JPH0377125B2 - - Google Patents
Info
- Publication number
- JPH0377125B2 JPH0377125B2 JP59270715A JP27071584A JPH0377125B2 JP H0377125 B2 JPH0377125 B2 JP H0377125B2 JP 59270715 A JP59270715 A JP 59270715A JP 27071584 A JP27071584 A JP 27071584A JP H0377125 B2 JPH0377125 B2 JP H0377125B2
- Authority
- JP
- Japan
- Prior art keywords
- solid
- metal
- gas
- metal carbide
- evaporation
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
Landscapes
- Carbon And Carbon Compounds (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP59270715A JPS61151014A (ja) | 1984-12-24 | 1984-12-24 | 金属炭化物超微粉末製造方法 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP59270715A JPS61151014A (ja) | 1984-12-24 | 1984-12-24 | 金属炭化物超微粉末製造方法 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS61151014A JPS61151014A (ja) | 1986-07-09 |
| JPH0377125B2 true JPH0377125B2 (enExample) | 1991-12-09 |
Family
ID=17489949
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP59270715A Granted JPS61151014A (ja) | 1984-12-24 | 1984-12-24 | 金属炭化物超微粉末製造方法 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS61151014A (enExample) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN107324807B (zh) * | 2017-06-20 | 2020-05-22 | 西安交通大学 | 一种低压高能SiC半导体电嘴材料的制备方法 |
Family Cites Families (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS55159147A (en) * | 1979-05-30 | 1980-12-11 | Matsushita Electric Ind Co Ltd | Production of sensor |
| JPS589807A (ja) * | 1981-07-10 | 1983-01-20 | Showa Denko Kk | 高純度ＳｉＣの製造法 |
| JPS5827980A (ja) * | 1981-08-12 | 1983-02-18 | Toshiba Corp | 真空蒸着法 |
| JPS5917045B2 (ja) * | 1981-09-09 | 1984-04-19 | 良二 上田 | 炭化珪素の超微粉末製造装置 |
-
1984
- 1984-12-24 JP JP59270715A patent/JPS61151014A/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS61151014A (ja) | 1986-07-09 |
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