JPS6110271A - 半導体装置 - Google Patents

半導体装置

Info

Publication number
JPS6110271A
JPS6110271A JP60093606A JP9360685A JPS6110271A JP S6110271 A JPS6110271 A JP S6110271A JP 60093606 A JP60093606 A JP 60093606A JP 9360685 A JP9360685 A JP 9360685A JP S6110271 A JPS6110271 A JP S6110271A
Authority
JP
Japan
Prior art keywords
film
conductive film
memory cell
insulating film
capacitor
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP60093606A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0321103B2 (enrdf_load_stackoverflow
Inventor
Mitsumasa Koyanagi
光正 小柳
Kikuji Sato
佐藤　喜久治
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP60093606A priority Critical patent/JPS6110271A/ja
Publication of JPS6110271A publication Critical patent/JPS6110271A/ja
Publication of JPH0321103B2 publication Critical patent/JPH0321103B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10B—ELECTRONIC MEMORY DEVICES
    • H10B12/00—Dynamic random access memory [DRAM] devices
    • H10B12/30—DRAM devices comprising one-transistor - one-capacitor [1T-1C] memory cells
    • H10B12/31—DRAM devices comprising one-transistor - one-capacitor [1T-1C] memory cells having a storage electrode stacked over the transistor

Landscapes

  • Semiconductor Integrated Circuits (AREA)
  • Semiconductor Memories (AREA)
JP60093606A 1985-05-02 1985-05-02 半導体装置 Granted JPS6110271A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP60093606A JPS6110271A (ja) 1985-05-02 1985-05-02 半導体装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP60093606A JPS6110271A (ja) 1985-05-02 1985-05-02 半導体装置

Related Parent Applications (1)

Application Number Title Priority Date Filing Date
JP2268577A Division JPS53108392A (en) 1976-07-05 1977-03-04 Semiconductor device

Publications (2)

Publication Number Publication Date
JPS6110271A true JPS6110271A (ja) 1986-01-17
JPH0321103B2 JPH0321103B2 (enrdf_load_stackoverflow) 1991-03-20

Family

ID=14086987

Family Applications (1)

Application Number Title Priority Date Filing Date
JP60093606A Granted JPS6110271A (ja) 1985-05-02 1985-05-02 半導体装置

Country Status (1)

Country Link
JP (1) JPS6110271A (enrdf_load_stackoverflow)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6477158A (en) * 1987-09-18 1989-03-23 Sony Corp Memory device
JPH03263330A (ja) * 1990-03-13 1991-11-22 Mitsubishi Electric Corp 半導体装置
JPH0443674A (ja) * 1990-06-11 1992-02-13 Matsushita Electron Corp 半導体記憶装置およびその製造方法
US6000748A (en) * 1996-01-29 1999-12-14 Mc Micro Compact Car Aktiengesellschaft Motor vehicle having a body support structure and assembly template

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6477158A (en) * 1987-09-18 1989-03-23 Sony Corp Memory device
JPH03263330A (ja) * 1990-03-13 1991-11-22 Mitsubishi Electric Corp 半導体装置
JPH0443674A (ja) * 1990-06-11 1992-02-13 Matsushita Electron Corp 半導体記憶装置およびその製造方法
US6000748A (en) * 1996-01-29 1999-12-14 Mc Micro Compact Car Aktiengesellschaft Motor vehicle having a body support structure and assembly template

Also Published As

Publication number Publication date
JPH0321103B2 (enrdf_load_stackoverflow) 1991-03-20

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