JPS61163180A - 寸法精度および耐摩耗性の優れた炭化珪素質複合体の製造方法 - Google Patents

寸法精度および耐摩耗性の優れた炭化珪素質複合体の製造方法

Info

Publication number
JPS61163180A
JPS61163180A JP60003808A JP380885A JPS61163180A JP S61163180 A JPS61163180 A JP S61163180A JP 60003808 A JP60003808 A JP 60003808A JP 380885 A JP380885 A JP 380885A JP S61163180 A JPS61163180 A JP S61163180A
Authority
JP
Japan
Prior art keywords
silicon carbide
sintered body
porous
less
porous silicon
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP60003808A
Other languages
English (en)
Japanese (ja)
Other versions
JPH034514B2 (enrdf_load_stackoverflow
Inventor
輝代隆 塚田
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Ibiden Co Ltd
Original Assignee
Ibiden Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Ibiden Co Ltd filed Critical Ibiden Co Ltd
Priority to JP60003808A priority Critical patent/JPS61163180A/ja
Publication of JPS61163180A publication Critical patent/JPS61163180A/ja
Publication of JPH034514B2 publication Critical patent/JPH034514B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Ceramic Products (AREA)
JP60003808A 1985-01-11 1985-01-11 寸法精度および耐摩耗性の優れた炭化珪素質複合体の製造方法 Granted JPS61163180A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP60003808A JPS61163180A (ja) 1985-01-11 1985-01-11 寸法精度および耐摩耗性の優れた炭化珪素質複合体の製造方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP60003808A JPS61163180A (ja) 1985-01-11 1985-01-11 寸法精度および耐摩耗性の優れた炭化珪素質複合体の製造方法

Publications (2)

Publication Number Publication Date
JPS61163180A true JPS61163180A (ja) 1986-07-23
JPH034514B2 JPH034514B2 (enrdf_load_stackoverflow) 1991-01-23

Family

ID=11567489

Family Applications (1)

Application Number Title Priority Date Filing Date
JP60003808A Granted JPS61163180A (ja) 1985-01-11 1985-01-11 寸法精度および耐摩耗性の優れた炭化珪素質複合体の製造方法

Country Status (1)

Country Link
JP (1) JPS61163180A (enrdf_load_stackoverflow)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6461374A (en) * 1987-09-01 1989-03-08 Tokai Konetsu Kogyo Kk Silicon carbide structural material for heating furnace
JPS6472971A (en) * 1987-09-16 1989-03-17 Tokai Konetsu Kogyo Kk Method for joining sintered silicon carbide body
JPH01264969A (ja) * 1988-03-25 1989-10-23 Toyo Tanso Kk β−炭化珪素成形体及びその製造法
JP2011073906A (ja) * 2009-09-29 2011-04-14 Taiheiyo Cement Corp 多孔質SiC成形体、SiC/Si複合材料及びその製造方法

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5416521A (en) * 1977-07-07 1979-02-07 Shinetsu Chemical Co Method of making silicon carbide molded body
JPS56134574A (en) * 1980-02-15 1981-10-21 Kernforschungsanlage Juelich Armament plate

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5416521A (en) * 1977-07-07 1979-02-07 Shinetsu Chemical Co Method of making silicon carbide molded body
JPS56134574A (en) * 1980-02-15 1981-10-21 Kernforschungsanlage Juelich Armament plate

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6461374A (en) * 1987-09-01 1989-03-08 Tokai Konetsu Kogyo Kk Silicon carbide structural material for heating furnace
JPS6472971A (en) * 1987-09-16 1989-03-17 Tokai Konetsu Kogyo Kk Method for joining sintered silicon carbide body
JPH01264969A (ja) * 1988-03-25 1989-10-23 Toyo Tanso Kk β−炭化珪素成形体及びその製造法
JP2011073906A (ja) * 2009-09-29 2011-04-14 Taiheiyo Cement Corp 多孔質SiC成形体、SiC/Si複合材料及びその製造方法

Also Published As

Publication number Publication date
JPH034514B2 (enrdf_load_stackoverflow) 1991-01-23

Similar Documents

Publication Publication Date Title
US4179299A (en) Sintered alpha silicon carbide ceramic body having equiaxed microstructure
US4346049A (en) Sintered alpha silicon carbide ceramic body having equiaxed microstructure
EP0277085B1 (en) Production of metal carbide articles
IE45842B1 (en) Method of producing high density silicon carbide product
US4019913A (en) Process for fabricating silicon carbide articles
JPH01172290A (ja) 耐熱性複合体及びその製造方法
US4237085A (en) Method of producing a high density silicon carbide product
US4332755A (en) Sintered silicon carbide - aluminum nitride articles and method of making such articles
US5401694A (en) Production of metal carbide articles
JPS6311589A (ja) 耐熱性治具及びその製造方法
JPS61132575A (ja) 炭化ケイ素質複合体
JPS61163180A (ja) 寸法精度および耐摩耗性の優れた炭化珪素質複合体の製造方法
US5254509A (en) Production of metal carbide articles
US5082807A (en) Production of metal carbide articles
JPS61143686A (ja) 寸法精度の優れた耐熱性治具用炭化珪素質焼結体
JPS61174182A (ja) 寸法精度と摺動特性の優れた炭化珪素質複合体の製造方法
JP2690774B2 (ja) 多孔質炭化珪素焼結体及びその製造方法
JP3966911B2 (ja) 炉内部材及び治具
JPS62138377A (ja) 炭化珪素質複合材料
JPH0736381B2 (ja) 耐熱性治具とその製造方法
JPH08175871A (ja) 炭化珪素質焼結体およびその製造方法
JPH0224789B2 (enrdf_load_stackoverflow)
JPH01115888A (ja) 半導体製造用治具の製造方法
JPS58125667A (ja) 複合炭化珪素焼結成形体
JPS6256368A (ja) 炭化ケイ素焼結体の製造方法

Legal Events

Date Code Title Description
EXPY Cancellation because of completion of term