BR9001722A - Detetor capacitivo de pressao diferencial - Google Patents
Detetor capacitivo de pressao diferencialInfo
- Publication number
- BR9001722A BR9001722A BR909001722A BR9001722A BR9001722A BR 9001722 A BR9001722 A BR 9001722A BR 909001722 A BR909001722 A BR 909001722A BR 9001722 A BR9001722 A BR 9001722A BR 9001722 A BR9001722 A BR 9001722A
- Authority
- BR
- Brazil
- Prior art keywords
- differential pressure
- capacitive detector
- pressure capacitive
- detector
- differential
- Prior art date
Links
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L13/00—Devices or apparatus for measuring differences of two or more fluid pressure values
- G01L13/06—Devices or apparatus for measuring differences of two or more fluid pressure values using electric or magnetic pressure-sensitive elements
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
- G01L9/0041—Transmitting or indicating the displacement of flexible diaphragms
- G01L9/0072—Transmitting or indicating the displacement of flexible diaphragms using variations in capacitance
- G01L9/0073—Transmitting or indicating the displacement of flexible diaphragms using variations in capacitance using a semiconductive diaphragm
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Measuring Fluid Pressure (AREA)
Applications Claiming Priority (5)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP9480489 | 1989-04-14 | ||
JP9480589 | 1989-04-14 | ||
JP20526589 | 1989-08-08 | ||
JP20526789 | 1989-08-08 | ||
JP20526689 | 1989-08-08 |
Publications (1)
Publication Number | Publication Date |
---|---|
BR9001722A true BR9001722A (pt) | 1991-05-21 |
Family
ID=27525713
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
BR909001722A BR9001722A (pt) | 1989-04-14 | 1990-04-11 | Detetor capacitivo de pressao diferencial |
Country Status (6)
Country | Link |
---|---|
US (1) | US5056369A (pt) |
JP (1) | JP2639159B2 (pt) |
KR (1) | KR940001481B1 (pt) |
BR (1) | BR9001722A (pt) |
DE (3) | DE4042411C2 (pt) |
GB (1) | GB2231159B (pt) |
Families Citing this family (31)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
GB2258050B (en) * | 1991-07-26 | 1994-11-30 | Fuji Electric Co Ltd | Electrostatic capacity type differential pressure detector |
US5285690A (en) * | 1992-01-24 | 1994-02-15 | The Foxboro Company | Pressure sensor having a laminated substrate |
DE4206675C2 (de) * | 1992-02-28 | 1995-04-27 | Siemens Ag | Verfahren zum Herstellen von Druckdifferenz-Sensoren |
DE4207952C1 (en) * | 1992-03-10 | 1993-04-15 | Mannesmann Ag, 4000 Duesseldorf, De | Capacitative differential pressure sensor for simple mfr. - comprises silicon diaphragm with edges having thinned areas, leaving central area, pressure input channels aligned with thickened edge region, and flat recesses |
US5545594A (en) * | 1993-10-26 | 1996-08-13 | Yazaki Meter Co., Ltd. | Semiconductor sensor anodic-bonding process, wherein bonding of corrugation is prevented |
US5438880A (en) * | 1994-05-17 | 1995-08-08 | United Technologies Corporation | Electrostatic linear airspeed transducer |
JP2900235B2 (ja) * | 1995-07-17 | 1999-06-02 | 株式会社山武 | 静電容量式圧力センサ |
DE19648048C2 (de) * | 1995-11-21 | 2001-11-29 | Fuji Electric Co Ltd | Detektorvorrichtung zur Druckmessung basierend auf gemessenen Kapazitätswerten |
JP3147778B2 (ja) * | 1996-07-01 | 2001-03-19 | 富士電機株式会社 | 静電容量式差圧検出器 |
TW387198B (en) * | 1997-09-03 | 2000-04-11 | Hosiden Corp | Audio sensor and its manufacturing method, and semiconductor electret capacitance microphone using the same |
US5902932A (en) | 1998-01-09 | 1999-05-11 | Granville-Phillips Company | Force balancing capacitance manometer |
FR2775075B1 (fr) * | 1998-02-18 | 2000-05-05 | Theobald Sa A | Capteur de pression differentielle |
US6038961A (en) * | 1998-03-02 | 2000-03-21 | Rosemount Inc. | Flush mount remote seal |
US6431003B1 (en) | 2000-03-22 | 2002-08-13 | Rosemount Aerospace Inc. | Capacitive differential pressure sensor with coupled diaphragms |
ATE431548T1 (de) * | 2000-07-26 | 2009-05-15 | Endress & Hauser Gmbh & Co Kg | Kapazitiver drucksensor |
KR100411476B1 (ko) * | 2001-09-24 | 2003-12-18 | 주식회사코닉스 | 정전 용량식 진공센서의 제조방법 및 그 진공 센서를이용한 진공 검출장치 |
KR100411475B1 (ko) * | 2001-09-24 | 2003-12-18 | 주식회사코닉스 | 정전 용량식 압력센서의 제조방법 및 이를 이용한 압력검출 장치 |
AU2003288242A1 (en) * | 2002-12-19 | 2004-07-14 | Endress + Hauser Gmbh + Co. Kg | Differential pressure sensor |
