DE3404262A1 - Capacitive sensor - Google Patents

Capacitive sensor

Info

Publication number
DE3404262A1
DE3404262A1 DE19843404262 DE3404262A DE3404262A1 DE 3404262 A1 DE3404262 A1 DE 3404262A1 DE 19843404262 DE19843404262 DE 19843404262 DE 3404262 A DE3404262 A DE 3404262A DE 3404262 A1 DE3404262 A1 DE 3404262A1
Authority
DE
Grant status
Application
Patent type
Prior art keywords
electrode
support member
member
diaphragm member
capacitive sensor
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
DE19843404262
Other languages
German (de)
Inventor
Kimihiro Dipl Ing Nakamura
Mitsuru Dipl Ing Tamai
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fuji Electric Co Ltd
Original Assignee
Fuji Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date

Links

Classifications

    • GPHYSICS
    • G01MEASURING; TESTING
    • G01LMEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L9/00Measuring steady or quasi-steady pressure of a fluid or a fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material by electric or magnetic means
    • G01L9/0041Transmitting or indicating the displacement of flexible diaphragms
    • G01L9/0072Transmitting or indicating the displacement of flexible diaphragms using variations in capacitance
    • G01L9/0075Transmitting or indicating the displacement of flexible diaphragms using variations in capacitance using a ceramic diaphragm, e.g. alumina, fused quartz, glass

Abstract

The invention relates to a capacitive sensor having a support member with two planar electrodes of corresponding size and with a third planar electrode of a diaphragm member, to which a pressure or a pressure difference can be applied. In order to obtain a sensor of this type which has high linearity in conjunction with improved measuremet accuracy, the diaphragm member (22) consists of a substrate (22a) to which a metal coating has been applied as third electrode (23), and there are present between the support member (21) and the diaphragm member (22) connecting means (30) which hold the support member (21) and diaphragm member (22) at a predetermined distance from one another. The connecting means (30) are arranged on the support member (21) outside the region of the first and the second electrode (24, 25) and between the first and the second electrode (24, 25) (Fig. 2). <IMAGE>
DE19843404262 1983-03-09 1984-02-03 Capacitive sensor Withdrawn DE3404262A1 (en)

Priority Applications (2)

Application Number Priority Date Filing Date Title
JP3751483A JPS59163513A (en) 1983-03-09 1983-03-09 Electrostatic capacity type sensor
JP3751583A JPS59163514A (en) 1983-03-09 1983-03-09 Electrostatic capacity type sensor

Publications (1)

Publication Number Publication Date
DE3404262A1 true true DE3404262A1 (en) 1984-09-13

Family

ID=26376633

Family Applications (1)

Application Number Title Priority Date Filing Date
DE19843404262 Withdrawn DE3404262A1 (en) 1983-03-09 1984-02-03 Capacitive sensor

Country Status (1)

Country Link
DE (1) DE3404262A1 (en)

Cited By (22)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE3640718A1 (en) * 1986-11-28 1988-06-09 Hartmann & Braun Ag Diaphragm condenser for measuring very low pneumatic wechseldruecke
WO1988006281A1 (en) * 1987-02-12 1988-08-25 Johnsson & Billquist Development Ab Pressure sensor
EP0351701A2 (en) * 1988-07-22 1990-01-24 Endress u. Hauser GmbH u. Co. Pressure transducer and its manufacturing process
DE4042336A1 (en) * 1990-02-12 1991-08-14 Fraunhofer Ges Forschung Integrated capacitive press sensor device - has capacitive sensor and capacitive reference element formed side-by-side on common substrate
EP0520352A2 (en) * 1991-06-22 1992-12-30 Toyoda Koki Kabushiki Kaisha Capacitive sensing device
US5249469A (en) * 1988-05-17 1993-10-05 Jonsson & Billquist Development Ab Pressure gauge
EP0639761A1 (en) * 1993-06-25 1995-02-22 CSEM, Centre Suisse d'Electronique et de Microtechnique S.A. Capacitive differential pressure transducer
US5431057A (en) * 1990-02-12 1995-07-11 Fraunhofer-Gesellschaft Zur Forderung Der Angewandten Forschung E.V. Integratable capacitative pressure sensor
US5637802A (en) * 1995-02-28 1997-06-10 Rosemount Inc. Capacitive pressure sensor for a pressure transmitted where electric field emanates substantially from back sides of plates
US5665899A (en) * 1996-02-23 1997-09-09 Rosemount Inc. Pressure sensor diagnostics in a process transmitter
US5808205A (en) * 1997-04-01 1998-09-15 Rosemount Inc. Eccentric capacitive pressure sensor
EP1039284A1 (en) * 1999-03-24 2000-09-27 ENVEC Mess- und Regeltechnik GmbH + Co. Capacitive sensor of pressure or differential pressure
EP1039283A1 (en) * 1999-03-24 2000-09-27 ENVEC Mess- und Regeltechnik GmbH + Co. Capacitive pressure sensor or capacitive differential pressure sensor
US6267009B1 (en) 1998-12-14 2001-07-31 Endress + Hauser Gmbh + Co. Capacitive pressure sensor cells or differential pressure sensor cells and methods for manufacturing the same
WO2002027803A1 (en) * 2000-09-29 2002-04-04 Yamatake Corporation Pressure sensor and method for manufacturing pressure sensor
US6374680B1 (en) 1999-03-24 2002-04-23 Endress + Hauser Gmbh + Co. Capacitive pressure sensor or capacitive differential pressure sensor
US6484585B1 (en) 1995-02-28 2002-11-26 Rosemount Inc. Pressure sensor for a pressure transmitter
US6505516B1 (en) 2000-01-06 2003-01-14 Rosemount Inc. Capacitive pressure sensing with moving dielectric
US6508129B1 (en) 2000-01-06 2003-01-21 Rosemount Inc. Pressure sensor capsule with improved isolation
US6516671B2 (en) 2000-01-06 2003-02-11 Rosemount Inc. Grain growth of electrical interconnection for microelectromechanical systems (MEMS)
US6520020B1 (en) 2000-01-06 2003-02-18 Rosemount Inc. Method and apparatus for a direct bonded isolated pressure sensor
US6561038B2 (en) 2000-01-06 2003-05-13 Rosemount Inc. Sensor with fluid isolation barrier

