DE3785037D1 - Kapazitiver druckfuehler. - Google Patents

Kapazitiver druckfuehler.

Info

Publication number
DE3785037D1
DE3785037D1 DE8787903800T DE3785037T DE3785037D1 DE 3785037 D1 DE3785037 D1 DE 3785037D1 DE 8787903800 T DE8787903800 T DE 8787903800T DE 3785037 T DE3785037 T DE 3785037T DE 3785037 D1 DE3785037 D1 DE 3785037D1
Authority
DE
Germany
Prior art keywords
pressure sensor
capacitive pressure
capacitive
sensor
pressure
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE8787903800T
Other languages
English (en)
Other versions
DE3785037T2 (de
Inventor
A Knecht
L Frick
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Rosemount Inc
Original Assignee
Rosemount Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Rosemount Inc filed Critical Rosemount Inc
Application granted granted Critical
Publication of DE3785037D1 publication Critical patent/DE3785037D1/de
Publication of DE3785037T2 publication Critical patent/DE3785037T2/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
    • G01L9/0041—Transmitting or indicating the displacement of flexible diaphragms
    • G01L9/0072—Transmitting or indicating the displacement of flexible diaphragms using variations in capacitance
    • G01L9/0073—Transmitting or indicating the displacement of flexible diaphragms using variations in capacitance using a semiconductive diaphragm

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Measuring Fluid Pressure (AREA)
DE8787903800T 1986-06-23 1987-05-29 Kapazitiver druckfuehler. Expired - Lifetime DE3785037T2 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US06/877,281 US4730496A (en) 1986-06-23 1986-06-23 Capacitance pressure sensor
PCT/US1987/001235 WO1987007947A1 (en) 1986-06-23 1987-05-29 Capacitance pressure sensor

Publications (2)

Publication Number Publication Date
DE3785037D1 true DE3785037D1 (de) 1993-04-29
DE3785037T2 DE3785037T2 (de) 1993-08-05

Family

ID=25369627

Family Applications (1)

Application Number Title Priority Date Filing Date
DE8787903800T Expired - Lifetime DE3785037T2 (de) 1986-06-23 1987-05-29 Kapazitiver druckfuehler.

Country Status (9)

Country Link
US (1) US4730496A (de)
EP (1) EP0311612B1 (de)
JP (2) JP2610464B2 (de)
CN (1) CN1011074B (de)
BR (1) BR8707728A (de)
CA (1) CA1297701C (de)
DE (1) DE3785037T2 (de)
IL (1) IL82883A (de)
WO (1) WO1987007947A1 (de)

