JPS61101030A - 微細パタ−ン形成法 - Google Patents

微細パタ−ン形成法

Info

Publication number
JPS61101030A
JPS61101030A JP59223352A JP22335284A JPS61101030A JP S61101030 A JPS61101030 A JP S61101030A JP 59223352 A JP59223352 A JP 59223352A JP 22335284 A JP22335284 A JP 22335284A JP S61101030 A JPS61101030 A JP S61101030A
Authority
JP
Japan
Prior art keywords
pattern
mask
film
resist
forming
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP59223352A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0462451B2 (enExample
Inventor
Keiichi Betsui
圭一 別井
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fujitsu Ltd
Original Assignee
Fujitsu Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fujitsu Ltd filed Critical Fujitsu Ltd
Priority to JP59223352A priority Critical patent/JPS61101030A/ja
Publication of JPS61101030A publication Critical patent/JPS61101030A/ja
Publication of JPH0462451B2 publication Critical patent/JPH0462451B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H10P50/00—

Landscapes

  • Drying Of Semiconductors (AREA)
  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
JP59223352A 1984-10-24 1984-10-24 微細パタ−ン形成法 Granted JPS61101030A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP59223352A JPS61101030A (ja) 1984-10-24 1984-10-24 微細パタ−ン形成法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP59223352A JPS61101030A (ja) 1984-10-24 1984-10-24 微細パタ−ン形成法

Publications (2)

Publication Number Publication Date
JPS61101030A true JPS61101030A (ja) 1986-05-19
JPH0462451B2 JPH0462451B2 (enExample) 1992-10-06

Family

ID=16796815

Family Applications (1)

Application Number Title Priority Date Filing Date
JP59223352A Granted JPS61101030A (ja) 1984-10-24 1984-10-24 微細パタ−ン形成法

Country Status (1)

Country Link
JP (1) JPS61101030A (enExample)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH04332114A (ja) * 1990-09-17 1992-11-19 Hyundai Electron Ind Co Ltd 半導体装置のマスクパターン形成方法

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH04332114A (ja) * 1990-09-17 1992-11-19 Hyundai Electron Ind Co Ltd 半導体装置のマスクパターン形成方法

Also Published As

Publication number Publication date
JPH0462451B2 (enExample) 1992-10-06

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