DK0735353T3 - Trykføler - Google Patents
TrykfølerInfo
- Publication number
- DK0735353T3 DK0735353T3 DK95104780T DK95104780T DK0735353T3 DK 0735353 T3 DK0735353 T3 DK 0735353T3 DK 95104780 T DK95104780 T DK 95104780T DK 95104780 T DK95104780 T DK 95104780T DK 0735353 T3 DK0735353 T3 DK 0735353T3
- Authority
- DK
- Denmark
- Prior art keywords
- pressure sensor
- sensor
- pressure
- Prior art date
Links
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L19/00—Details of, or accessories for, apparatus for measuring steady or quasi-steady pressure of a fluent medium insofar as such details or accessories are not special to particular types of pressure gauges
- G01L19/14—Housings
- G01L19/141—Monolithic housings, e.g. molded or one-piece housings
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L19/00—Details of, or accessories for, apparatus for measuring steady or quasi-steady pressure of a fluent medium insofar as such details or accessories are not special to particular types of pressure gauges
- G01L19/14—Housings
- G01L19/147—Details about the mounting of the sensor to support or covering means
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
- G01L9/0041—Transmitting or indicating the displacement of flexible diaphragms
- G01L9/0072—Transmitting or indicating the displacement of flexible diaphragms using variations in capacitance
- G01L9/0075—Transmitting or indicating the displacement of flexible diaphragms using variations in capacitance using a ceramic diaphragm, e.g. alumina, fused quartz, glass
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Engineering & Computer Science (AREA)
- Ceramic Engineering (AREA)
- Measuring Fluid Pressure (AREA)
- Measuring Oxygen Concentration In Cells (AREA)
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
EP95104780A EP0735353B2 (de) | 1995-03-31 | 1995-03-31 | Drucksensor |
Publications (1)
Publication Number | Publication Date |
---|---|
DK0735353T3 true DK0735353T3 (da) | 1999-09-06 |
Family
ID=8219145
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
DK95104780T DK0735353T3 (da) | 1995-03-31 | 1995-03-31 | Trykføler |
Country Status (6)
Country | Link |
---|---|
US (1) | US5665921A (da) |
EP (1) | EP0735353B2 (da) |
JP (1) | JP2763518B2 (da) |
CA (1) | CA2169991C (da) |
DE (1) | DE59504814D1 (da) |
DK (1) | DK0735353T3 (da) |
Families Citing this family (45)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
EP0759547B1 (de) * | 1995-08-19 | 2001-09-19 | Endress + Hauser GmbH + Co. | Drucksensor |
DE19816872B4 (de) * | 1998-04-16 | 2005-12-15 | Ebro Electronic Gmbh & Co. Kg | Meßvorrichtung zum Messen des Drucks einer Atmosphäre |
US6168566B1 (en) | 1998-10-14 | 2001-01-02 | Welch Allyn, Inc. | Pressure sensing device |
US6267009B1 (en) | 1998-12-14 | 2001-07-31 | Endress + Hauser Gmbh + Co. | Capacitive pressure sensor cells or differential pressure sensor cells and methods for manufacturing the same |
DE59801050D1 (de) * | 1998-12-14 | 2001-08-23 | Endress Hauser Gmbh Co | Kapazitive Druck- oder Differenzdruckmesszellen und Verfahren zu deren Herstellung |
US6374680B1 (en) | 1999-03-24 | 2002-04-23 | Endress + Hauser Gmbh + Co. | Capacitive pressure sensor or capacitive differential pressure sensor |