Cited By (27)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE3640718A1 (en) * 1986-11-28 1988-06-09 Hartmann & Braun Ag Diaphragm condenser for measuring very low pneumatic wechseldruecke
WO1988006281A1 (en) * 1987-02-12 1988-08-25 Johnsson & Billquist Development Ab Pressure sensor
US5249469A (en) * 1988-05-17 1993-10-05 Jonsson & Billquist Development Ab Pressure gauge
EP0351701A3 (en) * 1988-07-22 1991-06-26 Endress u. Hauser GmbH u. Co. Pressure transducer and its manufacturing process
EP0351701A2 (en) * 1988-07-22 1990-01-24 Endress u. Hauser GmbH u. Co. Pressure transducer and its manufacturing process
US5321989A (en) * 1990-02-12 1994-06-21 Fraunhofer-Gesellschaft Zur Forderung Der Angewandten Forschung E.V. Integratable capacitative pressure sensor and process for its manufacture
DE4042336A1 (en) * 1990-02-12 1991-08-14 Fraunhofer Ges Forschung Integrated capacitive press sensor device - has capacitive sensor and capacitive reference element formed side-by-side on common substrate
DE4042335A1 (en) * 1990-02-12 1991-08-14 Fraunhofer Ges Forschung Integrated capacitive press sensor - uses switched capacitor capacitance measuring circuit including operational amplifier
DE4004179A1 (en) * 1990-02-12 1991-08-14 Fraunhofer Ges Forschung thereof integratable, capacitive pressure sensor and method for manufacturing
US5431057A (en) * 1990-02-12 1995-07-11 Fraunhofer-Gesellschaft Zur Forderung Der Angewandten Forschung E.V. Integratable capacitative pressure sensor
EP0520352A2 (en) * 1991-06-22 1992-12-30 Toyoda Koki Kabushiki Kaisha Capacitive sensing device
EP0520352A3 (en) * 1991-06-22 1994-04-13 Toyoda Machine Works Ltd
EP0639761A1 (en) * 1993-06-25 1995-02-22 CSEM, Centre Suisse d'Electronique et de Microtechnique S.A. Capacitive differential pressure transducer
US6484585B1 (en) 1995-02-28 2002-11-26 Rosemount Inc. Pressure sensor for a pressure transmitter
US5637802A (en) * 1995-02-28 1997-06-10 Rosemount Inc. Capacitive pressure sensor for a pressure transmitted where electric field emanates substantially from back sides of plates
US5665899A (en) * 1996-02-23 1997-09-09 Rosemount Inc. Pressure sensor diagnostics in a process transmitter
US5808205A (en) * 1997-04-01 1998-09-15 Rosemount Inc. Eccentric capacitive pressure sensor
US6267009B1 (en) 1998-12-14 2001-07-31 Endress + Hauser Gmbh + Co. Capacitive pressure sensor cells or differential pressure sensor cells and methods for manufacturing the same
EP1039284A1 (en) * 1999-03-24 2000-09-27 ENVEC Mess- und Regeltechnik GmbH + Co. Capacitive sensor of pressure or differential pressure
EP1039283A1 (en) * 1999-03-24 2000-09-27 ENVEC Mess- und Regeltechnik GmbH + Co. Capacitive pressure sensor or capacitive differential pressure sensor
US6374680B1 (en) 1999-03-24 2002-04-23 Endress + Hauser Gmbh + Co. Capacitive pressure sensor or capacitive differential pressure sensor
US6520020B1 (en) 2000-01-06 2003-02-18 Rosemount Inc. Method and apparatus for a direct bonded isolated pressure sensor
US6505516B1 (en) 2000-01-06 2003-01-14 Rosemount Inc. Capacitive pressure sensing with moving dielectric
US6508129B1 (en) 2000-01-06 2003-01-21 Rosemount Inc. Pressure sensor capsule with improved isolation
US6516671B2 (en) 2000-01-06 2003-02-11 Rosemount Inc. Grain growth of electrical interconnection for microelectromechanical systems (MEMS)
US6561038B2 (en) 2000-01-06 2003-05-13 Rosemount Inc. Sensor with fluid isolation barrier
WO2002027803A1 (en) * 2000-09-29 2002-04-04 Yamatake Corporation Pressure sensor and method for manufacturing pressure sensor

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Legal Events

Date Code Title Description
8139 Disposal/non-payment of the annual fee