JPS608426Y2 - 半導体ウエハ−の保持基板 - Google Patents

半導体ウエハ−の保持基板

Info

Publication number
JPS608426Y2
JPS608426Y2 JP1976165080U JP16508076U JPS608426Y2 JP S608426 Y2 JPS608426 Y2 JP S608426Y2 JP 1976165080 U JP1976165080 U JP 1976165080U JP 16508076 U JP16508076 U JP 16508076U JP S608426 Y2 JPS608426 Y2 JP S608426Y2
Authority
JP
Japan
Prior art keywords
holding substrate
substrate
semiconductor wafer
bonding
resin
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP1976165080U
Other languages
English (en)
Japanese (ja)
Other versions
JPS5381567U (enExample
Inventor
征男 早川
照夫 堀井
崇道 前田
政男 玖村
保憲 千川
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Sharp Corp
Original Assignee
Sharp Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Sharp Corp filed Critical Sharp Corp
Priority to JP1976165080U priority Critical patent/JPS608426Y2/ja
Priority to US05/858,636 priority patent/US4247590A/en
Publication of JPS5381567U publication Critical patent/JPS5381567U/ja
Application granted granted Critical
Publication of JPS608426Y2 publication Critical patent/JPS608426Y2/ja
Expired legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L24/00—Arrangements for connecting or disconnecting semiconductor or solid-state bodies; Methods or apparatus related thereto
    • H01L24/80—Methods for connecting semiconductor or other solid state bodies using means for bonding being attached to, or being formed on, the surface to be connected
    • H01L24/83—Methods for connecting semiconductor or other solid state bodies using means for bonding being attached to, or being formed on, the surface to be connected using a layer connector
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L24/00—Arrangements for connecting or disconnecting semiconductor or solid-state bodies; Methods or apparatus related thereto
    • H01L24/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
    • H01L24/26—Layer connectors, e.g. plate connectors, solder or adhesive layers; Manufacturing methods related thereto
    • H01L24/28—Structure, shape, material or disposition of the layer connectors prior to the connecting process
    • H01L24/29—Structure, shape, material or disposition of the layer connectors prior to the connecting process of an individual layer connector
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
    • H01L2224/26—Layer connectors, e.g. plate connectors, solder or adhesive layers; Manufacturing methods related thereto
    • H01L2224/28—Structure, shape, material or disposition of the layer connectors prior to the connecting process
    • H01L2224/29—Structure, shape, material or disposition of the layer connectors prior to the connecting process of an individual layer connector
    • H01L2224/29001—Core members of the layer connector
    • H01L2224/29099—Material
    • H01L2224/2919—Material with a principal constituent of the material being a polymer, e.g. polyester, phenolic based polymer, epoxy
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/80—Methods for connecting semiconductor or other solid state bodies using means for bonding being attached to, or being formed on, the surface to be connected
    • H01L2224/83—Methods for connecting semiconductor or other solid state bodies using means for bonding being attached to, or being formed on, the surface to be connected using a layer connector
    • H01L2224/8319—Arrangement of the layer connectors prior to mounting
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/80—Methods for connecting semiconductor or other solid state bodies using means for bonding being attached to, or being formed on, the surface to be connected
    • H01L2224/83—Methods for connecting semiconductor or other solid state bodies using means for bonding being attached to, or being formed on, the surface to be connected using a layer connector
    • H01L2224/838—Bonding techniques
    • H01L2224/83801—Soldering or alloying
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
    • H01L2924/01—Chemical elements
    • H01L2924/01014—Silicon [Si]
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
    • H01L2924/01—Chemical elements
    • H01L2924/01082—Lead [Pb]
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
    • H01L2924/06—Polymers
    • H01L2924/0665—Epoxy resin
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
    • H01L2924/095—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00 with a principal constituent of the material being a combination of two or more materials provided in the groups H01L2924/013 - H01L2924/0715
    • H01L2924/097—Glass-ceramics, e.g. devitrified glass
    • H01L2924/09701—Low temperature co-fired ceramic [LTCC]
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K1/00—Printed circuits
    • H05K1/02—Details
    • H05K1/03—Use of materials for the substrate
    • H05K1/0306—Inorganic insulating substrates, e.g. ceramic, glass
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T428/00—Stock material or miscellaneous articles
    • Y10T428/24—Structurally defined web or sheet [e.g., overall dimension, etc.]
    • Y10T428/24802—Discontinuous or differential coating, impregnation or bond [e.g., artwork, printing, retouched photograph, etc.]
    • Y10T428/24926—Discontinuous or differential coating, impregnation or bond [e.g., artwork, printing, retouched photograph, etc.] including ceramic, glass, porcelain or quartz layer
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T428/00—Stock material or miscellaneous articles
    • Y10T428/249921—Web or sheet containing structurally defined element or component
    • Y10T428/249994—Composite having a component wherein a constituent is liquid or is contained within preformed walls [e.g., impregnant-filled, previously void containing component, etc.]

