NO942410D0 - - Google Patents

Info

Publication number
NO942410D0
NO942410D0 NO942410A NO942410A NO942410D0 NO 942410 D0 NO942410 D0 NO 942410D0 NO 942410 A NO942410 A NO 942410A NO 942410 A NO942410 A NO 942410A NO 942410 D0 NO942410 D0 NO 942410D0
Authority
NO
Norway
Application number
NO942410A
Other languages
Norwegian (no)
Other versions
NO942410L (en
Original Assignee
Suisse Electronique Microtech
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Suisse Electronique Microtech filed Critical Suisse Electronique Microtech
Publication of NO942410D0 publication Critical patent/NO942410D0/no
Publication of NO942410L publication Critical patent/NO942410L/en

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
    • G01L9/0041—Transmitting or indicating the displacement of flexible diaphragms
    • G01L9/0042—Constructional details associated with semiconductive diaphragm sensors, e.g. etching, or constructional details of non-semiconductive diaphragms
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
    • G01L9/0041—Transmitting or indicating the displacement of flexible diaphragms
    • G01L9/0072—Transmitting or indicating the displacement of flexible diaphragms using variations in capacitance
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
    • G01L9/0041—Transmitting or indicating the displacement of flexible diaphragms
    • G01L9/0072—Transmitting or indicating the displacement of flexible diaphragms using variations in capacitance
    • G01L9/0073—Transmitting or indicating the displacement of flexible diaphragms using variations in capacitance using a semiconductive diaphragm
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
    • G01L9/0041—Transmitting or indicating the displacement of flexible diaphragms
    • G01L9/0072—Transmitting or indicating the displacement of flexible diaphragms using variations in capacitance
    • G01L9/0075—Transmitting or indicating the displacement of flexible diaphragms using variations in capacitance using a ceramic diaphragm, e.g. alumina, fused quartz, glass
NO942410A 1993-06-25 1994-06-24 Capacitive differential pressure sensors NO942410L (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CH01911/93A CH688745A5 (en) 1993-06-25 1993-06-25 differential pressure sensor of capacitive type.

Publications (2)

Publication Number Publication Date
NO942410D0 true NO942410D0 (en) 1994-06-24
NO942410L NO942410L (en) 1994-12-27

Family

ID=4221481

Family Applications (1)

Application Number Title Priority Date Filing Date
NO942410A NO942410L (en) 1993-06-25 1994-06-24 Capacitive differential pressure sensors

Country Status (5)

Country Link
EP (1) EP0639761A1 (en)
JP (1) JPH0727646A (en)
CH (1) CH688745A5 (en)
FI (1) FI943048A (en)
NO (1) NO942410L (en)

Families Citing this family (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE19750131C2 (en) * 1997-11-13 2002-06-13 Infineon Technologies Ag Micromechanical differential pressure sensor device
JPH11295176A (en) * 1998-04-14 1999-10-29 Nagano Keiki Co Ltd Differential pressure sensor
WO2000036387A1 (en) * 1998-12-15 2000-06-22 Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. Method of producing a micro-electromechanical element
WO2000036385A1 (en) * 1998-12-15 2000-06-22 Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. Method of producing a micromechanical structure for a micro-electromechanical element
EP1128175A1 (en) * 2000-02-23 2001-08-29 Ethniko Kentro Erevnas Fisikon Epistimon "Dimokritos" Long-term stable capacitive pressure sensor made with self-aligned process
AU2001232165A1 (en) 2000-02-23 2001-09-03 National Center for Scientific Research "Demokrit Os Institute of Microelectronics Capacitive pressure-responsive devices and their fabrication
DE10249238B4 (en) * 2002-10-23 2006-09-21 Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. Sensor chip for a differential pressure sensor with double-sided overload protection
JP2004340576A (en) * 2003-03-17 2004-12-02 Kyocera Corp Package for pressure sensitive device
JP4940786B2 (en) * 2006-06-29 2012-05-30 株式会社デンソー Pressure sensor
FR2905461B1 (en) * 2006-08-31 2010-09-24 Peuvedic Jean Marc Le DEVICE FOR MEASURING PRESSURE DIFFERENCES IN FLUIDS.
ITUD20130145A1 (en) * 2013-11-06 2015-05-07 Eliwell Controls S R L Con Unico S Ocio DIGITAL PRESSURE SENSOR FOR A HOUSEHOLD AND ELECTRIC HOUSE EQUIPPED WITH THIS SENSOR
DE102014119407A1 (en) * 2014-12-22 2016-06-23 Endress + Hauser Gmbh + Co. Kg Differential pressure sensor and differential pressure transducer with such a differential pressure sensor
CN112897450B (en) * 2021-01-19 2022-11-11 北京遥测技术研究所 MEMS absolute pressure type pressure sensor and processing method thereof

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4445383A (en) * 1982-06-18 1984-05-01 General Signal Corporation Multiple range capacitive pressure transducer
DE3404262A1 (en) * 1983-03-09 1984-09-13 Fuji Electric Co., Ltd., Kawasaki Capacitive sensor
US4565096A (en) * 1983-12-09 1986-01-21 Rosemount Inc. Pressure transducer
US4730496A (en) * 1986-06-23 1988-03-15 Rosemount Inc. Capacitance pressure sensor
US4879627A (en) * 1988-12-30 1989-11-07 United Technologies Corporation Differential capacitive pressure sensor with over-pressure protection
DE4132391C1 (en) * 1991-09-26 1992-10-01 Siemens Ag, 8000 Muenchen, De Pressure difference measurement transducer - has two electrically conducting diaphragms separated by insulating plate and has strain gauge connected to evaluation circuitry

Also Published As

Publication number Publication date
EP0639761A1 (en) 1995-02-22
FI943048A (en) 1994-12-26
JPH0727646A (en) 1995-01-31
FI943048A0 (en) 1994-06-23
CH688745A5 (en) 1998-02-13
NO942410L (en) 1994-12-27

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Legal Events

Date Code Title Description
FC2A Withdrawal, rejection or dismissal of laid open patent application