DE69006740D1 - Kapazitives drucksensorsystem. - Google Patents

Kapazitives drucksensorsystem.

Info

Publication number
DE69006740D1
DE69006740D1 DE90914824T DE69006740T DE69006740D1 DE 69006740 D1 DE69006740 D1 DE 69006740D1 DE 90914824 T DE90914824 T DE 90914824T DE 69006740 T DE69006740 T DE 69006740T DE 69006740 D1 DE69006740 D1 DE 69006740D1
Authority
DE
Germany
Prior art keywords
pressure sensor
sensor system
capacitive pressure
capacitive
sensor
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE90914824T
Other languages
English (en)
Other versions
DE69006740T2 (de
Inventor
Zvi Shkedi
James S Lepkowski
Karl S Pogany Jr
Gerald W Meyer
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Honeywell International Inc
Original Assignee
AlliedSignal Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by AlliedSignal Inc filed Critical AlliedSignal Inc
Publication of DE69006740D1 publication Critical patent/DE69006740D1/de
Application granted granted Critical
Publication of DE69006740T2 publication Critical patent/DE69006740T2/de
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
    • G01L9/0041—Transmitting or indicating the displacement of flexible diaphragms
    • G01L9/0072—Transmitting or indicating the displacement of flexible diaphragms using variations in capacitance
    • G01L9/0075—Transmitting or indicating the displacement of flexible diaphragms using variations in capacitance using a ceramic diaphragm, e.g. alumina, fused quartz, glass
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
    • G01L9/12—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means by making use of variations in capacitance, i.e. electric circuits therefor
    • G01L9/125—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means by making use of variations in capacitance, i.e. electric circuits therefor with temperature compensating means
DE69006740T 1989-10-03 1990-10-02 Kapazitives drucksensorsystem. Expired - Fee Related DE69006740T2 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US07/416,698 US4987782A (en) 1989-10-03 1989-10-03 Capacitive pressure transducer system
PCT/US1990/005600 WO1991005232A1 (en) 1989-10-03 1990-10-02 Capacitive pressure transducer system

Publications (2)

Publication Number Publication Date
DE69006740D1 true DE69006740D1 (de) 1994-03-24
DE69006740T2 DE69006740T2 (de) 1994-06-16

Family

ID=23650951

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69006740T Expired - Fee Related DE69006740T2 (de) 1989-10-03 1990-10-02 Kapazitives drucksensorsystem.

Country Status (5)

Country Link
US (1) US4987782A (de)
EP (1) EP0494926B1 (de)
JP (1) JPH0774767B2 (de)
DE (1) DE69006740T2 (de)
WO (1) WO1991005232A1 (de)

Families Citing this family (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP3233791B2 (ja) * 1994-08-25 2001-11-26 株式会社山武 差動容量反転積分器及びこれを用いた静電容量変化量検出装置
FI102783B (fi) * 1994-12-22 1999-02-15 Vaisala Oyj Menetelmä virtausnopeusanturin linearisoimiseksi sekä linearisoitu vir tauksen nopeuden mittauslaitteisto
US5757608A (en) * 1996-01-25 1998-05-26 Alliedsignal Inc. Compensated pressure transducer
US6499348B1 (en) 1999-12-03 2002-12-31 Scimed Life Systems, Inc. Dynamically configurable ultrasound transducer with integral bias regulation and command and control circuitry
US6169487B1 (en) * 1999-12-13 2001-01-02 Robert B. Davis Severe storm warning system
US7152478B2 (en) * 2000-07-20 2006-12-26 Entegris, Inc. Sensor usable in ultra pure and highly corrosive environments
US6612175B1 (en) 2000-07-20 2003-09-02 Nt International, Inc. Sensor usable in ultra pure and highly corrosive environments
US6536287B2 (en) 2001-08-16 2003-03-25 Honeywell International, Inc. Simplified capacitance pressure sensor
US20090097178A1 (en) * 2007-10-12 2009-04-16 Texas Instruments Incorporated Methods and apparatus to detect and over-current in switching circuits
US8037770B2 (en) * 2008-05-21 2011-10-18 Honeywell International Inc. Pressure-sensor apparatus
US8836349B2 (en) 2012-08-15 2014-09-16 Robert Bosch Gmbh Capacitive sensor
CA2924724C (en) * 2013-09-18 2022-09-20 Advantec Sensing As Apparatus and method for characterization of fluids or powders by electrical permittivity
US10317443B2 (en) 2017-05-24 2019-06-11 Elmos Semiconductor Ag Integrated capacitance measurement

Family Cites Families (14)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3581238A (en) * 1967-09-30 1971-05-25 Tsurumi Seikikosaku Sho Co Ltd Transmission transducer for remote measurement
US3595084A (en) * 1970-02-27 1971-07-27 Continental Can Co Digital transducer system
DE2433080C2 (de) * 1974-07-10 1983-09-29 Philips Patentverwaltung Gmbh, 2000 Hamburg Schaltungsanordnung zur Umwandlung einer Brückenverstimmung in eine Frequenzänderung
SE431683B (sv) * 1977-09-23 1984-02-20 Testut Aequitas Anordning for metning av kapacitansen hos en kondensator
GB2048488B (en) * 1979-04-26 1983-04-27 Rosemount Eng Co Ltd Differential pressure sensing apparatus
US4227419A (en) * 1979-09-04 1980-10-14 Kavlico Corporation Capacitive pressure transducer
CH652823A5 (de) * 1980-03-26 1985-11-29 Bosch Gmbh Robert Weg-frequenz-messgroessenwandler.
US4322977A (en) * 1980-05-27 1982-04-06 The Bendix Corporation Pressure measuring system
US4457179A (en) * 1981-03-16 1984-07-03 The Bendix Corporation Differential pressure measuring system
US4398426A (en) * 1981-07-02 1983-08-16 Kavlico Corporation Linear capacitive pressure transducer system
DE3128032A1 (de) * 1981-07-16 1983-02-03 Robert Bosch Gmbh, 7000 Stuttgart Anordnung zur erfassung eines druckes
GB2123157B (en) * 1982-06-22 1986-10-15 Peter Caleb Frederi Wolfendale Load cells
JPS6165114A (ja) * 1984-09-06 1986-04-03 Yokogawa Hokushin Electric Corp 容量式変換装置
US4763063A (en) * 1985-07-26 1988-08-09 Allied-Signal Inc. Compact digital pressure sensor circuitry

Also Published As

Publication number Publication date
US4987782A (en) 1991-01-29
JPH0774767B2 (ja) 1995-08-09
DE69006740T2 (de) 1994-06-16
EP0494926B1 (de) 1994-02-16
JPH05500569A (ja) 1993-02-04
WO1991005232A1 (en) 1991-04-18
EP0494926A1 (de) 1992-07-22

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition
8339 Ceased/non-payment of the annual fee