JPS61155804A - 光学式水膜厚計 - Google Patents

光学式水膜厚計

Info

Publication number
JPS61155804A
JPS61155804A JP59275680A JP27568084A JPS61155804A JP S61155804 A JPS61155804 A JP S61155804A JP 59275680 A JP59275680 A JP 59275680A JP 27568084 A JP27568084 A JP 27568084A JP S61155804 A JPS61155804 A JP S61155804A
Authority
JP
Japan
Prior art keywords
water film
film thickness
signal
light
amplifier
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP59275680A
Other languages
English (en)
Japanese (ja)
Inventor
Suzuo Odajima
小田嶋 鈴雄
Takao Hida
隆夫 飛田
Mitsuru Mitamura
三田村 充
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toshiba Electro Wave Products Co Ltd
Shibaura Machine Co Ltd
Original Assignee
Toshiba Machine Co Ltd
Toshiba Electronic Systems Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toshiba Machine Co Ltd, Toshiba Electronic Systems Co Ltd filed Critical Toshiba Machine Co Ltd
Priority to JP59275680A priority Critical patent/JPS61155804A/ja
Priority to US06/810,257 priority patent/US4687333A/en
Priority to DE19853545366 priority patent/DE3545366A1/de
Publication of JPS61155804A publication Critical patent/JPS61155804A/ja
Pending legal-status Critical Current

Links

Classifications

    • GPHYSICS
    • G01MEASURING; TESTING
    • G01BMEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00Measuring arrangements characterised by the use of optical techniques
    • G01B11/02Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness
    • G01B11/06Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness for measuring thickness ; e.g. of sheet material
    • G01B11/0616Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness for measuring thickness ; e.g. of sheet material of coating
    • G01B11/0625Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness for measuring thickness ; e.g. of sheet material of coating with measurement of absorption or reflection
    • G01B11/0633Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness for measuring thickness ; e.g. of sheet material of coating with measurement of absorption or reflection using one or more discrete wavelengths

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Length Measuring Devices By Optical Means (AREA)
JP59275680A 1984-12-28 1984-12-28 光学式水膜厚計 Pending JPS61155804A (ja)

Priority Applications (3)

Application Number Priority Date Filing Date Title
JP59275680A JPS61155804A (ja) 1984-12-28 1984-12-28 光学式水膜厚計
US06/810,257 US4687333A (en) 1984-12-28 1985-12-18 Measuring apparatus for optically measuring the thickness of a water film
DE19853545366 DE3545366A1 (de) 1984-12-28 1985-12-20 Messvorrichtung zur optischen bestimmung der dicke eines wasserfilmes

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP59275680A JPS61155804A (ja) 1984-12-28 1984-12-28 光学式水膜厚計

Publications (1)

Publication Number Publication Date
JPS61155804A true JPS61155804A (ja) 1986-07-15

Family

ID=17558848

Family Applications (1)

Application Number Title Priority Date Filing Date
JP59275680A Pending JPS61155804A (ja) 1984-12-28 1984-12-28 光学式水膜厚計

Country Status (3)

Country Link
US (1) US4687333A (enExample)
JP (1) JPS61155804A (enExample)
DE (1) DE3545366A1 (enExample)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2008175757A (ja) * 2007-01-22 2008-07-31 Yokohama Rubber Co Ltd:The ウェット路面試験機

