CN101795505B - 一种具有网孔结构加热膜的低功耗微型加热器及制作方法 - Google Patents
一种具有网孔结构加热膜的低功耗微型加热器及制作方法 Download PDFInfo
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- CN101795505B CN101795505B CN 201010110083 CN201010110083A CN101795505B CN 101795505 B CN101795505 B CN 101795505B CN 201010110083 CN201010110083 CN 201010110083 CN 201010110083 A CN201010110083 A CN 201010110083A CN 101795505 B CN101795505 B CN 101795505B
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CN 201010110083 CN101795505B (zh) | 2010-02-11 | 2010-02-11 | 一种具有网孔结构加热膜的低功耗微型加热器及制作方法 |
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CN 201010110083 CN101795505B (zh) | 2010-02-11 | 2010-02-11 | 一种具有网孔结构加热膜的低功耗微型加热器及制作方法 |
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CN101795505B true CN101795505B (zh) | 2013-04-17 |
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Families Citing this family (18)
Publication number | Priority date | Publication date | Assignee | Title |
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CN101917783A (zh) * | 2010-09-10 | 2010-12-15 | 中国科学院上海微系统与信息技术研究所 | 具有弧度可调的圆弧形加热膜区的三维微型加热器及方法 |
CN101938862B (zh) * | 2010-09-10 | 2012-08-15 | 上海芯敏微系统技术有限公司 | 一种具有螺管式加热电阻的三维微型加热器及其制作方法 |
CN102256386A (zh) * | 2011-05-20 | 2011-11-23 | 中国科学院上海微系统与信息技术研究所 | 具有非均匀线间距加热电阻丝的矩形微型加热器及方法 |
CN102256387A (zh) * | 2011-05-20 | 2011-11-23 | 中国科学院上海微系统与信息技术研究所 | 具有非均匀线宽加热电阻丝的矩形微型加热器及方法 |
GB2504076A (en) * | 2012-07-16 | 2014-01-22 | Nicoventures Holdings Ltd | Electronic smoking device |
GB2504075A (en) | 2012-07-16 | 2014-01-22 | Nicoventures Holdings Ltd | Electronic smoking device |
FR2995692B1 (fr) * | 2012-09-19 | 2014-10-10 | Commissariat Energie Atomique | Capteur de flux thermique a resolution augmentee |
EP3033608A1 (de) * | 2013-08-14 | 2016-06-22 | Robert Bosch GmbH | Partikelsensor und verfahren zum herstellen eines partikelsensors |
CN103708410B (zh) * | 2013-12-13 | 2016-03-02 | 同济大学 | 一种微加热器及其制备方法 |
CN103922274B (zh) * | 2014-04-30 | 2016-01-13 | 中国科学院上海微系统与信息技术研究所 | 一种三维红外光源的制作方法 |
GB201505597D0 (en) | 2015-03-31 | 2015-05-13 | British American Tobacco Co | Article for use with apparatus for heating smokable material |
GB201505595D0 (en) | 2015-03-31 | 2015-05-13 | British American Tobacco Co | Cartridge for use with apparatus for heating smokeable material |
CN105116023A (zh) * | 2015-07-07 | 2015-12-02 | 江苏物联网研究发展中心 | Mos型气体传感器及制备方法 |
CN105472787B (zh) * | 2015-12-17 | 2018-09-11 | 湖北捷讯光电有限公司 | 一种微型薄膜电阻加热器 |
CN105565249B (zh) * | 2015-12-28 | 2017-08-22 | 上海集成电路研发中心有限公司 | 一种微辐射探测器的微桥结构及其阵列 |
CN105742529A (zh) * | 2016-04-14 | 2016-07-06 | 东莞新能源科技有限公司 | 一种锂离子电池包装用复合膜,其封装外壳及制备方法 |
CN105873249B (zh) * | 2016-05-30 | 2022-09-27 | 京东方科技集团股份有限公司 | 加热器、传感器、智能终端及加热器的制作方法 |
CN107089638A (zh) * | 2017-04-24 | 2017-08-25 | 广东美的制冷设备有限公司 | 微型加热器及其加工方法 |
Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
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US5464966A (en) * | 1992-10-26 | 1995-11-07 | The United States Of America As Represented By The Secretary Of Commerce | Micro-hotplate devices and methods for their fabrication |
CN1538934A (zh) * | 2001-07-31 | 2004-10-20 | ����Ĭ������˹�����ҿ�ѧ�о����� | 制造悬浮多孔硅微结构的方法及其在气体传感器中的应用 |
CN1920528A (zh) * | 2005-08-25 | 2007-02-28 | 横河电机株式会社 | 红外线气体分析器 |
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2010
- 2010-02-11 CN CN 201010110083 patent/CN101795505B/zh active Active
Patent Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5464966A (en) * | 1992-10-26 | 1995-11-07 | The United States Of America As Represented By The Secretary Of Commerce | Micro-hotplate devices and methods for their fabrication |
CN1538934A (zh) * | 2001-07-31 | 2004-10-20 | ����Ĭ������˹�����ҿ�ѧ�о����� | 制造悬浮多孔硅微结构的方法及其在气体传感器中的应用 |
CN1920528A (zh) * | 2005-08-25 | 2007-02-28 | 横河电机株式会社 | 红外线气体分析器 |
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Effective date of registration: 20181008 Address after: 230000 room 1609, F3 building, innovation industry park, 2800 innovation Avenue, Hefei high tech Zone, Anhui. Patentee after: HEFEI MICRO NANO SENSING TECHNOLOGY Co.,Ltd. Address before: 200050 No. 865, Changning Road, Shanghai, Changning District Patentee before: Shanghai Institute of Microsystem and Information Technology, Chinese Academy of Sciences |
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Address after: 230000 building D6, phase I, Zhongan chuanggu Science Park, No. 900, Wangjiang West Road, high tech Zone, Hefei, Anhui Patentee after: Micro nano perception (Hefei) Technology Co.,Ltd. Country or region after: China Address before: 230000 room 1609, F3 building, innovation industry park, 2800 innovation Avenue, Hefei high tech Zone, Anhui. Patentee before: HEFEI MICRO NANO SENSING TECHNOLOGY Co.,Ltd. Country or region before: China |