JPS61151014A - 金属炭化物超微粉末製造方法 - Google Patents

金属炭化物超微粉末製造方法

Info

Publication number
JPS61151014A
JPS61151014A JP59270715A JP27071584A JPS61151014A JP S61151014 A JPS61151014 A JP S61151014A JP 59270715 A JP59270715 A JP 59270715A JP 27071584 A JP27071584 A JP 27071584A JP S61151014 A JPS61151014 A JP S61151014A
Authority
JP
Japan
Prior art keywords
metal carbide
ultrafine powder
metal
solid
gas
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP59270715A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0377125B2 (enExample
Inventor
Hitoshi Kondo
均 近藤
Hiroaki Kawamura
裕明 川村
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Ulvac Inc
Original Assignee
Ulvac Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Ulvac Inc filed Critical Ulvac Inc
Priority to JP59270715A priority Critical patent/JPS61151014A/ja
Publication of JPS61151014A publication Critical patent/JPS61151014A/ja
Publication of JPH0377125B2 publication Critical patent/JPH0377125B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Carbon And Carbon Compounds (AREA)
JP59270715A 1984-12-24 1984-12-24 金属炭化物超微粉末製造方法 Granted JPS61151014A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP59270715A JPS61151014A (ja) 1984-12-24 1984-12-24 金属炭化物超微粉末製造方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP59270715A JPS61151014A (ja) 1984-12-24 1984-12-24 金属炭化物超微粉末製造方法

Publications (2)

Publication Number Publication Date
JPS61151014A true JPS61151014A (ja) 1986-07-09
JPH0377125B2 JPH0377125B2 (enExample) 1991-12-09

Family

ID=17489949

Family Applications (1)

Application Number Title Priority Date Filing Date
JP59270715A Granted JPS61151014A (ja) 1984-12-24 1984-12-24 金属炭化物超微粉末製造方法

Country Status (1)

Country Link
JP (1) JPS61151014A (enExample)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN107324807A (zh) * 2017-06-20 2017-11-07 西安交通大学 一种低压高能SiC半导体电嘴材料的制备方法

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS55159147A (en) * 1979-05-30 1980-12-11 Matsushita Electric Ind Co Ltd Production of sensor
JPS589807A (ja) * 1981-07-10 1983-01-20 Showa Denko Kk 高純度SiCの製造法
JPS5827980A (ja) * 1981-08-12 1983-02-18 Toshiba Corp 真空蒸着法
JPS5845105A (ja) * 1981-09-09 1983-03-16 Ryoji Ueda 炭化珪素の超微粉末製造装置

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS55159147A (en) * 1979-05-30 1980-12-11 Matsushita Electric Ind Co Ltd Production of sensor
JPS589807A (ja) * 1981-07-10 1983-01-20 Showa Denko Kk 高純度SiCの製造法
JPS5827980A (ja) * 1981-08-12 1983-02-18 Toshiba Corp 真空蒸着法
JPS5845105A (ja) * 1981-09-09 1983-03-16 Ryoji Ueda 炭化珪素の超微粉末製造装置

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN107324807A (zh) * 2017-06-20 2017-11-07 西安交通大学 一种低压高能SiC半导体电嘴材料的制备方法

Also Published As

Publication number Publication date
JPH0377125B2 (enExample) 1991-12-09

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