FI943048A - Capacitive type differential pressure sensor - Google Patents

Capacitive type differential pressure sensor Download PDF

Info

Publication number
FI943048A
FI943048A FI943048A FI943048A FI943048A FI 943048 A FI943048 A FI 943048A FI 943048 A FI943048 A FI 943048A FI 943048 A FI943048 A FI 943048A FI 943048 A FI943048 A FI 943048A
Authority
FI
Finland
Prior art keywords
pressure sensor
differential pressure
capacitive type
type differential
capacitive
Prior art date
Application number
FI943048A
Other languages
Finnish (fi)
Swedish (sv)
Other versions
FI943048A0 (en
Inventor
Felix Rudolf
Philippe Renaud
Original Assignee
Suisse Electronique Microtech
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Suisse Electronique Microtech filed Critical Suisse Electronique Microtech
Publication of FI943048A0 publication Critical patent/FI943048A0/en
Publication of FI943048A publication Critical patent/FI943048A/en

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
    • G01L9/0041—Transmitting or indicating the displacement of flexible diaphragms
    • G01L9/0042—Constructional details associated with semiconductive diaphragm sensors, e.g. etching, or constructional details of non-semiconductive diaphragms
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
    • G01L9/0041—Transmitting or indicating the displacement of flexible diaphragms
    • G01L9/0072—Transmitting or indicating the displacement of flexible diaphragms using variations in capacitance
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
    • G01L9/0041—Transmitting or indicating the displacement of flexible diaphragms
    • G01L9/0072—Transmitting or indicating the displacement of flexible diaphragms using variations in capacitance
    • G01L9/0073—Transmitting or indicating the displacement of flexible diaphragms using variations in capacitance using a semiconductive diaphragm
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
    • G01L9/0041—Transmitting or indicating the displacement of flexible diaphragms
    • G01L9/0072—Transmitting or indicating the displacement of flexible diaphragms using variations in capacitance
    • G01L9/0075—Transmitting or indicating the displacement of flexible diaphragms using variations in capacitance using a ceramic diaphragm, e.g. alumina, fused quartz, glass

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Engineering & Computer Science (AREA)
  • Ceramic Engineering (AREA)
  • Measuring Fluid Pressure (AREA)
FI943048A 1993-06-25 1994-06-23 Capacitive type differential pressure sensor FI943048A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CH01911/93A CH688745A5 (en) 1993-06-25 1993-06-25 differential pressure sensor of capacitive type.

Publications (2)

Publication Number Publication Date
FI943048A0 FI943048A0 (en) 1994-06-23
FI943048A true FI943048A (en) 1994-12-26

Family

ID=4221481

Family Applications (1)

Application Number Title Priority Date Filing Date
FI943048A FI943048A (en) 1993-06-25 1994-06-23 Capacitive type differential pressure sensor

Country Status (5)

Country Link
EP (1) EP0639761A1 (en)
JP (1) JPH0727646A (en)
CH (1) CH688745A5 (en)
FI (1) FI943048A (en)
NO (1) NO942410L (en)

