DE69014439D1 - Verschiebungsdetektionssystem. - Google Patents

Verschiebungsdetektionssystem.

Info

Publication number
DE69014439D1
DE69014439D1 DE69014439T DE69014439T DE69014439D1 DE 69014439 D1 DE69014439 D1 DE 69014439D1 DE 69014439 T DE69014439 T DE 69014439T DE 69014439 T DE69014439 T DE 69014439T DE 69014439 D1 DE69014439 D1 DE 69014439D1
Authority
DE
Germany
Prior art keywords
detection system
displacement detection
displacement
detection
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE69014439T
Other languages
English (en)
Other versions
DE69014439T2 (de
Inventor
Nariaki Fujiwara
Tokuji Shibahara
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Dainippon Screen Manufacturing Co Ltd
Original Assignee
Dainippon Screen Manufacturing Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from JP1166462A external-priority patent/JPH0794983B2/ja
Priority claimed from JP1166463A external-priority patent/JPH0794984B2/ja
Application filed by Dainippon Screen Manufacturing Co Ltd filed Critical Dainippon Screen Manufacturing Co Ltd
Publication of DE69014439D1 publication Critical patent/DE69014439D1/de
Application granted granted Critical
Publication of DE69014439T2 publication Critical patent/DE69014439T2/de
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B7/00—Mountings, adjusting means, or light-tight connections, for optical elements
    • G02B7/28—Systems for automatic generation of focusing signals
    • G02B7/34—Systems for automatic generation of focusing signals using different areas in a pupil plane
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B7/00—Mountings, adjusting means, or light-tight connections, for optical elements
    • G02B7/28—Systems for automatic generation of focusing signals
    • G02B7/30—Systems for automatic generation of focusing signals using parallactic triangle with a base line
    • G02B7/32—Systems for automatic generation of focusing signals using parallactic triangle with a base line using active means, e.g. light emitter

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Length Measuring Devices By Optical Means (AREA)
  • Automatic Focus Adjustment (AREA)
DE69014439T 1989-06-28 1990-06-27 Verschiebungsdetektionssystem. Expired - Fee Related DE69014439T2 (de)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP16646489 1989-06-28
JP1166462A JPH0794983B2 (ja) 1989-06-28 1989-06-28 位置ずれ検出機構
JP1166463A JPH0794984B2 (ja) 1989-06-28 1989-06-28 位置検出装置

Publications (2)

Publication Number Publication Date
DE69014439D1 true DE69014439D1 (de) 1995-01-12
DE69014439T2 DE69014439T2 (de) 1995-04-06

Family

ID=27322694

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69014439T Expired - Fee Related DE69014439T2 (de) 1989-06-28 1990-06-27 Verschiebungsdetektionssystem.

Country Status (2)

Country Link
EP (1) EP0405507B1 (de)
DE (1) DE69014439T2 (de)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2011007768A1 (ja) * 2009-07-13 2011-01-20 株式会社ニコン ３次元方向ドリフト制御装置および顕微鏡装置
US9885656B2 (en) * 2014-12-17 2018-02-06 Kla-Tencor Corporation Line scan knife edge height sensor for semiconductor inspection and metrology
JP7224804B2 (ja) * 2018-08-01 2023-02-20 株式会社ミツトヨ 非接触式変位計

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5860433A (ja) * 1981-06-08 1983-04-09 Hitachi Ltd フオ−カス誤差検出装置
DE3219503C2 (de) * 1982-05-25 1985-08-08 Ernst Leitz Wetzlar Gmbh, 6330 Wetzlar Vorrichtung zum selbsttätigen Fokussieren auf in optischen Geräten zu betrachtende Objekte
JPS59232306A (ja) * 1983-06-16 1984-12-27 Nippon Kogaku Kk <Nikon> 顕微鏡用焦点検出装置
JPS6037509A (ja) * 1983-08-10 1985-02-26 Canon Inc 焦点検出装置
JPS6076035A (ja) * 1983-10-03 1985-04-30 Victor Co Of Japan Ltd フオ−カス検出装置
JPH0734264B2 (ja) * 1986-09-05 1995-04-12 キヤノン株式会社 光学式情報記録再生装置

Also Published As

Publication number Publication date
EP0405507B1 (de) 1994-11-30
EP0405507A3 (en) 1991-12-27
DE69014439T2 (de) 1995-04-06
EP0405507A2 (de) 1991-01-02

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition
8339 Ceased/non-payment of the annual fee