DE69612576D1 - Mikrobearbeiteter symmetrischer Differentialdrucksensor mit Polysilizium - Google Patents
Mikrobearbeiteter symmetrischer Differentialdrucksensor mit PolysiliziumInfo
- Publication number
- DE69612576D1 DE69612576D1 DE69612576T DE69612576T DE69612576D1 DE 69612576 D1 DE69612576 D1 DE 69612576D1 DE 69612576 T DE69612576 T DE 69612576T DE 69612576 T DE69612576 T DE 69612576T DE 69612576 D1 DE69612576 D1 DE 69612576D1
- Authority
- DE
- Germany
- Prior art keywords
- micromachined
- polysilicon
- pressure sensor
- differential pressure
- symmetrical differential
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
- G01L9/0041—Transmitting or indicating the displacement of flexible diaphragms
- G01L9/0072—Transmitting or indicating the displacement of flexible diaphragms using variations in capacitance
- G01L9/0073—Transmitting or indicating the displacement of flexible diaphragms using variations in capacitance using a semiconductive diaphragm
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Measuring Fluid Pressure (AREA)
- Pressure Sensors (AREA)
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
FI950715A FI100918B (fi) | 1995-02-17 | 1995-02-17 | Pintamikromekaaninen, symmetrinen paine-eroanturi |
Publications (2)
Publication Number | Publication Date |
---|---|
DE69612576D1 true DE69612576D1 (de) | 2001-05-31 |
DE69612576T2 DE69612576T2 (de) | 2002-05-29 |
Family
ID=8542876
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
DE69612576T Expired - Fee Related DE69612576T2 (de) | 1995-02-17 | 1996-02-14 | Mikrobearbeiteter symmetrischer Differentialdrucksensor mit Polysilizium |
Country Status (6)
Country | Link |
---|---|
US (1) | US5679902A (de) |
EP (1) | EP0727650B1 (de) |
JP (1) | JPH08247878A (de) |
DE (1) | DE69612576T2 (de) |
FI (1) | FI100918B (de) |
NO (1) | NO960617L (de) |
Families Citing this family (30)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US6012336A (en) * | 1995-09-06 | 2000-01-11 | Sandia Corporation | Capacitance pressure sensor |
DE19648424C1 (de) * | 1996-11-22 | 1998-06-25 | Siemens Ag | Mikromechanischer Sensor |
CN1245559A (zh) * | 1996-11-28 | 2000-02-23 | 西门子公司 | 用于制作微力学传感器的方法 |
DE69702745T2 (de) * | 1997-03-04 | 2000-12-07 | Stmicroelectronics S.R.L., Agrate Brianza | Methode zur Herstellung von mikromechanischen Drucksensoren |
WO2000011444A1 (en) | 1998-08-19 | 2000-03-02 | Wisconsin Alumni Research Foundation | Sealed capacitive pressure sensors |
FI20000339A (fi) | 2000-02-16 | 2001-08-16 | Nokia Mobile Phones Ltd | Mikromekaaninen säädettävä kondensaattori ja integroitu säädettävä resonaattori |
FI115500B (fi) * | 2000-03-21 | 2005-05-13 | Nokia Oyj | Menetelmä kalvoanturin valmistamiseksi |
FI112644B (fi) | 2000-11-10 | 2003-12-31 | Vaisala Oyj | Pintamikromekaaninen absoluuttipaineanturi ja menetelmä sen valmistamiseksi |
US6860154B2 (en) | 2001-01-16 | 2005-03-01 | Fujikura Ltd. | Pressure sensor and manufacturing method thereof |
JP4296728B2 (ja) | 2001-07-06 | 2009-07-15 | 株式会社デンソー | 静電容量型圧力センサおよびその製造方法並びに静電容量型圧力センサに用いるセンサ用構造体 |
US6774457B2 (en) * | 2001-09-13 | 2004-08-10 | Texas Instruments Incorporated | Rectangular contact used as a low voltage fuse element |
EP1359402B1 (de) * | 2002-05-01 | 2014-10-01 | Infineon Technologies AG | Drucksensor |
US6575026B1 (en) | 2002-06-28 | 2003-06-10 | Eastman Kodak Company | Measuring absolute static pressure at one or more positions along a microfluidic device |
US6790699B2 (en) | 2002-07-10 | 2004-09-14 | Robert Bosch Gmbh | Method for manufacturing a semiconductor device |
US6843121B1 (en) | 2003-08-25 | 2005-01-18 | Eastman Kodak Company | Measuring absolute static pressure at one or more positions along a microfluidic device |
US7100453B2 (en) * | 2003-12-30 | 2006-09-05 | Honeywell International Inc. | Modified dual diaphragm pressure sensor |
US6901807B1 (en) * | 2003-12-30 | 2005-06-07 | Honeywell International Inc. | Positive and negative pressure sensor |
