heated body in dependence upon change of temperature caused by changes in the thermal conductivity of a surrounding material to be tested

Abstract

εφεύρεση αναφέρεται σε μία τεχνική μικρομηχανικής όγκου εμπρόσθιας όψης για την κατασκευή αιωρούμενων μεμβρανών πορώδους πυριτίου με μορφή γέφυρας ή προβόλου, με σκοπό τη χρήση τους σαν στοιχείων στην κατασκευή θερμικών αισθητήρων. Η κατασκευή τωναιωρούμενων μεμβρανών πορώδους πυριτίου περιλαμβάνει τα ακόλουθα βήματα: (α) Σχηματισμό ενός στρώματος πορώδους πυριτίου (2), τουλάχιστον σε μία προκαθορισμένη περιοχή ενός υποστρώματος πυριτίου (1), (β) ορισμό των παράθυρων εγχάραξης (5) γύρω ή μέσα στο στρώμα του πορώδους πυριτίου (2) χρησιμοποιώντας τεχνικές λιθογραφίας και (γ) επιλεκτική εγχάραξη του υποστρώματος του πυριτίου (1), κάτω από το στρώμα του πορώδους πυριτίου (2), με τεχνικές ξηρής εγχάραξης, ώστε να απελευθερωθεί η μεμβράνη τουπορώδους πυριτίου (2) και να σχηματιστεί μία κοιλότητα (6) κάτω από αυτή. Επιπλέον, η εφεύρεση αναφέρεται σε μία μεθοδολογία για την κατασκευή θερμικών αισθητήρων, με χρήση αιωρούμενων μεμβρανών πορώδους πυριτίου με ελαχιστοποίηση των θερμικών απωλειών, καθώς συνδυάζει τα πλεονεκτήματα που προκύπτουν από τη μικρή θερμική αγωγιμότητα του πορώδους πυριτίου και τη χρήση αιωρούμενων μεμβρανών. Επιπρόσθετα, η μικρομηχανική διεργασία που περιγράφεται στην εφεύρεση απλοποιεί την διαδικασία κατασκευής των αισθητήρων γιατί λαμβάνει χώρα μόνο από τη μία πλευρά του δισκίου και μειώνει την απαιτούμενη επιφάνεια (σμίκρυνση διαστάσεων του αισθητήρα). Στην εφεύρεση περιγράφονται διάφοροι τύποι θερμικών αισθητήρων, όπως αισθητήρες αερίων τύπου θερμιδομετρίας, αισθητήρες αερίων τύπου αγωγιμότητας και αισθητήρες θερμικής αγωγιμότητας, οι οποίοι κατασκευάζονται με τη χρήση της προτεινόμενης μεθοδολογίας. ΰ
GR20010100378A 2001-07-31 2001-07-31 Μεθοδος για την κατασκευη αιωρουμενων μεμβρανων πορωδους πυριτιου και εφαρμογης της σε αισθητηρες αεριων GR1004040B (el)

Priority Applications (8)

Application Number Priority Date Filing Date Title
GR20010100378A GR1004040B (el) 2001-07-31 2001-07-31 Μεθοδος για την κατασκευη αιωρουμενων μεμβρανων πορωδους πυριτιου και εφαρμογης της σε αισθητηρες αεριων
US10/485,940 US20040195096A1 (en) 2001-07-31 2002-02-18 Method for the fabrication of suspended porous silicon microstructures and application in gas sensors
CNA028152123A CN1538934A (zh) 2001-07-31 2002-02-18 制造悬浮多孔硅微结构的方法及其在气体传感器中的应用
DE60217359T DE60217359D1 (de) 2001-07-31 2002-02-18 Verfahren zur herstellung aufgehängter poröser siliziummikrostrukturen und anwendung in gassensoren
EP02712117A EP1417151B9 (en) 2001-07-31 2002-02-18 Method for the fabrication of suspended porous silicon microstructures and application in gas sensors
PCT/GR2002/000008 WO2003011747A1 (en) 2001-07-31 2002-02-18 Method for the fabrication of suspended porous silicon microstructures and application in gas sensors
AT02712117T ATE350333T1 (de) 2001-07-31 2002-02-18 Verfahren zur herstellung aufgehängter poröser siliziummikrostrukturen und anwendung in gassensoren
JP2003516946A JP2005502480A (ja) 2001-07-31 2002-02-18 掛架した多孔質シリコンの微小構造の製造方法、及びガスセンサへの適用

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
GR20010100378A GR1004040B (el) 2001-07-31 2001-07-31 Μεθοδος για την κατασκευη αιωρουμενων μεμβρανων πορωδους πυριτιου και εφαρμογης της σε αισθητηρες αεριων

Publications (1)

Publication Number Publication Date
GR1004040B true GR1004040B (el) 2002-10-31

Family

ID=10944796

Family Applications (1)

Application Number Title Priority Date Filing Date
GR20010100378A GR1004040B (el) 2001-07-31 2001-07-31 Μεθοδος για την κατασκευη αιωρουμενων μεμβρανων πορωδους πυριτιου και εφαρμογης της σε αισθητηρες αεριων

Country Status (8)

Country Link
US (1) US20040195096A1 (el)
EP (1) EP1417151B9 (el)
JP (1) JP2005502480A (el)
CN (1) CN1538934A (el)
AT (1) ATE350333T1 (el)
DE (1) DE60217359D1 (el)
GR (1) GR1004040B (el)
WO (1) WO2003011747A1 (el)

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