Families Citing this family (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB8601176D0 (en) * 1986-01-17 1986-02-19 Infrared Eng Ltd Sensing
JPS62232506A (ja) * 1986-04-01 1987-10-13 Chugai Ro Kogyo Kaisha Ltd 表面層厚測定装置
GB2191574B (en) * 1986-06-16 1989-12-20 Philips Electronic Associated Method of and apparatus for spectroscopically analysing samples
US5042949A (en) * 1989-03-17 1991-08-27 Greenberg Jeffrey S Optical profiler for films and substrates
US5436725A (en) * 1993-10-12 1995-07-25 Hughes Aircraft Company Cofocal optical system for thickness measurements of patterned wafers
JPH11194091A (ja) * 1997-08-20 1999-07-21 Daimler Benz Ag 車道表面の状態を求める方法及びこの方法を実施する装置
DE59706774D1 (de) 1997-09-09 2002-05-02 Boschung Mecatronic Ag Granges Verfahren und Vorrichtung zur Erzeugung eines Signals in Abhängigkeit eines Flüssigkeitsfilmes auf einer Fläche
FR2872897B1 (fr) * 2004-07-06 2006-10-13 Commissariat Energie Atomique Dispositif optique de mesure de l'epaisseur d'un milieu au moins partiellement transparent
DE102007013830B4 (de) * 2007-03-22 2008-12-18 Küpper-Weisser GmbH Verfahren und Vorrichtung zur Ermittlung der sich auf einer Fahrbahndecke befindlichen H2O-Menge

Family Cites Families (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3017512A (en) * 1959-06-29 1962-01-16 American Can Co Coating thickness gauge
IT1033240B (it) * 1974-03-14 1979-07-10 Grapho Metronic Gmbh & Co Umidificatore in una macchina stampatrice offset con un dispositivo per la regolazione del quantitativo d acqua sulla piastra
US4076424A (en) * 1976-03-24 1978-02-28 E. I. Du Pont De Nemours And Company Multi-channel implicit ratio computer for sequential signals
CH604535A5 (enExample) * 1976-04-29 1978-09-15 Karl Hofstetter
DE3148293C2 (de) * 1981-12-05 1984-02-09 Paragerm France, 75002 Paris Vorrichtung zum Überwachen der Entfernung einer Zerstäubungseinrichtung, insbesondere einer Spritzpistole von einem zu besprühenden Objekt, insbesondere einer Wand
JPS58115306A (ja) * 1981-12-29 1983-07-09 Chugai Ro Kogyo Kaisha Ltd 塗膜厚連続測定装置
DE3221935A1 (de) * 1982-06-11 1984-02-16 M W Stoelzel Kg Industrievertr Elektronisches kfz-abstandmessgeraet

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2008175757A (ja) * 2007-01-22 2008-07-31 Yokohama Rubber Co Ltd:The ウェット路面試験機

Also Published As

Publication number Publication date
DE3545366A1 (de) 1986-07-03
DE3545366C2 (enExample) 1992-08-27
US4687333A (en) 1987-08-18

Similar Documents

Publication Publication Date Title
JPH0428005Y2 (enExample)
JPH09122128A (ja) 測定条件再現具ならびに測定条件再現方法およびそれ を利用した生体情報測定装置
JP2798112B2 (ja) ウェーハノッチ寸法測定装置及び方法
US4687333A (en) Measuring apparatus for optically measuring the thickness of a water film
JP2001074637A (ja) 動的光散乱式粒径分布測定システム
JPS61120004A (ja) 水およびインキ量測定装置
JP2005006905A (ja) 脈波データの処理装置
Schaham Precision optical wavefront measurement
JPH03237310A (ja) X線厚み計
JP2002000139A (ja) 魚釣用リールの糸長計測方法及び魚釣用リール
JPS6063406A (ja) 放射線厚さ計
JPH07103722A (ja) 複合シートの厚さ測定方法
JPH03295475A (ja) 表面電位測定装置
JPS6344106A (ja) 膜厚測定方法
JP3479515B2 (ja) 変位測定装置および方法
JPH0415521A (ja) 計測機器の調整装置
JPH10274570A (ja) 赤外線応力表示装置
JPS623609A (ja) 測距装置
JPH02236411A (ja) 距離測定装置
JP2003315365A (ja) 電力量計の試験標検出器
JPH11128179A (ja) 放射温度計
JPH02272304A (ja) 光軸移動測定器
JPH04160348A (ja) 赤外線水分測定装置
JPS62254082A (ja) 音源探査装置
JPH04138333A (ja) 偏心測定装置