DE29918915U1 (de) * | 1999-10-27 | 2000-03-09 | TRW Automotive Electronics & Components GmbH & Co. KG, 78315 Radolfzell | Drucksensor |
US6319617B1 (en) | 1999-12-17 | 2001-11-20 | Agere Systems Gaurdian Corp. | Oxide-bondable solder |
DE10031135A1 (de) * | 2000-06-30 | 2002-01-17 | Grieshaber Vega Kg | Druckmeßvorrichtung |
US6869007B2 (en) * | 2001-01-26 | 2005-03-22 | Lucent Technologies Inc. | Oxidation-resistant reactive solders and brazes |
DE10107813A1 (de) * | 2001-02-20 | 2002-09-05 | Bosch Gmbh Robert | Drucksensormodul |
DE10163760C5 (de) * | 2001-12-28 | 2012-02-02 | Ebro Electronic Gmbh & Co. Kg | Vorrichtung und Verfahren zum Messen des Zustandes von Ölen und Fetten |
US6761380B2 (en) * | 2002-05-07 | 2004-07-13 | Delphi Technologies, Inc. | Filler neck assembly for fuel tank |
DE10231010B4 (de) * | 2002-07-09 | 2013-02-28 | Endress + Hauser Gmbh + Co. Kg | Verfahren zum Herstellen eines Druckmesswerks |
DE20219732U1 (de) * | 2002-12-18 | 2003-03-06 | Dbt Autom Gmbh | Druckaufnehmer für die Messung hydraulischer Drücke |
DE10260105A1 (de) | 2002-12-19 | 2004-07-01 | Robert Bosch Gmbh | Drucksensor |
DE10318678A1 (de) * | 2003-04-24 | 2004-12-30 | Vega Grieshaber Kg | Sensor, insbesondere Druck-Sensor zur Befestigung an einem Behältnis |
JP4127532B2 (ja) * | 2003-09-25 | 2008-07-30 | 株式会社青山製作所茨城工場 | 異材質部材からなる二部材の密封結合構造、及びその結合方法 |
DE102004031582A1 (de) * | 2004-06-29 | 2006-02-09 | Endress + Hauser Gmbh + Co. Kg | Duckaufnehmer |
US20060220223A1 (en) * | 2005-03-29 | 2006-10-05 | Daoqiang Lu | Reactive nano-layer material for MEMS packaging |
US7538401B2 (en) | 2005-05-03 | 2009-05-26 | Rosemount Aerospace Inc. | Transducer for use in harsh environments |
US7628309B1 (en) * | 2005-05-03 | 2009-12-08 | Rosemount Aerospace Inc. | Transient liquid phase eutectic bonding |
US20070013014A1 (en) * | 2005-05-03 | 2007-01-18 | Shuwen Guo | High temperature resistant solid state pressure sensor |
DE102005048450B4 (de) * | 2005-10-07 | 2010-07-15 | Eads Deutschland Gmbh | Sensor mit einem auswechselbaren Sensorelement, insbesondere Drucksensor |
JP4661716B2 (ja) * | 2006-07-24 | 2011-03-30 | 株式会社日立プラントテクノロジー | 基板貼合装置 |
DE102006035230A1 (de) * | 2006-07-26 | 2008-01-31 | Endress + Hauser Gmbh + Co. Kg | Druckmessaufnehmer |
DE102007039297B3 (de) * | 2007-08-20 | 2009-02-05 | Vega Grieshaber Kg | Druckmesseinrichtung |
ES2412931T3 (es) * | 2009-11-20 | 2013-07-12 | Future Technology (Sensors) Ltd | Conjuntos sensores |
EP2395336B1 (en) | 2010-06-08 | 2018-08-01 | Sensata Technologies, Inc. | Hermetically sealed pressure sensing device |
KR101483279B1 (ko) * | 2012-06-11 | 2015-01-14 | 가부시키가이샤 사기노미야세이사쿠쇼 | 압력 센서 및 압력 센서의 제조 방법 |
DE102012210752A1 (de) * | 2012-06-25 | 2014-01-23 | Robert Bosch Gmbh | Druckerfassungsmodul sowie Drucksensorvorrichtung mit einem solchen Druckerfassungsmodul |
DE102013220735A1 (de) | 2013-10-14 | 2015-04-16 | Vega Grieshaber Kg | Messanordnung mit einer keramischen Messzelle |
US9772242B2 (en) * | 2013-12-06 | 2017-09-26 | Nagano Keiki Co., Ltd. | Physical quantity measuring sensor including an O-ring between a cylindrical portion and a cylindrical projection |
US9360389B2 (en) * | 2014-03-17 | 2016-06-07 | Kulite Semiconductor Products, Inc. | High pressure flat plate transducer |