JP5260342B2 (ja) * | 2009-01-30 | 2013-08-14 | ローム株式会社 | Memsセンサ |
US8704538B2 (en) * | 2010-07-01 | 2014-04-22 | Mks Instruments, Inc. | Capacitance sensors |
JP5897940B2 (ja) * | 2012-03-14 | 2016-04-06 | アズビル株式会社 | 圧力センサチップ |
JP2014102129A (ja) * | 2012-11-19 | 2014-06-05 | Azbil Corp | 圧力センサチップ |
US9249008B2 (en) | 2012-12-20 | 2016-02-02 | Industrial Technology Research Institute | MEMS device with multiple electrodes and fabricating method thereof |
DE102014108748A1 (de) * | 2014-06-23 | 2015-12-24 | Endress + Hauser Gmbh + Co. Kg | Kapazitiver Differenzdrucksensor und Verfahren zu seiner Herstellung |
DE102014115803A1 (de) * | 2014-10-30 | 2016-05-19 | Endress + Hauser Gmbh + Co. Kg | MEMS-Sensor, insbesondere Differenzdrucksensor |
DE102015103485A1 (de) * | 2015-03-10 | 2016-09-15 | Endress + Hauser Gmbh + Co. Kg | MEMS-Sensor, insb. Drucksensor |
CN105067178B (zh) * | 2015-05-29 | 2018-01-19 | 歌尔股份有限公司 | 一种差分电容式mems压力传感器及其制造方法 |
DE102015119272A1 (de) * | 2015-11-09 | 2017-05-11 | Endress+Hauser Gmbh+Co. Kg | Kapazitiver Drucksensor und Verfahren zu dessen Herstellung |
JP2022059145A (ja) * | 2020-10-01 | 2022-04-13 | 長野計器株式会社 | 圧力検出素子 |
CN112326094B (zh) * | 2020-10-29 | 2022-02-18 | 陕西理工大学 | 一种压力传感器及尿动力检测装置 |
US11692895B2 (en) * | 2021-03-30 | 2023-07-04 | Rosemount Aerospace Inc. | Differential pressure sensor |
Family Cites Families (14)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
GB1354025A (en) * | 1970-05-25 | 1974-06-05 | Medicor Muevek | Capacitive pressure transducer |
JPS542783A (en) * | 1977-06-09 | 1979-01-10 | Fuji Electric Co Ltd | Production of pressure or differential pressure measuring apparatus |
JPS5516228A (en) * | 1978-07-21 | 1980-02-04 | Hitachi Ltd | Capacity type sensor |
JPS5922504Y2 (ja) * | 1979-03-07 | 1984-07-05 | 横河電機株式会社 | 差圧応動装置 |
US4370890A (en) * | 1980-10-06 | 1983-02-01 | Rosemount Inc. | Capacitive pressure transducer with isolated sensing diaphragm |
US4358814A (en) * | 1980-10-27 | 1982-11-09 | Setra Systems, Inc. | Capacitive pressure sensor |
JPS57133330A (en) * | 1981-02-13 | 1982-08-18 | Yokogawa Hokushin Electric Corp | Differential pressure responsing device |
US4458537A (en) * | 1981-05-11 | 1984-07-10 | Combustion Engineering, Inc. | High accuracy differential pressure capacitive transducer |
IE55965B1 (en) * | 1984-03-29 | 1991-02-27 | Gen Signal Corp | Pressure transducer |
US4581676A (en) * | 1984-09-17 | 1986-04-08 | General Signal Corporation | Electrical contact coating for silicon pressure transducers |
DE3504329A1 (de) * | 1985-02-08 | 1986-08-14 | Philips Patentverwaltung Gmbh, 2000 Hamburg | Differenzdruckmessgeraet |
DE3523104A1 (de) * | 1985-06-28 | 1987-01-22 | Leybold Heraeus Gmbh & Co Kg | Anordnung mit einer messelektrode, der in festen abstaenden eine erste und eine zweite felderzeugende elektrode zugeordnet sind |
JPH061228B2 (ja) * | 1987-08-13 | 1994-01-05 | 富士電機株式会社 | 静電容量式圧力検出器 |
US4905575A (en) * | 1988-10-20 | 1990-03-06 | Rosemount Inc. | Solid state differential pressure sensor with overpressure stop and free edge construction |
-
1990
- 1990-03-01 JP JP2049808A patent/JP2639159B2/ja not_active Expired - Lifetime
- 1990-04-11 DE DE4042411A patent/DE4042411C2/de not_active Expired - Fee Related
- 1990-04-11 BR BR909001722A patent/BR9001722A/pt not_active IP Right Cessation
- 1990-04-11 DE DE4042410A patent/DE4042410C2/de not_active Expired - Fee Related
- 1990-04-11 DE DE4011734A patent/DE4011734C2/de not_active Expired - Fee Related
- 1990-04-12 US US07/507,843 patent/US5056369A/en not_active Expired - Fee Related
- 1990-04-14 KR KR1019900005182A patent/KR940001481B1/ko not_active IP Right Cessation
- 1990-04-17 GB GB9008565A patent/GB2231159B/en not_active Expired - Fee Related
Also Published As
Publication number | Publication date |
---|---|
GB2231159B (en) | 1994-02-02 |
GB2231159A (en) | 1990-11-07 |
DE4011734C2 (de) | 1993-12-02 |
KR900016743A (ko) | 1990-11-14 |
DE4042411C2 (de) | 1993-09-30 |
GB9008565D0 (en) | 1990-06-13 |
DE4011734A1 (de) | 1990-10-18 |
KR940001481B1 (ko) | 1994-02-23 |
DE4042410C2 (de) | 1993-12-09 |
JP2639159B2 (ja) | 1997-08-06 |
US5056369A (en) | 1991-10-15 |
JPH03175329A (ja) | 1991-07-30 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
FG | Letter patent granted | ||
B21A | Patent or certificate of addition expired [chapter 21.1 patent gazette] |
Free format text: PATENTE EXTINTA EM 11/04/2005 |