FI943048A - Kapasitiivista tyyppiä oleva differentiaalinen paineanturi - Google Patents

Kapasitiivista tyyppiä oleva differentiaalinen paineanturi Download PDF

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Publication number
FI943048A
FI943048A FI943048A FI943048A FI943048A FI 943048 A FI943048 A FI 943048A FI 943048 A FI943048 A FI 943048A FI 943048 A FI943048 A FI 943048A FI 943048 A FI943048 A FI 943048A
Authority
FI
Finland
Prior art keywords
pressure sensor
differential pressure
capacitive type
type differential
capacitive
Prior art date
Application number
FI943048A
Other languages
English (en)
Swedish (sv)
Other versions
FI943048A0 (fi
Inventor
Felix Rudolf
Philippe Renaud
Original Assignee
Suisse Electronique Microtech
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Suisse Electronique Microtech filed Critical Suisse Electronique Microtech
Publication of FI943048A0 publication Critical patent/FI943048A0/fi
Publication of FI943048A publication Critical patent/FI943048A/fi

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
    • G01L9/0041—Transmitting or indicating the displacement of flexible diaphragms
    • G01L9/0042—Constructional details associated with semiconductive diaphragm sensors, e.g. etching, or constructional details of non-semiconductive diaphragms
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
    • G01L9/0041—Transmitting or indicating the displacement of flexible diaphragms
    • G01L9/0072—Transmitting or indicating the displacement of flexible diaphragms using variations in capacitance
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
    • G01L9/0041—Transmitting or indicating the displacement of flexible diaphragms
    • G01L9/0072—Transmitting or indicating the displacement of flexible diaphragms using variations in capacitance
    • G01L9/0073—Transmitting or indicating the displacement of flexible diaphragms using variations in capacitance using a semiconductive diaphragm
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
    • G01L9/0041—Transmitting or indicating the displacement of flexible diaphragms
    • G01L9/0072—Transmitting or indicating the displacement of flexible diaphragms using variations in capacitance
    • G01L9/0075—Transmitting or indicating the displacement of flexible diaphragms using variations in capacitance using a ceramic diaphragm, e.g. alumina, fused quartz, glass

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Engineering & Computer Science (AREA)
  • Ceramic Engineering (AREA)
  • Measuring Fluid Pressure (AREA)
FI943048A 1993-06-25 1994-06-23 Kapasitiivista tyyppiä oleva differentiaalinen paineanturi FI943048A (fi)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CH01911/93A CH688745A5 (fr) 1993-06-25 1993-06-25 Capteur de pression différentielle de type capacitif.

Publications (2)

Publication Number Publication Date
FI943048A0 FI943048A0 (fi) 1994-06-23
FI943048A true FI943048A (fi) 1994-12-26

Family

ID=4221481

Family Applications (1)

Application Number Title Priority Date Filing Date
FI943048A FI943048A (fi) 1993-06-25 1994-06-23 Kapasitiivista tyyppiä oleva differentiaalinen paineanturi

Country Status (5)

Country Link
EP (1) EP0639761A1 (fi)
JP (1) JPH0727646A (fi)
CH (1) CH688745A5 (fi)
FI (1) FI943048A (fi)
NO (1) NO942410L (fi)

Families Citing this family (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE19750131C2 (de) * 1997-11-13 2002-06-13 Infineon Technologies Ag Mikromechanische Differenzdrucksensorvorrichtung
JPH11295176A (ja) * 1998-04-14 1999-10-29 Nagano Keiki Co Ltd 差圧センサ
WO2000036385A1 (de) * 1998-12-15 2000-06-22 Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. Verfahren zum erzeugen einer mikromechanischen struktur für ein mikro-elektromechanisches element
US7273763B1 (en) * 1998-12-15 2007-09-25 Fraunhofer-Gesellschaft Zur Foerderung Der Angewandten Forschung E.V. Method of producing a micro-electromechanical element
EP1128175A1 (en) * 2000-02-23 2001-08-29 Ethniko Kentro Erevnas Fisikon Epistimon "Dimokritos" Long-term stable capacitive pressure sensor made with self-aligned process
IL151277A0 (en) 2000-02-23 2003-04-10 Nat Ct Scient Res Demokritos Capacitive pressure-responsive devices and their fabrication
DE10249238B4 (de) * 2002-10-23 2006-09-21 Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. Sensorchip für einen Differenzdrucksensor mit beidseitigem Überlastschutz
JP2004340576A (ja) * 2003-03-17 2004-12-02 Kyocera Corp 圧力検出装置用パッケージ
JP4940786B2 (ja) * 2006-06-29 2012-05-30 株式会社デンソー 圧力センサ
FR2905461B1 (fr) * 2006-08-31 2010-09-24 Peuvedic Jean Marc Le Dispositif de mesure des differences de pression dans des fluides.
ITUD20130145A1 (it) * 2013-11-06 2015-05-07 Eliwell Controls S R L Con Unico S Ocio Sensore digitale di pressione per un elettrodomestico ed elettrodomestico provvisto di detto sensore
DE102014119407A1 (de) * 2014-12-22 2016-06-23 Endress + Hauser Gmbh + Co. Kg Differenzdrucksensor und Differenzdruckmessaufnehmer mit einem solchen Differenzdrucksensor
CN112897450B (zh) * 2021-01-19 2022-11-11 北京遥测技术研究所 一种mems绝压式压力传感器及其加工方法

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4445383A (en) * 1982-06-18 1984-05-01 General Signal Corporation Multiple range capacitive pressure transducer
DE3404262A1 (de) * 1983-03-09 1984-09-13 Fuji Electric Co., Ltd., Kawasaki Kapazitiver messfuehler
US4565096A (en) * 1983-12-09 1986-01-21 Rosemount Inc. Pressure transducer
US4730496A (en) * 1986-06-23 1988-03-15 Rosemount Inc. Capacitance pressure sensor
US4879627A (en) * 1988-12-30 1989-11-07 United Technologies Corporation Differential capacitive pressure sensor with over-pressure protection
DE4132391C1 (en) * 1991-09-26 1992-10-01 Siemens Ag, 8000 Muenchen, De Pressure difference measurement transducer - has two electrically conducting diaphragms separated by insulating plate and has strain gauge connected to evaluation circuitry

Also Published As

Publication number Publication date
CH688745A5 (fr) 1998-02-13
EP0639761A1 (fr) 1995-02-22
NO942410L (no) 1994-12-27
JPH0727646A (ja) 1995-01-31
NO942410D0 (fi) 1994-06-24
FI943048A0 (fi) 1994-06-23

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