US9772248B2 (en) | 2014-03-17 | 2017-09-26 | Kulite Semiconductor Products, Inc. | High pressure flat plate transducer |
CN107290099B (zh) | 2016-04-11 | 2021-06-08 | 森萨塔科技公司 | 压力传感器、用于压力传感器的插塞件和制造插塞件的方法 |
EP3236226B1 (en) | 2016-04-20 | 2019-07-24 | Sensata Technologies, Inc. | Method of manufacturing a pressure sensor |
US10545064B2 (en) | 2017-05-04 | 2020-01-28 | Sensata Technologies, Inc. | Integrated pressure and temperature sensor |
US10323998B2 (en) | 2017-06-30 | 2019-06-18 | Sensata Technologies, Inc. | Fluid pressure sensor |
US10724907B2 (en) | 2017-07-12 | 2020-07-28 | Sensata Technologies, Inc. | Pressure sensor element with glass barrier material configured for increased capacitive response |
JP6903510B2 (ja) * | 2017-07-25 | 2021-07-14 | 京セラ株式会社 | タイヤ空気圧検知装置 |
US10557770B2 (en) | 2017-09-14 | 2020-02-11 | Sensata Technologies, Inc. | Pressure sensor with improved strain gauge |
DE102018123041A1 (de) * | 2018-09-19 | 2020-03-19 | Endress+Hauser SE+Co. KG | Druckmesseinrichtung |
CN110174209A (zh) * | 2019-06-26 | 2019-08-27 | 昆山灵科传感技术有限公司 | 介质隔离式压力传感器 |
US12085851B2 (en) | 2020-09-28 | 2024-09-10 | Canon Kabushiki Kaisha | Pressure sensor manifold with increased photocurable resistance |
Family Cites Families (10)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4617607A (en) † | 1985-12-10 | 1986-10-14 | Kavlico Corporation | High pressure capacitive transducer |
JPH01182729A (ja) * | 1988-01-16 | 1989-07-20 | Ngk Insulators Ltd | 圧力センサ |
US5063784A (en) * | 1988-06-06 | 1991-11-12 | Ridenour Ralph Gaylord | Refrigerant transducer assembly and method |
US4888662A (en) * | 1988-12-08 | 1989-12-19 | Texas Instruments Incorporated | High pressure package for pressure transducers |
US4903164A (en) * | 1988-12-08 | 1990-02-20 | Texas Instruments Incorporated | O-ring/back-up ring seal for high pressure transducers |
US5134887A (en) * | 1989-09-22 | 1992-08-04 | Bell Robert L | Pressure sensors |
DE4018638A1 (de) * | 1990-06-11 | 1991-12-12 | Schoppe & Faeser Gmbh | Druckmessumformer mit einem rotationssymmetrischen drucksensor aus keramik |
DE4213857C2 (de) * | 1992-04-27 | 1995-10-19 | Endress Hauser Gmbh Co | Vorrichtung zum Messen von Druck und Differenzdruck |
DE4234290C2 (de) † | 1992-10-12 | 1995-06-14 | Fibronix Sensoren Gmbh | Drucksensor |
DE59306394D1 (de) * | 1993-01-20 | 1997-06-12 | Wika Alexander Wiegand Gmbh | Druckmittler |
-
1995
- 1995-03-31 DE DE59504814T patent/DE59504814D1/de not_active Expired - Fee Related
- 1995-03-31 DK DK95104780T patent/DK0735353T3/da active
- 1995-03-31 EP EP95104780A patent/EP0735353B2/de not_active Expired - Lifetime
-
1996
- 1996-02-21 CA CA002169991A patent/CA2169991C/en not_active Expired - Fee Related
- 1996-03-04 US US08/610,361 patent/US5665921A/en not_active Expired - Lifetime
- 1996-04-01 JP JP8079237A patent/JP2763518B2/ja not_active Expired - Fee Related
Also Published As
Publication number | Publication date |
---|---|
CA2169991C (en) | 2001-07-10 |
EP0735353A1 (de) | 1996-10-02 |
JPH08271365A (ja) | 1996-10-18 |
JP2763518B2 (ja) | 1998-06-11 |
EP0735353B2 (de) | 2004-03-17 |
DE59504814D1 (de) | 1999-02-25 |
EP0735353B1 (de) | 1999-01-13 |
US5665921A (en) | 1997-09-09 |
CA2169991A1 (en) | 1996-10-01 |
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