Landscapes

  • Engineering & Computer Science (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Wire Bonding (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
JP1976165080U 1976-12-08 1976-12-08 半導体ウエハ−の保持基板 Expired JPS608426Y2 (ja)

Priority Applications (2)

Application Number Priority Date Filing Date Title
JP1976165080U JPS608426Y2 (ja) 1976-12-08 1976-12-08 半導体ウエハ−の保持基板
US05/858,636 US4247590A (en) 1976-12-08 1977-12-08 Ceramic plate for supporting a semiconductor wafer

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1976165080U JPS608426Y2 (ja) 1976-12-08 1976-12-08 半導体ウエハ−の保持基板

Publications (2)

Publication Number Publication Date
JPS5381567U JPS5381567U (enExample) 1978-07-06
JPS608426Y2 true JPS608426Y2 (ja) 1985-03-25

Family

ID=15805482

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1976165080U Expired JPS608426Y2 (ja) 1976-12-08 1976-12-08 半導体ウエハ−の保持基板

Country Status (2)

Country Link
US (1) US4247590A (enExample)
JP (1) JPS608426Y2 (enExample)

Families Citing this family (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6046581A (ja) * 1983-08-24 1985-03-13 シャープ株式会社 フラットディスプレイパネル
DE3336606A1 (de) * 1983-10-07 1985-04-25 Siemens AG, 1000 Berlin und 8000 München Verfahren zur mikropackherstellung
US4585690A (en) * 1984-11-05 1986-04-29 Busse James G Cellular glass reinforced composite material
US4687693A (en) * 1985-06-13 1987-08-18 Stauffer Chemical Company Adhesively mountable die attach film
US4876221A (en) * 1988-05-03 1989-10-24 Matsushita Electric Industrial Co., Ltd. Bonding method
US5193732A (en) * 1991-10-04 1993-03-16 International Business Machines Corporation Apparatus and methods for making simultaneous electrical connections
US5288007A (en) * 1991-10-04 1994-02-22 International Business Machine Corporation Apparatus and methods for making simultaneous electrical connections
US20030092246A1 (en) * 2001-10-11 2003-05-15 Wanat Stanley F. Assembly system for stationing semiconductor wafer suitable for processing and process for manufacturing semiconductor wafer
JP2006135272A (ja) * 2003-12-01 2006-05-25 Tokyo Ohka Kogyo Co Ltd 基板のサポートプレート及びサポートプレートの剥離方法
JP4668052B2 (ja) * 2005-12-06 2011-04-13 東京応化工業株式会社 剥離装置

Family Cites Families (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2816348A (en) * 1955-06-23 1957-12-17 Westinghouse Electric Corp Resilient elastomeric electrical insulating tape
US2912382A (en) * 1957-09-05 1959-11-10 Gen Electric Electrical insulating structure and method of making the same
US3079282A (en) * 1960-05-24 1963-02-26 Martin N Halier Printed circuit on a ceramic base and method of making same
US3419412A (en) * 1965-08-19 1968-12-31 Kewanee Oil Co Process for coating with epoxy compositions
US3471312A (en) * 1965-10-21 1969-10-07 Morton Int Inc Epoxy coated substrate and method of making same
US3803075A (en) * 1969-08-01 1974-04-09 Ciba Geigy Corp Soluble polyimides from 2,6-diamino-s-triazines and dianhydrides
US3706409A (en) * 1970-02-26 1972-12-19 Gen Electric Semiconductor lead attachment system including a semiconductor pellet orientation plate
US3689357A (en) * 1970-12-10 1972-09-05 Gen Motors Corp Glass-polysilicon dielectric isolation
DE2310062A1 (de) * 1973-02-28 1974-08-29 Siemens Ag Dickschichtschaltung auf keramiksubstrat mit durchkontaktierungen zwischen den leiterzuegen auf beiden seiten des substrates
DE2429434B2 (de) * 1974-06-19 1979-10-04 Siemens Ag, 1000 Berlin Und 8000 Muenchen Verfahren zur Herstellung von Widerständen und Kondensatoren in Dunnschichtschaltungen
US4021100A (en) * 1974-09-03 1977-05-03 American Cyanamid Company Electrochromic device having an electrolyte contained in a solid porous insulating layer
US3958317A (en) * 1974-09-25 1976-05-25 Rockwell International Corporation Copper surface treatment for epoxy bonding

Also Published As

Publication number Publication date
US4247590A (en) 1981-01-27
JPS5381567U (enExample) 1978-07-06

Similar Documents

Publication Publication Date Title
CN101356633B (zh) 半导体裸片的封装方法以及通过该方法形成的裸片封装
US6723629B2 (en) Method and apparatus for attaching solder members to a substrate
JPH04348540A (ja) フリップチップボンダー
JPS608426Y2 (ja) 半導体ウエハ−の保持基板
CN101346812A (zh) 具有柔顺性端子安装装置的微电子元件及其制造方法
JPS5835367B2 (ja) 回路素子基板及びその製造方法
JP2008544554A (ja) 薄型可撓性基板を使用するフリップチップダイ組立体
JPH06168982A (ja) フリップチップ実装構造
JPH027181B2 (enExample)
JPH012331A (ja) 半導体装置の製造方法
WO1996013066A1 (en) Method of attaching integrated circuit dies by rolling adhesives onto semiconductor wafers
US7666714B2 (en) Assembly of thin die coreless package
JPS6313337A (ja) 半導体素子の実装方法
JPH11289146A (ja) 複合配線材及びその製造方法
JP3472342B2 (ja) 半導体装置の実装体の製造方法
JPS61113243A (ja) 混成集積回路の実装方法
JPH0158866B2 (enExample)
JP2005056620A (ja) 半導体ウエハーにおけるヒーター装置およびその製造方法
JP3711311B2 (ja) 半導体装置の製造方法
JPH07263487A (ja) 半導体装置の製造方法
JP3445687B2 (ja) 半導体チップの実装方法
JPS6115580B2 (enExample)
JPS6331127A (ja) 半導体装置用絶縁性基板
JPH09321067A (ja) 半導体装置の製造方法
JPS5927536A (ja) 半導体装置及びその製造方法