JPS61108137A - 円形基板の位置決め装置 - Google Patents

円形基板の位置決め装置

Info

Publication number
JPS61108137A
JPS61108137A JP59230634A JP23063484A JPS61108137A JP S61108137 A JPS61108137 A JP S61108137A JP 59230634 A JP59230634 A JP 59230634A JP 23063484 A JP23063484 A JP 23063484A JP S61108137 A JPS61108137 A JP S61108137A
Authority
JP
Japan
Prior art keywords
wafer
roller
positioning
rollers
center
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP59230634A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0560260B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html
Inventor
Hiroshi Tanaka
博 田中
Yukio Kakizaki
幸雄 柿崎
Hiromitsu Iwata
岩田　浩満
Takeshi Naraki
剛 楢木
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Nikon Corp
Original Assignee
Nippon Kogaku KK
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nippon Kogaku KK filed Critical Nippon Kogaku KK
Priority to JP59230634A priority Critical patent/JPS61108137A/ja
Priority to US06/729,968 priority patent/US4655584A/en
Publication of JPS61108137A publication Critical patent/JPS61108137A/ja
Publication of JPH0560260B2 publication Critical patent/JPH0560260B2/ja
Granted legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/70—Microphotolithographic exposure; Apparatus therefor
    • G03F7/70691—Handling of masks or workpieces
    • G03F7/70733—Handling masks and workpieces, e.g. exchange of workpiece or mask, transport of workpiece or mask
    • G03F7/7075—Handling workpieces outside exposure position, e.g. SMIF box

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
  • Jigs For Machine Tools (AREA)
JP59230634A 1984-05-11 1984-11-01 円形基板の位置決め装置 Granted JPS61108137A (ja)

Priority Applications (2)

Application Number Priority Date Filing Date Title
JP59230634A JPS61108137A (ja) 1984-11-01 1984-11-01 円形基板の位置決め装置
US06/729,968 US4655584A (en) 1984-05-11 1985-05-03 Substrate positioning apparatus

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP59230634A JPS61108137A (ja) 1984-11-01 1984-11-01 円形基板の位置決め装置

Publications (2)

Publication Number Publication Date
JPS61108137A true JPS61108137A (ja) 1986-05-26
JPH0560260B2 JPH0560260B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1993-09-01

Family

ID=16910860

Family Applications (1)

Application Number Title Priority Date Filing Date
JP59230634A Granted JPS61108137A (ja) 1984-05-11 1984-11-01 円形基板の位置決め装置

Country Status (1)

Country Link
JP (1) JPS61108137A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH04136681U (ja) * 1991-06-11 1992-12-18 株式会社明電舎 着脱用架台

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH04136681U (ja) * 1991-06-11 1992-12-18 株式会社明電舎 着脱用架台

Also Published As

Publication number Publication date
JPH0560260B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1993-09-01

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Legal Events

Date Code Title Description
EXPY Cancellation because of completion of term