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FI872049A (fi) * 1987-05-08 1988-11-09 Vaisala Oy Kondensatorkonstruktion foer anvaendning vid tryckgivare.
US4875369A (en) * 1987-09-08 1989-10-24 Panex Corporation Pressure sensor system
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JP4389326B2 (ja) * 1999-05-06 2009-12-24 株式会社デンソー 圧力センサ
US6532834B1 (en) * 1999-08-06 2003-03-18 Setra Systems, Inc. Capacitive pressure sensor having encapsulated resonating components
US6431003B1 (en) 2000-03-22 2002-08-13 Rosemount Aerospace Inc. Capacitive differential pressure sensor with coupled diaphragms
JP2001356062A (ja) * 2000-06-13 2001-12-26 Yamatake Corp 容量式圧力センサ
US6789474B2 (en) * 2001-08-20 2004-09-14 Goss International Corporation Water content sensing system for ink/water emulsion of lithographic printer
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US7691723B2 (en) * 2005-01-07 2010-04-06 Honeywell International Inc. Bonding system having stress control
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US9016133B2 (en) * 2011-01-05 2015-04-28 Nxp, B.V. Pressure sensor with pressure-actuated switch
DE102011078557A1 (de) * 2011-07-01 2013-01-03 Endress + Hauser Gmbh + Co. Kg Verfahren zum Betreiben eines Absolut- oder Relativdrucksensors mit einem kapazitiven Wandler
DE102011081887A1 (de) * 2011-08-31 2013-02-28 Robert Bosch Gmbh Polymerschichtsystem-Drucksensorvorrichtung und Polymerschichtsystem-Drucksensorverfahren
US8578783B2 (en) 2011-09-26 2013-11-12 Rosemount Inc. Process fluid pressure transmitter with separated sensor and sensor electronics
EP2637007B1 (de) * 2012-03-08 2020-01-22 ams international AG Kapazitativer MEMS-Drucksensor
US8833171B2 (en) * 2012-08-23 2014-09-16 Nxp, B.V. Pressure sensor
EP2725334B1 (de) * 2012-10-25 2020-04-15 Invensense, Inc. Drucksensor mit einer Membrane und Herstellungsverfahren dafür
US9069959B2 (en) 2012-12-21 2015-06-30 Nxp B.V. Cryptographic circuit protection from differential power analysis
EP2806258B1 (de) * 2013-05-20 2018-09-12 ams international AG Differenzdrucksensor
EP2871455B1 (de) 2013-11-06 2020-03-04 Invensense, Inc. Drucksensor
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CN103616098B (zh) * 2013-12-06 2015-08-26 西安交通大学 一种高精度基于金属弹性元件的挠曲电式压力传感器
TWI550261B (zh) * 2014-03-17 2016-09-21 立錡科技股份有限公司 微機電壓力計以及其製作方法
CN104931188A (zh) * 2014-03-20 2015-09-23 立锜科技股份有限公司 微机电压力计以及其制作方法
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US20170328800A1 (en) * 2014-07-11 2017-11-16 Richtek Technology Corporation Combo micro-electro-mechanical system device and manufacturing method thereof
CN104390732B (zh) * 2014-11-21 2016-08-17 陕西科技大学 一种利用液晶盒检测外界作用力的装置及方法
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FR3037140B1 (fr) * 2015-06-03 2017-06-02 Sagem Defense Securite Dispositif de detection de pression
FR3037142B1 (fr) * 2015-06-03 2018-11-02 Safran Electronics & Defense Dispositif de mesure de pression a fiabilite amelioree et procede de calibrage associe
US20170089792A1 (en) * 2015-09-28 2017-03-30 Merit Medical Systems, Inc. Dampened pressure port
US10054507B2 (en) 2016-04-06 2018-08-21 City University Of Hong Kong Electric device for detecting pressure
TW201736814A (zh) * 2016-04-12 2017-10-16 原相科技股份有限公司 壓力測量方法以及壓力測量裝置
CN106168514A (zh) * 2016-08-28 2016-11-30 桂林市晶准测控技术有限公司 一种压力传感装置
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US11615257B2 (en) 2017-02-24 2023-03-28 Endotronix, Inc. Method for communicating with implant devices
EP3619146B1 (de) * 2017-05-02 2022-05-04 Laitram, L.L.C. Kapazitiv gekoppeltes sensorsystem für förderbänder
WO2019222598A1 (en) 2018-05-17 2019-11-21 Rosemount Inc. Measuring element and measuring device comprising the same
CN109238518B (zh) * 2018-09-17 2021-11-05 胡耿 微小极间距电容式力敏传感器及其制造方法
US11638353B2 (en) * 2018-09-17 2023-04-25 Hutchinson Technology Incorporated Apparatus and method for forming sensors with integrated electrical circuits on a substrate
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CN109738098A (zh) * 2018-12-29 2019-05-10 菲比蓝科技(深圳)有限公司 压力传感器及其形成方法
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Also Published As

Publication number Publication date
DE3785037T2 (de) 1993-08-05
JPH09250963A (ja) 1997-09-22
WO1987007947A1 (en) 1987-12-30
CA1297701C (en) 1992-03-24
US4730496A (en) 1988-03-15
IL82883A (en) 1992-11-15
CN1011074B (zh) 1991-01-02
BR8707728A (pt) 1989-08-15
IL82883A0 (en) 1987-12-20
JP2610464B2 (ja) 1997-05-14
JPH01503001A (ja) 1989-10-12
EP0311612A1 (de) 1989-04-19
EP0311612A4 (en) 1990-09-26
EP0311612B1 (de) 1993-03-24
CN87104354A (zh) 1988-01-20

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