US7231832B2 (en) * | 2004-09-13 | 2007-06-19 | United States Of America As Represented By The Administrator Of The National Aeronautics And Space Administration | System and method for detecting cracks and their location |
DE102005004877A1 (de) * | 2005-02-03 | 2006-08-10 | Robert Bosch Gmbh | Mikromechanisches Bauelement und entsprechendes Herstellungsverfahren |
US7231829B2 (en) * | 2005-03-31 | 2007-06-19 | Medtronic, Inc. | Monolithic integrated circuit/pressure sensor on pacing lead |
JP4535046B2 (ja) * | 2006-08-22 | 2010-09-01 | ヤマハ株式会社 | 静電容量センサ及びその製造方法 |
US9616223B2 (en) | 2005-12-30 | 2017-04-11 | Medtronic, Inc. | Media-exposed interconnects for transducers |
FR2947629B1 (fr) * | 2009-07-06 | 2012-03-30 | Tronic S Microsystems | Dispositif de mesure de pression et son procede de fabrication |
US8617960B2 (en) * | 2009-12-31 | 2013-12-31 | Texas Instruments Incorporated | Silicon microphone transducer |
JP2011193342A (ja) * | 2010-03-16 | 2011-09-29 | Panasonic Corp | Memsデバイス |
US10485435B2 (en) | 2012-03-26 | 2019-11-26 | Medtronic, Inc. | Pass-through implantable medical device delivery catheter with removeable distal tip |
US8904876B2 (en) * | 2012-09-29 | 2014-12-09 | Stryker Corporation | Flexible piezocapacitive and piezoresistive force and pressure sensors |
CN105067178B (zh) | 2015-05-29 | 2018-01-19 | 歌尔股份有限公司 | 一种差分电容式mems压力传感器及其制造方法 |
JP6582273B2 (ja) * | 2015-08-27 | 2019-10-02 | 新日本無線株式会社 | Mems素子の製造方法 |
US12072252B2 (en) * | 2021-09-24 | 2024-08-27 | Apple Inc. | Gap-increasing capacitive pressure sensor for increased range |
Family Cites Families (10)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE3310643C2 (de) * | 1983-03-24 | 1986-04-10 | Karlheinz Dr. 7801 Schallstadt Ziegler | Drucksensor |
US5490034A (en) * | 1989-01-13 | 1996-02-06 | Kopin Corporation | SOI actuators and microsensors |
US5177661A (en) * | 1989-01-13 | 1993-01-05 | Kopin Corporation | SOI diaphgram sensor |
US5431057A (en) * | 1990-02-12 | 1995-07-11 | Fraunhofer-Gesellschaft Zur Forderung Der Angewandten Forschung E.V. | Integratable capacitative pressure sensor |
US5188983A (en) * | 1990-04-11 | 1993-02-23 | Wisconsin Alumni Research Foundation | Polysilicon resonating beam transducers and method of producing the same |
DE69113632T2 (de) * | 1990-08-17 | 1996-03-21 | Analog Devices Inc | Monolithischer beschleunigungsmesser. |
DE4227819C2 (de) * | 1991-08-22 | 1996-10-17 | Yamatake Honeywell Co Ltd | Kapazitiver Drucksensor |
US5332469A (en) * | 1992-11-12 | 1994-07-26 | Ford Motor Company | Capacitive surface micromachined differential pressure sensor |
JPH06213747A (ja) * | 1993-01-14 | 1994-08-05 | Toyota Motor Corp | 容量型半導体センサ |
US5316619A (en) * | 1993-02-05 | 1994-05-31 | Ford Motor Company | Capacitive surface micromachine absolute pressure sensor and method for processing |
-
1995
- 1995-02-17 FI FI950715A patent/FI100918B/fi active
-
1996
- 1996-02-12 US US08/600,182 patent/US5679902A/en not_active Expired - Fee Related
- 1996-02-14 DE DE69612576T patent/DE69612576T2/de not_active Expired - Fee Related
- 1996-02-14 EP EP96301002A patent/EP0727650B1/de not_active Expired - Lifetime
- 1996-02-16 NO NO960617A patent/NO960617L/no not_active Application Discontinuation
- 1996-02-19 JP JP8030510A patent/JPH08247878A/ja active Pending
Also Published As
Publication number | Publication date |
---|---|
FI950715A0 (fi) | 1995-02-17 |
DE69612576T2 (de) | 2002-05-29 |
NO960617L (no) | 1996-08-19 |
FI950715A (fi) | 1996-08-18 |
US5679902A (en) | 1997-10-21 |
EP0727650A3 (de) | 1996-12-11 |
EP0727650A2 (de) | 1996-08-21 |
NO960617D0 (no) | 1996-02-16 |
JPH08247878A (ja) | 1996-09-27 |
FI100918B (fi) | 1998-03-13 |
EP0727650B1 (de) | 2001-04-25 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
8332 | No legal effect for de | ||
8370 | Indication of lapse of patent is to be deleted | ||
8339 | Ceased/non-payment of the annual fee |