Families Citing this family (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE19750131C2 (en) * 1997-11-13 2002-06-13 Infineon Technologies Ag Micromechanical differential pressure sensor device
JPH11295176A (en) * 1998-04-14 1999-10-29 Nagano Keiki Co Ltd Differential pressure sensor
ATE227423T1 (en) * 1998-12-15 2002-11-15 Fraunhofer Ges Forschung METHOD FOR PRODUCING A MICROMECHANICAL STRUCTURE FOR A MICRO-ELECTROMECHANICAL ELEMENT
EP1144977B1 (en) * 1998-12-15 2003-10-15 Fraunhofer-Gesellschaft Zur Förderung Der Angewandten Forschung E.V. Method of producing a micro-electromechanical element
US6704185B2 (en) 2000-02-23 2004-03-09 National Center For Scientific Research Capacitive pressure-responsive devices and their fabrication
EP1128175A1 (en) * 2000-02-23 2001-08-29 Ethniko Kentro Erevnas Fisikon Epistimon "Dimokritos" Long-term stable capacitive pressure sensor made with self-aligned process
DE10249238B4 (en) * 2002-10-23 2006-09-21 Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. Sensor chip for a differential pressure sensor with double-sided overload protection
JP2004340576A (en) * 2003-03-17 2004-12-02 Kyocera Corp Package for pressure sensitive device
JP4940786B2 (en) * 2006-06-29 2012-05-30 株式会社デンソー Pressure sensor
FR2905461B1 (en) * 2006-08-31 2010-09-24 Peuvedic Jean Marc Le DEVICE FOR MEASURING PRESSURE DIFFERENCES IN FLUIDS.
ITUD20130145A1 (en) * 2013-11-06 2015-05-07 Eliwell Controls S R L Con Unico S Ocio DIGITAL PRESSURE SENSOR FOR A HOUSEHOLD AND ELECTRIC HOUSE EQUIPPED WITH THIS SENSOR
DE102014119407A1 (en) * 2014-12-22 2016-06-23 Endress + Hauser Gmbh + Co. Kg Differential pressure sensor and differential pressure transducer with such a differential pressure sensor
CN112897450B (en) * 2021-01-19 2022-11-11 北京遥测技术研究所 MEMS absolute pressure type pressure sensor and processing method thereof

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4445383A (en) * 1982-06-18 1984-05-01 General Signal Corporation Multiple range capacitive pressure transducer
DE3404262A1 (en) * 1983-03-09 1984-09-13 Fuji Electric Co., Ltd., Kawasaki Capacitive sensor
US4565096A (en) * 1983-12-09 1986-01-21 Rosemount Inc. Pressure transducer
US4730496A (en) * 1986-06-23 1988-03-15 Rosemount Inc. Capacitance pressure sensor
US4879627A (en) * 1988-12-30 1989-11-07 United Technologies Corporation Differential capacitive pressure sensor with over-pressure protection
DE4132391C1 (en) * 1991-09-26 1992-10-01 Siemens Ag, 8000 Muenchen, De Pressure difference measurement transducer - has two electrically conducting diaphragms separated by insulating plate and has strain gauge connected to evaluation circuitry

Also Published As

Publication number Publication date
FI943048A0 (en) 1994-06-23
NO942410D0 (en) 1994-06-24
JPH0727646A (en) 1995-01-31
NO942410L (en) 1994-12-27
EP0639761A1 (en) 1995-02-22
CH688745A5 (en) 1998-02-13

Similar Documents

Publication Publication Date Title
DE59508560D1 (en) Capacitive pressure sensor
DE69410828D1 (en) PRESSURE SENSING ARRANGEMENT
EP0714505A4 (en) Capacitive pressure sensor
DK0674164T3 (en) Capacitive pressure sensor or differential pressure sensor
DE69636463D1 (en) Capacitive touch sensor
DK0735353T3 (en) pressure sensor
DE59600582D1 (en) CAPACITIVE LEVEL SENSOR
BR9001722A (en) DIFFERENTIAL PRESSURE CAPACITIVE DETECTOR
BR9306946A (en) Pressure Sensor
DE69207708D1 (en) Pressure sensor
EP0618435A3 (en) Capacitive pressure sensor.
DE69412199D1 (en) Displacement sensor
DE59303373D1 (en) PRESSURE SENSOR
DE69306019D1 (en) Pressure sensor
DE69508003D1 (en) Differential capacitive encoder
DE59500186D1 (en) Capacitive acceleration sensor
DE58908009D1 (en) Overload-proof capacitive pressure sensor.
FI943048A (en) Capacitive type differential pressure sensor
BR9703820A (en) Capacitive differential pressure detector
NL1002159A1 (en) Differential pressure indicator.
DE59006845D1 (en) Capacitive sensor.
DE59506697D1 (en) PRESSURE SENSOR
DE69006740D1 (en) CAPACITIVE PRESSURE SENSOR SYSTEM.
NL1002238A1 (en) Differential pressure indicator.
NO308921B1 (en) Pressure sensor